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Results: 1-25/54
Authors:
ROBBIE K
SIT JC
BRETT MJ
Citation: K. Robbie et al., ADVANCED TECHNIQUES FOR GLANCING ANGLE DEPOSITION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 1115-1122
Authors:
SHAFAI C
BRETT MJ
HRUDEY TM
Citation: C. Shafai et al., ETCH-INDUCED STRESS FAILURES OF SIO2 CANTILEVER BEAMS, Sensors and actuators. A, Physical, 70(3), 1998, pp. 283-290
Authors:
ROVIRA PI
YARUSSI RA
COLLINS RW
VENUGOPAL VC
LAKHTAKIA A
MESSIER R
ROBBIE K
BRETT MJ
Citation: Pi. Rovira et al., ROTATING-COMPENSATOR MULTICHANNEL TRANSMISSION ELLIPSOMETRY OF A THIN-FILM HELICOIDAL BIANISOTROPIC MEDIUM, Thin solid films, 313, 1998, pp. 373-378
Authors:
SMY T
TAN L
CHAN K
TAIT RN
BROUGHTON JN
DEW SK
BRETT MJ
Citation: T. Smy et al., A SIMULATION STUDY OF LONG THROW SPUTTERING FOR DIFFUSION BARRIER DEPOSITION INTO HIGH ASPECT VIAS AND CONTACTS, I.E.E.E. transactions on electron devices, 45(7), 1998, pp. 1414-1425
Authors:
GUI X
HASLETT JW
DEW SK
BRETT MJ
Citation: X. Gui et al., SIMULATION OF TEMPERATURE CYCLING EFFECTS ON ELECTROMIGRATION BEHAVIOR UNDER PULSED CURRENT STRESS, I.E.E.E. transactions on electron devices, 45(2), 1998, pp. 380-386
Authors:
FRIEDRICH LJ
GARDNER DS
DEW SK
BRETT MJ
SMY T
Citation: Lj. Friedrich et al., STUDY OF THE COPPER REFLOW PROCESS USING THE GROFILMS SIMULATOR, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(5), 1997, pp. 1780-1787
Authors:
SMY T
TAN L
WINTERTON SS
DEW SK
BRETT MJ
Citation: T. Smy et al., SIMULATION OF SPUTTER-DEPOSITION AT HIGH-PRESSURES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 2847-2853
Authors:
SHAFAI C
BRETT MJ
Citation: C. Shafai et Mj. Brett, OPTIMIZATION OF BI2TE3 THIN-FILMS FOR MICROINTEGRATED PELTIER HEAT-PUMPS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(5), 1997, pp. 2798-2801
Authors:
ROBBIE K
BRETT MJ
Citation: K. Robbie et Mj. Brett, SCULPTURED THIN-FILMS AND GLANCING ANGLE DEPOSITION - GROWTH MECHANICS AND APPLICATIONS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 1460-1465
Authors:
BACKHOUSE CJ
ESTE G
SIT JC
DEW SK
BRETT MJ
Citation: Cj. Backhouse et al., WSIX THIN-FILMS FOR RESISTORS, Thin solid films, 311(1-2), 1997, pp. 299-303
Authors:
ROBBIE K
HNATIW AJP
BRETT MJ
MACDONALD RI
MCMULLIN JN
Citation: K. Robbie et al., INHOMOGENEOUS THIN-FILM OPTICAL FILTERS FABRICATED USING GLANCING ANGLE DEPOSITION, Electronics Letters, 33(14), 1997, pp. 1213-1214
SIMULATION OF ELECTROLESS DEPOSITION OF CU THIN-FILMS FOR VERY LARGE-SCALE INTEGRATION METALLIZATION
Authors:
SMY T
TAN L
DEW SK
BRETT MJ
SHACHAMDIAMAND Y
DESILVA M
Citation: T. Smy et al., SIMULATION OF ELECTROLESS DEPOSITION OF CU THIN-FILMS FOR VERY LARGE-SCALE INTEGRATION METALLIZATION, Journal of the Electrochemical Society, 144(6), 1997, pp. 2115-2122
