Authors:
Goldberg, KA
Naulleau, P
Batson, P
Denham, P
Anderson, EH
Chapman, H
Bokor, J
Citation: Ka. Goldberg et al., Extreme ultraviolet alignment and testing of a four-mirror ring field extreme ultraviolet optical system, J VAC SCI B, 18(6), 2000, pp. 2911-2915
Authors:
Goodyear, AL
Mackenzie, S
Olynick, DL
Anderson, EH
Citation: Al. Goodyear et al., High resolution inductively coupled plasma etching of 30 nm lines and spaces in tungsten and silicon, J VAC SCI B, 18(6), 2000, pp. 3471-3475