Authors: LIU J FURUHASHI H TORII A SHARMA R CHITNIS VT SINGH BP YAMADA J UCHIDA Y

Citation: J. Liu et al., AUTOMATIC MASK ALIGNMENT IN THE THETA-DIRECTION USING MOIRE SENSORS, Nanotechnology, 6(4), 1995, pp. 135-138

Authors: SINGH BP GOTO T SHARMA R KANJILAL AK NARAIN R CHITNIS VT LIU J UCHIDA Y

Citation: Bp. Singh et al., TRACKING AND DYNAMIC CONTROL OF THE ANGULAR ALIGNMENT POSITION IN A PHOTOLITHOGRAPHIC MASK ALIGNER BY THE MOIRE INTERFERENCE TECHNIQUE, Review of scientific instruments, 66(3), 1995, pp. 2658-2660

Authors: KANJILAL AK NARAIN R SHARMA R CHITNIS VT SINGH BP LIU JN YAMADA J UCHIDA Y

Citation: Ak. Kanjilal et al., AUTOMATIC MASK ALIGNMENT WITHOUT A MICROSCOPE, IEEE transactions on instrumentation and measurement, 44(3), 1995, pp. 806-809

Authors: SHARMA R NARAIN R KANJILAL AK CHITNIS VT

Citation: R. Sharma et al., COMPUTER-CONTROLLED INPLANE ALIGNMENT USING A MODIFIED MOIRE TECHNIQUE, Optical engineering, 33(6), 1994, pp. 1930-1933

Authors: KOWSALYA,"CHITNIS VT ROY BK NARAIN R DANDAWATE VD

Citation: Vt. Kowsalya,"chitnis et al., AN AUTOMATIC DIELECTRIC FILM COATING UNIT, Research and Industry, 38(2), 1993, pp. 73-76