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Results: 1-8 |
Results: 8
COLLECTIVE WET ETCHING OF A 3D MONOLITHIC SILICON SEISMIC MASS SYSTEM
Authors: SCHROPFER G DELABACHELERIE M BALLANDRAS S BLIND P
Citation: G. Schropfer et al., COLLECTIVE WET ETCHING OF A 3D MONOLITHIC SILICON SEISMIC MASS SYSTEM, Journal of micromechanics and microengineering, 8(2), 1998, pp. 77-79
DIAGNOSTIC DECISION-SUPPORT IN SUSPECTED ACUTE APPENDICITIS - VALIDATION OF A SIMPLIFIED SCORING SYSTEM
Authors: FENYO G LINDBERG G BLIND P ENOCHSSON L OBERG A
Citation: G. Fenyo et al., DIAGNOSTIC DECISION-SUPPORT IN SUSPECTED ACUTE APPENDICITIS - VALIDATION OF A SIMPLIFIED SCORING SYSTEM, The European journal of surgery, 163(11), 1997, pp. 831-838
FABRICATION OF A NEW HIGHLY-SYMMETRICAL, INPLANE ACCELEROMETER STRUCTURE BY ANISOTROPIC ETCHING OF (100)SILICON
Authors: SCHROPFER G BALLANDRAS S DELABACHELERIE M BLIND P ANSEL Y
Citation: G. Schropfer et al., FABRICATION OF A NEW HIGHLY-SYMMETRICAL, INPLANE ACCELEROMETER STRUCTURE BY ANISOTROPIC ETCHING OF (100)SILICON, Journal of micromechanics and microengineering, 7(2), 1997, pp. 71-78
MICROGRIPPERS FABRICATED BY THE LIGA TECHNIQUE
Authors: BALLANDRAS S BASROUR S ROBERT L MEGTERT S BLIND P ROUILLAY M BERNEDE P DANIAU W
Citation: S. Ballandras et al., MICROGRIPPERS FABRICATED BY THE LIGA TECHNIQUE, Sensors and actuators. A, Physical, 58(3), 1997, pp. 265-272
DEEP-ETCH X-RAY-LITHOGRAPHY USING SILICON-GOLD MASKS FABRICATED BY DEEP-ETCH UV LITHOGRAPHY AND ELECTROFORMING
Authors: BALLANDRAS S DANIAU W BASROUR S ROBERT L ROUILLAY M BLIND P BERNEDE P ROBERT D ROCHER S HAUDEN D MEGTERT S LABEQUE A ZEWEN L DEXPERT H COMES R ROUSSEAUX F RAVERT MF LAUNOIS H
Citation: S. Ballandras et al., DEEP-ETCH X-RAY-LITHOGRAPHY USING SILICON-GOLD MASKS FABRICATED BY DEEP-ETCH UV LITHOGRAPHY AND ELECTROFORMING, Journal of micromechanics and microengineering, 5(3), 1995, pp. 203-208
3-DIMENSIONAL SILICON ELECTROSTATIC LINEAR MICROACTUATOR
Authors: TIROLE N HAUDEN D BLIND P FROELICHER M GAUDRIOT L
Citation: N. Tirole et al., 3-DIMENSIONAL SILICON ELECTROSTATIC LINEAR MICROACTUATOR, Sensors and actuators. A, Physical, 48(2), 1995, pp. 145-150
ALN SILICON LAMB-WAVE MICROSENSORS FOR PRESSURE AND GRAVIMETRIC MEASUREMENTS/
Authors: CHOUJAA A TIROLE N BONJOUR C MARTIN G HAUDEN D BLIND P CACHARD A POMMIER C
Citation: A. Choujaa et al., ALN SILICON LAMB-WAVE MICROSENSORS FOR PRESSURE AND GRAVIMETRIC MEASUREMENTS/, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 179-182
DEEP-ETCH LITHOGRAPHY AT LURE-DCI STORAGE-RING
Authors: MEGTERT S LABEQUE A LIU ZW DEXPERT H COMES R ROUSSEAUX F RAVET MF LAUNOIS H BALLANDRAS S DANIAU W BASROUR S ROUILLAY M BLIND P HAUDEN D
Citation: S. Megtert et al., DEEP-ETCH LITHOGRAPHY AT LURE-DCI STORAGE-RING, Journal de physique. IV, 4(C9), 1994, pp. 269-272
Risultati: 1-8 |