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Authors:
VYVODA MA
LEE H
MALYSHEV MV
KLEMENS FP
CERULLO M
DONNELLY VM
GRAVES DB
KORNBLIT A
LEE JTC
Citation: Ma. Vyvoda et al., EFFECTS OF PLASMA CONDITIONS ON THE SHAPES OF FEATURES ETCHED IN CL-2AND HBR PLASMAS - I - BULK CRYSTALLINE SILICON ETCHING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3247-3258
Citation: Ba. Helmer et Db. Graves, MOLECULAR-DYNAMICS SIMULATIONS OF AR- DISTRIBUTIONS OF REFLECTED ENERGIES AND ANGLES( AND CL+ IMPACTS ONTO SILICON SURFACES ), Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3502-3514
Citation: Cf. Abrams et Db. Graves, ENERGETIC ION-BOMBARDMENT OF SIO2 SURFACES - MOLECULAR-DYNAMICS SIMULATIONS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(5), 1998, pp. 3006-3019
Citation: Gp. Kota et al., ROLE OF OXYGEN IN ION-ENHANCED ETCHING OF POLY-SI AND WSIX WITH CHLORINE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(4), 1998, pp. 2215-2221
Citation: Gp. Kota et al., THE RECOMBINATION OF CHLORINE ATOMS AT SURFACES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(1), 1998, pp. 270-277
Citation: Ft. Caldwell et al., CALORIGENIC RESPONSE OF BURNED RATS WITH ADRENAL MEDULLECTOMIES TO CATECHOLAMINES, The Journal of burn care & rehabilitation, 19(2), 1998, pp. 106-114
Citation: Ba. Helmer et Db. Graves, MOLECULAR-DYNAMICS SIMULATIONS OF FLUOROSILYL SPECIES IMPACTING FLUORINATED SILICON SURFACES WITH ENERGIES FROM 0.1 TO 100 EV, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 2252-2261
Citation: Ui. Schmidt et Db. Graves, IN-SITU CHARACTERIZATION OF THE TRANSIENT-BEHAVIOR OF PARTICLES IN LOW-PRESSURE PLASMAS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(2), 1996, pp. 595-602
Citation: C. Lee et al., ROLE OF ETCH PRODUCTS IN POLYSILICON ETCHING IN A HIGH-DENSITY CHLORINE DISCHARGE, Plasma chemistry and plasma processing, 16(1), 1996, pp. 99-120
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Citation: Jd. Bukowski et al., 2-DIMENSIONAL FLUID MODEL OF AN INDUCTIVELY-COUPLED PLASMA WITH COMPARISON TO EXPERIMENTAL SPATIAL PROFILES, Journal of applied physics, 80(5), 1996, pp. 2614-2623
Citation: Hm. Wu et al., COMPARISON BETWEEN A 2-DIMENSIONAL SIMULATION AND A GLOBAL CONSERVATION MODEL FOR A COMPACT ECR PLASMA SOURCE, Plasma sources science & technology, 4(1), 1995, pp. 22-30
Citation: Ft. Caldwell et al., EFFECT OF ADRENAL MEDULLECTOMY ON RESPONSES IN HEAT-PRODUCTION, PLASMA-CATECHOLAMINES AND BODY-TEMPERATURE OF BURNED RATS TO CHANGES IN THETEMPERATURE OF THE HYPOTHALAMUS, Burns, 21(4), 1995, pp. 273-279
Citation: Ft. Caldwell et al., EFFECT OF ALPHA-ADRENERGIC BLOCKADE ON THERMOREGULATION IN ADRENAL DEMEDULLATED BURNED RATS, Burns, 21(4), 1995, pp. 280-284
Citation: Te. Nitschke et Db. Graves, MATCHING AN RF SHEATH MODEL TO A BULK PLASMA MODEL, IEEE transactions on plasma science, 23(4), 1995, pp. 717-727
Citation: Je. Daugherty et Db. Graves, DERIVATION AND EXPERIMENTAL-VERIFICATION OF A PARTICULATE TRANSPORT MODEL FOR A GLOW-DISCHARGE, Journal of applied physics, 78(4), 1995, pp. 2279-2287
Citation: Me. Barone et Db. Graves, MOLECULAR-DYNAMICS SIMULATIONS OF DIRECT REACTIVE ION ETCHING OF SILICON BY FLUORINE AND CHLORINE, Journal of applied physics, 78(11), 1995, pp. 6604-6615
Citation: Ra. Stewart et al., 2-DIMENSIONAL FLUID MODEL OF HIGH-DENSITY INDUCTIVELY-COUPLED PLASMA SOURCES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 478-485
Authors:
KILGORE MD
DAUGHERTY JE
PORTEOUS RK
GRAVES DB
Citation: Md. Kilgore et al., TRANSPORT AND HEATING OF SMALL PARTICLES IN HIGH-DENSITY PLASMA SOURCES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 486-493