Authors:
YASUDA H
ARAI S
KAI J
OOAE Y
ABE T
MARUYAMA S
KIUCHI T
Citation: H. Yasuda et al., MULTIELECTRON BEAM BLANKING APERTURE ARRAY SYSTEM SYNAPSE-2000, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3813-3820