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Results: 1-12 |

Results: 12

Authors: GRUBER A GSPANN J

Citation: A. Gruber et J. Gspann, NANOPARTICLE IMPACT MICROMACHINING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2362-2364

NANOSTRUCTURING BY REACTIVE ACCELERATED CLUSTER EROSION

Authors: GRUBER A GSPANN J VONBLANCKENHAGEN P

Citation: A. Gruber et al., NANOSTRUCTURING BY REACTIVE ACCELERATED CLUSTER EROSION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 1382-1384

ATOMIC-FORCE MICROSCOPY OF HIGH-VELOCITY CLUSTER-IMPACT INDUCED NANOSTRUCTURES

Authors: VONBLANCKENHAGEN P GRUBER A GSPANN J

Citation: P. Vonblanckenhagen et al., ATOMIC-FORCE MICROSCOPY OF HIGH-VELOCITY CLUSTER-IMPACT INDUCED NANOSTRUCTURES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 122(3), 1997, pp. 322-324

REACTIVE ACCELERATED CLUSTER EROSION (RACE)

Authors: GSPANN J

Citation: J. Gspann, REACTIVE ACCELERATED CLUSTER EROSION (RACE), Surface review and letters, 3(1), 1996, pp. 897-900

REACTIVE ACCELERATED CLUSTER EROSION (RACE) BY IONIZED CLUSTER BEAMS

Authors: GSPANN J

Citation: J. Gspann, REACTIVE ACCELERATED CLUSTER EROSION (RACE) BY IONIZED CLUSTER BEAMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 112(1-4), 1996, pp. 86-88

LITHOGRAPHY BY ACCELERATED NANOPARTICLE IONS

Authors: GSPANN J

Citation: J. Gspann, LITHOGRAPHY BY ACCELERATED NANOPARTICLE IONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2618-2620

MICROSTRUCTURING BY NANOPARTICLE IMPACT LITHOGRAPHY

Authors: GSPANN J

Citation: J. Gspann, MICROSTRUCTURING BY NANOPARTICLE IMPACT LITHOGRAPHY, Sensors and actuators. A, Physical, 51(1), 1995, pp. 37-39

ATOMIC IMPACT EXPERIMENTS WITH FREE HE-3 AND HE-4 CLUSTERS

Authors: GSPANN J

Citation: J. Gspann, ATOMIC IMPACT EXPERIMENTS WITH FREE HE-3 AND HE-4 CLUSTERS, Zeitschrift fur Physik. B, Condensed matter, 98(3), 1995, pp. 405-411

SOME CONCLUDING REMARKS

Authors: PUTLITZ GZ MCCLINTOCK PVE LEIDERER P VINEN WF WILLIAMS G LEIDERER P GSPANN J MEZHOVDEGLIN L DUPONTROC J COLE M DAHM A TAKAHASHI N

Citation: Gz. Putlitz et al., SOME CONCLUDING REMARKS, Zeitschrift fur Physik. B, Condensed matter, 98(3), 1995, pp. 443-446

MICROMACHINING BY ACCELERATED NANOPARTICLE EROSION

Authors: GSPANN J

Citation: J. Gspann, MICROMACHINING BY ACCELERATED NANOPARTICLE EROSION, Microelectronic engineering, 27(1-4), 1995, pp. 517-520

CLUSTER DEPOSITION AND CLUSTER EROSION WITH HIGH-INTENSITY IONIZED CLUSTER BEAMS

Authors: GSPANN J

Citation: J. Gspann, CLUSTER DEPOSITION AND CLUSTER EROSION WITH HIGH-INTENSITY IONIZED CLUSTER BEAMS, Zeitschrift fur Physik. D, Atoms, molecules and clusters, 26, 1993, pp. 174-176

HIGH-INTENSITY IONIZED CLUSTER BEAMS FOR SURFACE MODIFICATION - DEPOSITION AND EROSION

Authors: GSPANN J

Citation: J. Gspann, HIGH-INTENSITY IONIZED CLUSTER BEAMS FOR SURFACE MODIFICATION - DEPOSITION AND EROSION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1336-1339

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