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Results: 1-12 |
Results: 12
ETCH RATES OF CRYSTALLOGRAPHIC PLANES IN Z-CUT QUARTZ - EXPERIMENTS AND SIMULATION
Authors: RANGSTEN P HEDLUND C KATARDJIEV IV BACKLUND Y
Citation: P. Rangsten et al., ETCH RATES OF CRYSTALLOGRAPHIC PLANES IN Z-CUT QUARTZ - EXPERIMENTS AND SIMULATION, Journal of micromechanics and microengineering, 8(1), 1998, pp. 1-6
A LATERAL SYMMETRICALLY BISTABLE BUCKLED BEAM
Authors: VANGBO M BACKLUND Y
Citation: M. Vangbo et Y. Backlund, A LATERAL SYMMETRICALLY BISTABLE BUCKLED BEAM, Journal of micromechanics and microengineering, 8(1), 1998, pp. 29-32
PASSIVE AND FIXED ALIGNMENT OF DEVICES USING FLEXIBLE SILICON ELEMENTS FORMED BY SELECTIVE ETCHING
Authors: STRANDMAN C BACKLUND Y
Citation: C. Strandman et Y. Backlund, PASSIVE AND FIXED ALIGNMENT OF DEVICES USING FLEXIBLE SILICON ELEMENTS FORMED BY SELECTIVE ETCHING, Journal of micromechanics and microengineering, 8(1), 1998, pp. 39-44
BULK SILICON HOLDING STRUCTURES FOR MOUNTING OF OPTICAL FIBERS IN V-GROOVES
Authors: STRANDMAN C BACKLUND Y
Citation: C. Strandman et Y. Backlund, BULK SILICON HOLDING STRUCTURES FOR MOUNTING OF OPTICAL FIBERS IN V-GROOVES, Journal of microelectromechanical systems, 6(1), 1997, pp. 35-40
MICROMECHANICS IN OPTICAL MICROSYSTEMS - WITH FOCUS ON TELECOM SYSTEMS
Authors: BACKLUND Y
Citation: Y. Backlund, MICROMECHANICS IN OPTICAL MICROSYSTEMS - WITH FOCUS ON TELECOM SYSTEMS, Journal of micromechanics and microengineering, 7(3), 1997, pp. 93-98
METHOD FOR THE DETERMINATION OF THE ANGULAR-DEPENDENCE DURING DRY-ETCHING
Authors: HEDLUND C STRANDMAN C KATARDJIEV IV BACKLUND Y BERG S BLOM HO
Citation: C. Hedlund et al., METHOD FOR THE DETERMINATION OF THE ANGULAR-DEPENDENCE DURING DRY-ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(5), 1996, pp. 3239-3243
PRECISE MASK ALIGNMENT TO THE CRYSTALLOGRAPHIC ORIENTATION OF SILICON-WAFERS USING WET ANISOTROPIC ETCHING
Authors: VANGBO M BACKLUND Y
Citation: M. Vangbo et Y. Backlund, PRECISE MASK ALIGNMENT TO THE CRYSTALLOGRAPHIC ORIENTATION OF SILICON-WAFERS USING WET ANISOTROPIC ETCHING, Journal of micromechanics and microengineering, 6(2), 1996, pp. 279-284
TERRACING OF (100)SI WITH ONE MASK AND ONE ETCHING STEP USING MISALIGNED V-GROOVES
Authors: VANGBO M BACKLUND Y
Citation: M. Vangbo et Y. Backlund, TERRACING OF (100)SI WITH ONE MASK AND ONE ETCHING STEP USING MISALIGNED V-GROOVES, Journal of micromechanics and microengineering, 6(1), 1996, pp. 39-41
FABRICATION OF 45-DEGREES MIRRORS TOGETHER WITH WELL-DEFINED V-GROOVES USING WET ANISOTROPIC ETCHING OF SILICON
Authors: STRANDMAN C ROSENGREN L ELDERSTIG HGA BACKLUND Y
Citation: C. Strandman et al., FABRICATION OF 45-DEGREES MIRRORS TOGETHER WITH WELL-DEFINED V-GROOVES USING WET ANISOTROPIC ETCHING OF SILICON, Journal of microelectromechanical systems, 4(4), 1995, pp. 213-219
THE EFFECTS OF HF CLEANING PRIOR TO SILICON-WAFER BONDING
Authors: LJUNGBERG K BACKLUND Y SODERBARG A BERGH M ANDERSSON MO BENGTSSON S
Citation: K. Ljungberg et al., THE EFFECTS OF HF CLEANING PRIOR TO SILICON-WAFER BONDING, Journal of the Electrochemical Society, 142(4), 1995, pp. 1297-1303
A SYSTEM FOR PASSIVE IMPLANTABLE PRESSURE SENSORS
Authors: ROSENGREN L RANGSTEN P BACKLUND Y HOK B SVEDBERGH B SELEN G
Citation: L. Rosengren et al., A SYSTEM FOR PASSIVE IMPLANTABLE PRESSURE SENSORS, Sensors and actuators. A, Physical, 43(1-3), 1994, pp. 55-58
MICROMACHINED OPTICAL PLANES AND REFLECTORS IN SILICON
Authors: ROSENGREN L SMITH L BACKLUND Y
Citation: L. Rosengren et al., MICROMACHINED OPTICAL PLANES AND REFLECTORS IN SILICON, Sensors and actuators. A, Physical, 41(1-3), 1994, pp. 330-333
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