Authors:
ROVIRA PI
YARUSSI RA
COLLINS RW
MESSIER R
VENUGOPAL VC
LAKHTAKIA A
ROBBIE K
BRETT MJ
Citation: Pi. Rovira et al., TRANSMISSION ELLIPSOMETRY OF A THIN-FILM HELICOIDAL BIANISOTROPIC MEDIUM, Applied physics letters, 71(9), 1997, pp. 1180-1182
Authors:
LAKHTAKIA A
ROBBIE K
BRETT MJ
Citation: A. Lakhtakia et al., SPECTRAL GREENS-FUNCTION FOR WAVE EXCITATION AND PROPAGATION IN A PIEZOELECTRIC, CONTINUOUSLY TWISTED, STRUCTURALLY CHIRAL MEDIUM, The Journal of the Acoustical Society of America, 101(4), 1997, pp. 2052-2058
Authors:
SHEERGAR MK
SMY T
DEW SK
BRETT MJ
Citation: Mk. Sheergar et al., SIMULATION OF 3-DIMENSIONAL REFRACTORY-METAL STEP COVERAGE OVER CONTACT CUTS AND VIAS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 2595-2602
Authors:
TAIT RN
DEW SK
TSAI W
HODUL D
SMY T
BRETT MJ
Citation: Rn. Tait et al., SIMULATION OF UNIFORMITY AND LIFETIME EFFECTS IN COLLIMATED SPUTTERING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 679-686
Authors:
BROUGHTON JN
BRETT MJ
DEW SK
ESTE G
Citation: Jn. Broughton et al., TITANIUM SPUTTER-DEPOSITION AT LOW-PRESSURES AND LONG THROW DISTANCES, IEEE transactions on semiconductor manufacturing, 9(1), 1996, pp. 122-127
Authors:
GUI X
DEW SK
BRETT MJ
Citation: X. Gui et al., A GENERAL EXPRESSION OF BOUNDARY-CONDITIONS IN TLM DIFFUSION MODELING, International journal of numerical modelling, 9(6), 1996, pp. 459-461
Authors:
GUI X
DEW SK
BRETT MJ
Citation: X. Gui et al., TLM TREATMENT OF A GENERAL DIFFUSION FLUX BOUNDARY-CONDITION, International journal of numerical modelling, 9(5), 1996, pp. 327-333
Authors:
BACKHOUSE CJ
ROBBIE K
PARKS J
BROUGHTON JN
DEW S
ESTE G
BRETT MJ
Citation: Cj. Backhouse et al., ELECTROSTATIC SCATTERING OF IONIC SPECIES IN LOW-PRESSURE SPUTTERING OF TI AND TIN, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(4), 1996, pp. 2175-2181
Authors:
BACKHOUSE CJ
DEW SK
BRETT MJ
Citation: Cj. Backhouse et al., HOLLOW-CATHODE ASSISTED SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(4), 1996, pp. 2674-2676
Authors:
LEGG TH
BELL MB
KORNELSEN K
VANELDIK JF
ROUTLEDGE D
BRETT MJ
Citation: Th. Legg et al., DESIGN AND RESULTS FOR A 345 GHZ SIS FOCAL-PLANE ARRAY USING PLANAR TECHNOLOGY, International journal of infrared and millimeter waves, 17(1), 1996, pp. 79-90
Authors:
ROBBIE K
BRETT MJ
LAKHTAKIA A
Citation: K. Robbie et al., CHIRAL SCULPTURED THIN-FILMS, Nature, 384(6610), 1996, pp. 616-616
Authors:
GUI X
DEW SK
BRETT MJ
Citation: X. Gui et al., NUMERICAL-SOLUTION OF THE ELECTROMIGRATION BOUNDARY-VALUE PROBLEM UNDER PULSED DC CONDITIONS, Journal of applied physics, 80(9), 1996, pp. 4948-4951
Authors:
SHAFAI C
BRETT MJ
Citation: C. Shafai et Mj. Brett, A MICRO-INTEGRATED PELTIER HEAT-PUMP FOR LOCALIZED ON-CHIP TEMPERATURE CONTROL, Canadian journal of physics, 74, 1996, pp. 139-142