Citation: M. Tanimoto et O. Vatel, KELVIN PROBE FORCE MICROSCOPY FOR CHARACTERIZATION OF SEMICONDUCTOR-DEVICES AND PROCESSES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 1547-1551
Citation: O. Vatel et M. Tanimoto, KELVIN PROBE FORCE MICROSCOPY FOR POTENTIAL DISTRIBUTION MEASUREMENT OF SEMICONDUCTOR-DEVICES, Journal of applied physics, 77(6), 1995, pp. 2358-2362
Authors:
CHAVEZPIRSON A
VATEL O
TANIMOTO M
ANDO H
IWAMURA H
KANBE H
Citation: A. Chavezpirson et al., NANOMETER-SCALE IMAGING OF POTENTIAL PROFILES IN OPTICALLY-EXCITED N-I-P-I HETEROSTRUCTURE USING KELVIN PROBE FORCE MICROSCOPY, Applied physics letters, 67(21), 1995, pp. 3069-3071
Authors:
VATEL O
ANDRE E
CHOLLET F
DUMAS P
SALVAN F
Citation: O. Vatel et al., ATOMIC-FORCE MICROSCOPY STUDIES OF POLYSILICON GROWTH DURING DEPOSITION ON SILICON, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 2037-2039
Authors:
VATEL O
VERHAVERBEKE S
BENDER H
CAYMAX M
CHOLLET F
VERMEIRE B
MERTENS P
ANDRE E
HEYNS M
Citation: O. Vatel et al., ATOMIC-FORCE MICROSCOPY AND INFRARED-SPECTROSCOPY STUDIES OF HYDROGENBAKED SI SURFACES, JPN J A P 2, 32(10B), 1993, pp. 120001489-120001491