Authors:
Conley, W
Dean, K
Miller, D
Rich, G
Graffenberg, V
Patel, S
Lin, SH
Jamieson, A
Hung, R
Yamada, S
Pinnow, M
MacDonald, S
Chambers, C
Osborne, B
Patterson, K
Somervell, M
Trinque, B
Tran, HV
Cho, S
Chiba, T
Byers, J
Tomas, B
Shafer, G
DesMarteau, D
Klopp, J
Frechet, J
Sanders, D
Grubbs, R
Ober, C
Korner, H
Willson, CG
Citation: W. Conley et al., Developments in materials for 157nm photoresists, SOL ST TECH, 44(10), 2001, pp. 63
Authors:
Brodsky, C
Byers, J
Conley, W
Hung, R
Yamada, S
Patterson, K
Somervell, M
Trinque, B
Tran, HV
Cho, S
Chiba, T
Lin, SH
Jamieson, A
Johnson, H
Vander Heyden, T
Willson, CG
Citation: C. Brodsky et al., 157 nm resist materials: Progress report, J VAC SCI B, 18(6), 2000, pp. 3396-3401
Authors:
Postnikov, SV
Stewart, MD
Tran, HV
Nierode, MA
Medeiros, DR
Cao, T
Byers, J
Webber, SE
Wilson, CG
Citation: Sv. Postnikov et al., Study of resolution limits due to intrinsic bias in chemically amplified photoresists, J VAC SCI B, 17(6), 1999, pp. 3335-3338