Citation: M. Chandhok et Jw. Grizzle, MODELING THE PRESSURE-DEPENDENCE OF DC BIAS VOLTAGE IN ASYMMETRIC, CAPACITIVE RF SHEATHS, IEEE transactions on plasma science, 26(2), 1998, pp. 181-189
Authors:
STEFANOPOULOU AG
COOK JA
GRIZZLE JW
FREUDENBERG JS
Citation: Ag. Stefanopoulou et al., CONTROL-ORIENTED MODEL OF A DUAL EQUAL VARIABLE CAM TIMING SPARK-IGNITION ENGINE, Journal of dynamic systems, measurement, and control, 120(2), 1998, pp. 257-266
Citation: Hm. Park et al., CONTROL OF ION ENERGY IN A CAPACITIVELY COUPLED REACTIVE ION ETCHER, Journal of the Electrochemical Society, 145(12), 1998, pp. 4247-4252
Citation: Ck. Hanish et Jw. Grizzle, AUTOMATED TUNING OF AN ELECTRON-CYCLOTRON-RESONANCE CAVITY TO A MICROWAVE-POWER SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(5), 1997, pp. 2717-2727
Authors:
HANISH CK
GRIZZLE JW
CHEN HH
KAMLET LI
THOMAS S
TERRY FL
PANG SW
Citation: Ck. Hanish et al., MODELING AND ALGORITHM DEVELOPMENT FOR AUTOMATED OPTICAL ENDPOINTING OF AN HBT EMITTER ETCH, Journal of electronic materials, 26(12), 1997, pp. 1401-1408
Authors:
THOMAS S
CHEN HH
HANISH CK
GRIZZLE JW
PANG SW
Citation: S. Thomas et al., MINIMIZED RESPONSE-TIME OF OPTICAL-EMISSION AND MASS-SPECTROMETRIC SIGNALS FOR OPTIMIZED END-POINT DETECTION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 2531-2536
Authors:
BENSON TE
KAMLET LI
RUEGSEGGER SM
HANISH CK
HANISH PD
RASHAP BA
KLIMECKY P
FREUDENBERG JS
GRIZZLE JW
KHARGONEKAR PP
TERRY FL
BARNEY B
Citation: Te. Benson et al., SENSOR SYSTEMS FOR REAL-TIME FEEDBACK-CONTROL OF REACTIVE ION ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 483-488
Authors:
RASHAP BA
ELTA ME
ETEMAD H
FOURNIER JP
FREUDENBERG JS
GILES MD
GRIZZLE JW
KABAMBA PT
KHARGONEKAR PP
LAFORTUNE S
MOYNE JR
TENEKETZIS D
TERRY FL
Citation: Ba. Rashap et al., CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT - REAL-TIME FEEDBACK-CONTROL OF A REACTIVE ION ETCHER, IEEE transactions on semiconductor manufacturing, 8(3), 1995, pp. 286-297
Citation: Pd. Hanish et al., A MODEL-BASED TECHNIQUE FOR REAL-TIME ESTIMATION OF ABSOLUTE FLUORINECONCENTRATION IN A CF4 AR PLASMA/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 1802-1807
Citation: Pe. Moraal et Jw. Grizzle, OBSERVER DESIGN FOR NONLINEAR-SYSTEMS WITH DISCRETE-TIME MEASUREMENTS, IEEE transactions on automatic control, 40(3), 1995, pp. 395-404
Authors:
GRIZZLE JW
DIBENEDETTO MD
LAMNABHILAGARRIGUE F
Citation: Jw. Grizzle et al., NECESSARY CONDITIONS FOR ASYMPTOTIC TRACKING IN NONLINEAR-SYSTEMS, IEEE transactions on automatic control, 39(9), 1994, pp. 1782-1794
Citation: Md. Dibenedetto et Jw. Grizzle, ASYMPTOTIC MODEL-MATCHING FOR NONLINEAR-SYSTEMS, IEEE transactions on automatic control, 39(8), 1994, pp. 1539-1550
Citation: Jw. Grizzle, A LINEAR ALGEBRAIC FRAMEWORK FOR THE ANALYSIS OF DISCRETE-TIME NONLINEAR-SYSTEMS, SIAM journal on control and optimization, 31(4), 1993, pp. 1026-1044