AAAAAA
Results: 1-25/31
Authors:
WALTER M
HUTTEN HM
SCHEER HC
ENGEMANN J
Citation: M. Walter et al., COMPUTER-AIDED PROFILE OPTIMIZATION OF ION-MILLED MICROSTRUCTURES, Modelling and simulation in materials science and engineering, 6(3), 1998, pp. 251-260
Authors:
ENGEMANN J
WALTER M
DAHLHAUS R
HUTTEN HM
KORZEC D
Citation: J. Engemann et al., ELECTROMAGNETIC-FIELDS IN A SLOT ANTENNA MICROWAVE PLASMA SOURCE - NUMERICAL-SIMULATION AND MEASUREMENT, The Journal of microwave power and electromagnetic energy, 33(3), 1998, pp. 195-202
Authors:
SPRANG N
THEIRICH D
ENGEMANN J
Citation: N. Sprang et al., SURFACE MODIFICATION OF FLUOROPOLYMERS BY MICROWAVE PLASMAS - FTIR INVESTIGATIONS, Surface & coatings technology, 98(1-3), 1998, pp. 865-871
Authors:
NINGEL KP
THEIRICH D
ENGEMANN J
Citation: Kp. Ningel et al., CHARACTERIZING THE REMOTE PLASMA POLYMERIZATION OF OCTAFLUOROCYCLOBUTANE INDUCED BY RF-DRIVEN HOLLOW-CATHODE DISCHARGE, Surface & coatings technology, 98(1-3), 1998, pp. 1142-1147
Authors:
WALTER M
KORZEC D
HUTTEN M
ENGEMANN J
Citation: M. Walter et al., COMPUTER-AIDED-DESIGN OF MICROWAVE PLASMA SOURCES - POTENTIAL AND APPLICATIONS, JPN J A P 1, 36(7B), 1997, pp. 4777-4783
Authors:
KORZEC D
SEIBERT C
WINTER R
ENGEMANN J
Citation: D. Korzec et al., INFLUENCE OF THE SUBSTRATE SURFACE ON ION CONCENTRATIONS IN A LARGE-VOLUME MICROWAVE PLASMA, Surface & coatings technology, 97(1-3), 1997, pp. 122-130
Authors:
BEHLE S
GEORG A
YUAN Y
ENGEMANN J
BROCKHAUS A
Citation: S. Behle et al., IMAGING OF ATOMIC OXYGEN IN A MICROWAVE EXCITED OXYGEN PLASMA WITH 2-DIMENSIONAL OPTICAL-EMISSION SPECTROSCOPY, Surface & coatings technology, 97(1-3), 1997, pp. 734-741
Authors:
KORZEC D
MILDNER M
HILLEMANN F
ENGEMANN J
Citation: D. Korzec et al., 70 CM RADIO-FREQUENCY HOLLOW-CATHODE PLASMA SOURCE FOR MODIFICATION OF FOILS AND MEMBRANES, Surface & coatings technology, 97(1-3), 1997, pp. 759-767
Authors:
KORZEC D
RAIKO V
ENGEMANN J
GUNZEL R
BRUTSCHER J
MOLLER W
Citation: D. Korzec et al., APPLICATION OF THE ECR SLOT ANTENNA PLASMA SOURCE FOR ION-IMPLANTATION, Surface & coatings technology, 93(2-3), 1997, pp. 217-224
Authors:
KORZEC D
ENGEMANN J
MILDNER M
NINGEL KP
BORGMEIER O
THEIRICH D
Citation: D. Korzec et al., MULTI-JET HOLLOW-CATHODE DISCHARGE FOR REMOTE POLYMER DEPOSITION, Surface & coatings technology, 93(1), 1997, pp. 128-133
Authors:
WINTER R
KORZEC D
ENGEMANN J
Citation: R. Winter et al., LARGE-AREA PLASMA CLEANING WITH 26''-MICROWAVE SLOT ANTENNA PLASMA SOURCE SLAN-II, Surface & coatings technology, 93(1), 1997, pp. 134-141
Authors:
WINTER R
KORZEC D
ENGEMANN J
Citation: R. Winter et al., REMOTE AND DIRECT CLEANING BY USE OF MICROWAVE PLASMA SOURCE SLAN-II - COMPARATIVE-STUDY, Surface & coatings technology, 91(1-2), 1997, pp. 101-106
Authors:
KORZEC D
ENGEMANN J
