Citation: A. Kamarou et al., Gettering of metal impurities to cavities formed by hydrogen and helium implantation in silicon, VACUUM, 63(4), 2001, pp. 609-612
Authors:
Zukowski, P
Partyka, J
Wegierek, P
Kozak, M
Citation: P. Zukowski et al., Comparison of permittivity of ion implanted silicon and silicon bombarded with neutrons, NUKLEONIKA, 44(2), 1999, pp. 281-284