Authors:
ENG J
RAGHAVACHARI K
STRUCK LM
CHABAL YJ
BENT BE
BANASZAKHOLL MM
MCFEELY FR
MICHAELS AM
FLYNN GW
CHRISTMAN SB
CHABAN EE
WILLIAMS GP
RADERMACHER K
MANTL S
Citation: J. Eng et al., AN INFRARED STUDY OF H8SI8O12 CLUSTER ADSORPTION ON SI(100) SURFACES, The Journal of chemical physics, 108(20), 1998, pp. 8680-8688
Citation: Yj. Chabal et al., APPLICATIONS OF INFRARED-ABSORPTION SPECTROSCOPY TO THE MICROELECTRONIC INDUSTRY, Journal de physique. IV, 7(C6), 1997, pp. 3-17
Authors:
WELDON MK
MARSICO VE
CHABAL YJ
AGARWAL A
EAGLESHAM DJ
SAPJETA J
BROWN WL
JACOBSON DC
CAUDANO Y
CHRISTMAN SB
CHABAN EE
Citation: Mk. Weldon et al., ON THE MECHANISM OF THE HYDROGEN-INDUCED EXFOLIATION OF SILICON, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 1065-1073
Authors:
DUMAS P
SUHREN M
CHABAL YJ
HIRSCHMUGL CJ
WILLIAMS GP
Citation: P. Dumas et al., ADSORPTION AND REACTIVITY OF NO ON CU(111) - A SYNCHROTRON INFRARED REFLECTION-ABSORPTION SPECTROSCOPIC STUDY, Surface science, 371(2-3), 1997, pp. 200-212
Authors:
WELDON MK
CHABAL YJ
HAMANN DR
CHRISTMAN SB
CHABAN EE
FELDMAN LC
Citation: Mk. Weldon et al., PHYSICS AND CHEMISTRY OF SILICON-WAFER BONDING INVESTIGATED BY INFRARED-ABSORPTION SPECTROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 3095-3106
Authors:
WELDON MK
MARSICO VE
CHABAL YJ
HAMANN DR
CHRISTMAN SB
CHABAN EE
Citation: Mk. Weldon et al., INFRARED-SPECTROSCOPY AS A PROBE OF FUNDAMENTAL PROCESSES IN MICROELECTRONICS - SILICON-WAFER CLEANING AND BONDING, Surface science, 368, 1996, pp. 163-178
Citation: Es. Aydil et al., REAL-TIME IN-SITU MONITORING OF SURFACES DURING GLOW-DISCHARGE PROCESSING - NH3 AND H-2 PLASMA PASSIVATION OF GAAS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 258-267
Citation: Yj. Chabal et al., CHARACTERIZATION OF SILICON SURFACES AND INTERFACES BY OPTICAL VIBRATIONAL SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1719-1727
Authors:
SCHUPPLER S
FRIEDMAN SL
MARCUS MA
ADLER DL
XIE YH
ROSS FM
CHABAL YJ
HARRIS TD
BRUS LE
BROWN WL
CHABAN EE
SZAJOWSKI PF
CHRISTMAN SB
CITRIN PH
Citation: S. Schuppler et al., SIZE, SHAPE, AND COMPOSITION OF LUMINESCENT SPECIES IN OXIDIZED SI NANOCRYSTALS AND H-PASSIVATED POROUS SI, Physical review. B, Condensed matter, 52(7), 1995, pp. 4910-4925
Authors:
DUMAS P
CHABAL YJ
GUNTHER R
IBRAHIMI AT
PETROFF Y
Citation: P. Dumas et al., VIBRATIONAL CHARACTERIZATION AND ELECTRONIC-PROPERTIES OF LONG RANGE-ORDERED, IDEALLY HYDROGEN-TERMINATED SI(111), Progress in Surface Science, 48(1-4), 1995, pp. 313-324
Citation: Gj. Pietsch et al., THE ATOMIC-SCALE REMOVAL MECHANISM DURING CHEMOMECHANICAL POLISHING OF SI(100) AND SI(111), Surface science, 333, 1995, pp. 395-401
Citation: Gj. Pietsch et al., INFRARED-ABSORPTION SPECTROSCOPY OF SI(100) AND SI(111) SURFACES AFTER CHEMOMECHANICAL POLISHING, Journal of applied physics, 78(3), 1995, pp. 1650-1658
Authors:
TALEBIBRAHIMI A
GUNTHER R
DUMAS P
INDLEKOFER G
CHABAL YJ
PETROFF Y
Citation: A. Talebibrahimi et al., HIGH-RESOLUTION PHOTOEMISSION SPECTROSCOPY OF FLAT AND STEPPED NON RECONSTRUCTED H SI(111) SURFACES/, Journal de physique. IV, 4(C9), 1994, pp. 89-95
Authors:
HIRSCHMUGL CJ
CHABAL YJ
HOFFMANN FM
WILLIAMS GP
Citation: Cj. Hirschmugl et al., LOW-FREQUENCY DYNAMICS OF CO CU BREAKDOWN OF BORN-OPPENHEIMER APPROXIMATION/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 2229-2234
Citation: Ma. Hines et al., MEASURING THE STRUCTURE OF ETCHED SILICON SURFACES WITH RAMAN-SPECTROSCOPY, The Journal of chemical physics, 101(9), 1994, pp. 8055-8072