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Results: 1-25/30
Authors:
KYOUGOKU Y
YAMAGUTI Y
YOSHIDA Y
KIKKAWA T
HARA K
KOBAYASHI Y
Citation: Y. Kyougoku et al., 3-DIMENSIONAL MEMORY MODULE ASSEMBLY TECHNOLOGY, NEC research & development, 39(3), 1998, pp. 219-225
Authors:
INOUE K
MIKAGI K
ABIKO H
CHIKAKI S
KIKKAWA T
Citation: K. Inoue et al., A NEW COBALT SALICIDE TECHNOLOGY FOR 0.15-MU-M CMOS DEVICES, I.E.E.E. transactions on electron devices, 45(11), 1998, pp. 2312-2318
Authors:
TAGUWA T
URABE K
SEKINE M
YAMADA Y
KIKKAWA T
Citation: T. Taguwa et al., LOW CONTACT RESISTANCE METALLIZATION FOR GIGABIT SCALE DRAMS USING FULLY-DRY CLEANING BY AR H-2 ECR PLASMA/, I.E.E.E. transactions on electron devices, 44(4), 1997, pp. 588-594
Authors:
UENO K
DONNELLY VM
KIKKAWA T
Citation: K. Ueno et al., CLEANING OF CHF3 PLASMA-ETCHED SIO2 SIN/CU VIA STRUCTURES WITH DILUTEHYDROFLUORIC-ACID SOLUTIONS/, Journal of the Electrochemical Society, 144(7), 1997, pp. 2565-2572
Authors:
KASUGA K
ASANO K
LIN L
SUGIMORI T
HANDA M
ABE K
KIKKAWA T
FUJIWARA T
Citation: K. Kasuga et al., PREPARATION AND SOME PROPERTIES OF ONE STRUCTURAL ISOMER OF TETRA-SUBSTITUTED PHTHALOCYANINE - 1,8,15,22-TETRAKIS(PENTAN-3'-YLOXY)PHTHALOCYANINE AND ITS METAL(II) COMPLEXES, Bulletin of the Chemical Society of Japan, 70(8), 1997, pp. 1859-1865
Authors:
ITO N
YAMADA Y
KIKUTA K
KIKKAWA T
HUO DTC
Citation: N. Ito et al., INFLUENCE OF CONTACT HOLE PROFILE AND UNDERLAYER MATERIALS ON ALUMINUM REFLOW FILLING PROPERTIES, Electronics & communications in Japan. Part 2, Electronics, 79(2), 1996, pp. 109-117
Authors:
SEKINE M
KAKUHARA Y
KIKKAWA T
Citation: M. Sekine et al., DEGRADATION MECHANISM OF CONTACT RESISTANCE DURING WINDOW FORMATION, Electronics & communications in Japan. Part 2, Electronics, 79(1), 1996, pp. 93-100
Authors:
KASUGA K
KAWASHIMA M
ASANO K
SUGIMORI T
ABE K
KIKKAWA T
FUJIWARA T
Citation: K. Kasuga et al., PREPARATION OF ONE STRUCTURAL ISOMER OF TETRA-SUBSTITUTED PHTHALOCYANINE, 1,8,15,22-TETRA(3'-PENTOXY)PHTHALOCYANINE, AND A CRYSTAL-STRUCTURE OF ITS NICKEL(II) COMPLEX, Chemistry Letters, (10), 1996, pp. 867-868
Authors:
KIKKAWA T
OKAMOTO S
SUGAHARA Y
Citation: T. Kikkawa et al., ATTITUDES TOWARDS NATURAL AND CHEMICAL INGREDIENTS IN JAPANESE FOOD AND DRUGS, International journal of psychology, 31(3-4), 1996, pp. 54126-54126
Authors:
KIKUTA K
HAYASHI Y
NAKAJIMA T
HARASHIMA K
KIKKAWA T
Citation: K. Kikuta et al., ALUMINUM-GERMANIUM-COPPER MULTILEVEL DAMASCENE PROCESS USING LOW-TEMPERATURE REFLOW SPUTTERING AND CHEMICAL-MECHANICAL POLISHING, I.E.E.E. transactions on electron devices, 43(5), 1996, pp. 739-745
Authors:
KIKUTA K
KIKKAWA T