Citation: D. Korzec et J. Engemann, LARGE-AREA LUBRICANT REMOVAL BY USE OF CAPACITIVELY COUPLED RF AND SLOT ANTENNA MICROWAVE PLASMA SOURCE, Surface & coatings technology, 89(1-2), 1997, pp. 165-176
Authors:
RAIKO V
SPITZL R
ENGEMANN J
BORISENKO V
BONDARENKO V
Citation: V. Raiko et al., MPCVD DIAMOND DEPOSITION ON POROUS SILICON PRETREATED WITH THE BIAS METHOD, DIAMOND AND RELATED MATERIALS, 5(10), 1996, pp. 1063-1069
Authors:
WERNER F
KORZEC D
ENGEMANN J
Citation: F. Werner et al., SURFACE-WAVE OPERATION MODE OF THE SLOT ANTENNA MICROWAVE PLASMA SOURCE SLAN, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(6), 1996, pp. 3065-3070
Authors:
BROCKHAUS A
YUAN Y
BEHLE S
ENGEMANN J
Citation: A. Brockhaus et al., DETERMINATION OF CHEMICALLY ACTIVE SPECIES IN A NOVEL MICROWAVE PLASMA SOURCE BY LASER-INDUCED FLUORESCENCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(3), 1996, pp. 1882-1887
Authors:
THEIRICH D
NINGEL KP
ENGEMANN J
Citation: D. Theirich et al., A NOVEL REMOTE TECHNIQUE FOR HIGH-RATE PLASMA POLYMERIZATION WITH RADIO-FREQUENCY PLASMAS, Surface & coatings technology, 86-7(1-3), 1996, pp. 628-633
Authors:
RAIKO V
SPITZL R
ASCHERMANN B
THEIRICH D
ENGEMANN J
PUPETER N
HABERMANN T
MULLER G
Citation: V. Raiko et al., FIELD-EMISSION OBSERVATIONS FROM CVD DIAMOND-COATED SILICON EMITTERS, Thin solid films, 291, 1996, pp. 190-195
Authors:
KORZEC D
TRAUB K
WERNER F
ENGEMANN J
Citation: D. Korzec et al., REMOTE DEPOSITION OF SCRATCH RESISTANT FILMS BY USE OF SLOT ANTENNA MICROWAVE PLASMA SOURCE, Thin solid films, 282(1-2), 1996, pp. 143-145
Authors:
SPITZL R
RAIKO V
HEIDERHOFF R
GNASER H
ENGEMANN J
Citation: R. Spitzl et al., MPCVD DIAMOND DEPOSITION ON BIAS PRETREATED POROUS SILICON, DIAMOND AND RELATED MATERIALS, 4(5-6), 1995, pp. 563-568
Authors:
KORZEC D
WERNER F
BROCKHAUS A
ENGEMANN J
SCHNEIDER TP
NEMANICH RJ
Citation: D. Korzec et al., CHARACTERIZATION OF A SLOT ANTENNA MICROWAVE PLASMA SOURCE FOR HYDROGEN PLASMA CLEANING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(4), 1995, pp. 2074-2085
Authors:
KORZEC D
SCHOTT M
ENGEMANN J
Citation: D. Korzec et al., RADIO-FREQUENCY HOLLOW-CATHODE DISCHARGE FOR LARGE-AREA DOUBLE-SIDED FOIL PROCESSING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 843-848
Authors:
ENGEMANN J
SCHOTT M
WERNER F
KORZEC D
Citation: J. Engemann et al., LARGE-VOLUME ELECTRON-CYCLOTRON-RESONANCE PLASMA GENERATION BY USE OFTHE SLOTTED ANTENNA MICROWAVE SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 875-882
Authors:
BROCKHAUS A
YUAN Y
ENGEMANN J
Citation: A. Brockhaus et al., DETERMINATION OF THE ION VELOCITY IN A RADIO-FREQUENCY ION-BEAM BY LASER-INDUCED FLUORESCENCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(2), 1995, pp. 400-405
Authors:
KORZEC D
THEIRICH D
WERNER F
TRAUB K
ENGEMANN J
Citation: D. Korzec et al., REMOTE AND DIRECT MICROWAVE PLASMA DEPOSITION OF HMDSO FILMS - COMPARATIVE-STUDY, Surface & coatings technology, 74-5(1-3), 1995, pp. 67-74