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Results: 1-13 |
Results: 13
MODELING THE PRESSURE-DEPENDENCE OF DC BIAS VOLTAGE IN ASYMMETRIC, CAPACITIVE RF SHEATHS
Authors: CHANDHOK M GRIZZLE JW
Citation: M. Chandhok et Jw. Grizzle, MODELING THE PRESSURE-DEPENDENCE OF DC BIAS VOLTAGE IN ASYMMETRIC, CAPACITIVE RF SHEATHS, IEEE transactions on plasma science, 26(2), 1998, pp. 181-189
CONTROL-ORIENTED MODEL OF A DUAL EQUAL VARIABLE CAM TIMING SPARK-IGNITION ENGINE
Authors: STEFANOPOULOU AG COOK JA GRIZZLE JW FREUDENBERG JS
Citation: Ag. Stefanopoulou et al., CONTROL-ORIENTED MODEL OF A DUAL EQUAL VARIABLE CAM TIMING SPARK-IGNITION ENGINE, Journal of dynamic systems, measurement, and control, 120(2), 1998, pp. 257-266
CONTROL OF ION ENERGY IN A CAPACITIVELY COUPLED REACTIVE ION ETCHER
Authors: PARK HM GARVIN C GRIMARD DS GRIZZLE JW
Citation: Hm. Park et al., CONTROL OF ION ENERGY IN A CAPACITIVELY COUPLED REACTIVE ION ETCHER, Journal of the Electrochemical Society, 145(12), 1998, pp. 4247-4252
AUTOMATED TUNING OF AN ELECTRON-CYCLOTRON-RESONANCE CAVITY TO A MICROWAVE-POWER SOURCE
Authors: HANISH CK GRIZZLE JW
Citation: Ck. Hanish et Jw. Grizzle, AUTOMATED TUNING OF AN ELECTRON-CYCLOTRON-RESONANCE CAVITY TO A MICROWAVE-POWER SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(5), 1997, pp. 2717-2727
MODELING AND ALGORITHM DEVELOPMENT FOR AUTOMATED OPTICAL ENDPOINTING OF AN HBT EMITTER ETCH
Authors: HANISH CK GRIZZLE JW CHEN HH KAMLET LI THOMAS S TERRY FL PANG SW
Citation: Ck. Hanish et al., MODELING AND ALGORITHM DEVELOPMENT FOR AUTOMATED OPTICAL ENDPOINTING OF AN HBT EMITTER ETCH, Journal of electronic materials, 26(12), 1997, pp. 1401-1408
MINIMIZED RESPONSE-TIME OF OPTICAL-EMISSION AND MASS-SPECTROMETRIC SIGNALS FOR OPTIMIZED END-POINT DETECTION
Authors: THOMAS S CHEN HH HANISH CK GRIZZLE JW PANG SW
Citation: S. Thomas et al., MINIMIZED RESPONSE-TIME OF OPTICAL-EMISSION AND MASS-SPECTROMETRIC SIGNALS FOR OPTIMIZED END-POINT DETECTION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 2531-2536
SENSOR SYSTEMS FOR REAL-TIME FEEDBACK-CONTROL OF REACTIVE ION ETCHING
Authors: BENSON TE KAMLET LI RUEGSEGGER SM HANISH CK HANISH PD RASHAP BA KLIMECKY P FREUDENBERG JS GRIZZLE JW KHARGONEKAR PP TERRY FL BARNEY B
Citation: Te. Benson et al., SENSOR SYSTEMS FOR REAL-TIME FEEDBACK-CONTROL OF REACTIVE ION ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 483-488
CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT - REAL-TIME FEEDBACK-CONTROL OF A REACTIVE ION ETCHER
Authors: RASHAP BA ELTA ME ETEMAD H FOURNIER JP FREUDENBERG JS GILES MD GRIZZLE JW KABAMBA PT KHARGONEKAR PP LAFORTUNE S MOYNE JR TENEKETZIS D TERRY FL
Citation: Ba. Rashap et al., CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT - REAL-TIME FEEDBACK-CONTROL OF A REACTIVE ION ETCHER, IEEE transactions on semiconductor manufacturing, 8(3), 1995, pp. 286-297
A MODEL-BASED TECHNIQUE FOR REAL-TIME ESTIMATION OF ABSOLUTE FLUORINECONCENTRATION IN A CF4 AR PLASMA/
Authors: HANISH PD GRIZZLE JW GILES MD TERRY FL
Citation: Pd. Hanish et al., A MODEL-BASED TECHNIQUE FOR REAL-TIME ESTIMATION OF ABSOLUTE FLUORINECONCENTRATION IN A CF4 AR PLASMA/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1802-1807
OBSERVER DESIGN FOR NONLINEAR-SYSTEMS WITH DISCRETE-TIME MEASUREMENTS
Authors: MORAAL PE GRIZZLE JW
Citation: Pe. Moraal et Jw. Grizzle, OBSERVER DESIGN FOR NONLINEAR-SYSTEMS WITH DISCRETE-TIME MEASUREMENTS, IEEE transactions on automatic control, 40(3), 1995, pp. 395-404
NECESSARY CONDITIONS FOR ASYMPTOTIC TRACKING IN NONLINEAR-SYSTEMS
Authors: GRIZZLE JW DIBENEDETTO MD LAMNABHILAGARRIGUE F
Citation: Jw. Grizzle et al., NECESSARY CONDITIONS FOR ASYMPTOTIC TRACKING IN NONLINEAR-SYSTEMS, IEEE transactions on automatic control, 39(9), 1994, pp. 1782-1794
ASYMPTOTIC MODEL-MATCHING FOR NONLINEAR-SYSTEMS
Authors: DIBENEDETTO MD GRIZZLE JW
Citation: Md. Dibenedetto et Jw. Grizzle, ASYMPTOTIC MODEL-MATCHING FOR NONLINEAR-SYSTEMS, IEEE transactions on automatic control, 39(8), 1994, pp. 1539-1550
A LINEAR ALGEBRAIC FRAMEWORK FOR THE ANALYSIS OF DISCRETE-TIME NONLINEAR-SYSTEMS
Authors: GRIZZLE JW
Citation: Jw. Grizzle, A LINEAR ALGEBRAIC FRAMEWORK FOR THE ANALYSIS OF DISCRETE-TIME NONLINEAR-SYSTEMS, SIAM journal on control and optimization, 31(4), 1993, pp. 1026-1044
Risultati: 1-13 |