Citation: K. Kikuta et T. Kikkawa, ELECTROMIGRATION CHARACTERISTICS FOR AL-GE-CU, Journal of the Electrochemical Society, 143(3), 1996, pp. 1088-1092
Authors:
KIKUTA K
KIKKAWA T
Citation: K. Kikuta et T. Kikkawa, AL-GE REFLOW SPUTTERING FOR SUBMICRON CONTACT HOLE FILLING, Journal of the Electrochemical Society, 143(1), 1996, pp. 228-232
Authors:
YOSHITAKE H
KIKKAWA T
MUTO G
OTA K
Citation: H. Yoshitake et al., POISONING OF SURFACE HYDROGEN PROCESSES ON A PD ELECTRODE DURING ELECTROCHEMICAL REDUCTION OF CARBON-DIOXIDE, Journal of electroanalytical chemistry [1992], 396(1-2), 1995, pp. 491-498
Authors:
YOSHITAKE H
KIKKAWA T
OTA K
Citation: H. Yoshitake et al., ISOTOPIC PRODUCT DISTRIBUTIONS OF CO2 ELECTROCHEMICAL REDUCTION ON A D FLOWING-OUT PD SURFACE IN PROTONIC SOLUTION AND REACTIVITIES OF SUBSURFACE HYDROGEN, Journal of electroanalytical chemistry [1992], 390(1-2), 1995, pp. 91-97
Authors:
TERAOKA Y
AOKI H
IKAWA E
KIKKAWA T
NISHIYAMA I
Citation: Y. Teraoka et al., OBSERVATION OF SIDEWALL CONTAMINATION IN SUBMICRON CONTACT HOLES BY THERMAL-DESORPTION SPECTROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2197-2200
Authors:
UENO K
KIKKAWA T
TOKASHIKI K
Citation: K. Ueno et al., REACTIVE ION ETCHING OF SILICON OXYNITRIDE FORMED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(4), 1995, pp. 1447-1450
Authors:
HAMANO T
KIKKAWA T
UENO S
HAYASHI KI
Citation: T. Hamano et al., USE OF LARVAL SIZE, INSTEAD OF LARVAL STAGE, TO STUDY THE ECOLOGY OF A STOMATOPOD CRUSTACEAN ORATOSQUILLA-ORATORIA, Fisheries science, 61(1), 1995, pp. 165-166
Authors:
TERAOKA Y
AOKI H
NISHIYAMA I
IKAWA E
KIKKAWA T
Citation: Y. Teraoka et al., THERMAL-DESORPTION SPECTROSCOPIC ANALYSIS FOR RESIDUAL CHLORINE ON AL-SI-CU AFTER CL-2 ELECTRON-CYCLOTRON-RESONANCE PLASMA-ETCHING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(6), 1995, pp. 2935-2938
Authors:
AOKI H
TERAOKA Y
IKAWA E
KIKKAWA T
NISHIYAMA I
Citation: H. Aoki et al., DIRECT ANALYSIS OF CONTAMINATION IN SUBMICRON CONTACT HOLES BY THERMAL-DESORPTION SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(1), 1995, pp. 42-46
Authors:
KIKKAWA T
IKEDA R
HIGAKE M
Citation: T. Kikkawa et al., THE STATUS-QUO AND TRENDS IN THE DEVELOPMENT OF A MULTICHIP-MODULE FOR ATM SWITCHING-SYSTEM, NEC research & development, 36(2), 1995, pp. 293-302
Authors:
INOUE K
FUJII K
MIKAGI K
KIKKAWA T
Citation: K. Inoue et al., W TI SELF-ALIGNED SILICIDATION PROCESS FOR 0.25-MU-M CMOS/, NEC research & development, 36(1), 1995, pp. 114-121
Authors:
KIKKAWA T
YOSHINAKA M
HIROTA K
YAMAGUCHI O
Citation: T. Kikkawa et al., SYNTHESIS OF LACRO3 BY THE HYDRAZINE METHOD, Journal of materials science letters, 14(15), 1995, pp. 1071-1073
Authors:
WATANABE H
TATSUMI T
IKARASHI T
SAKAI A
AOTO N
KIKKAWA T
Citation: H. Watanabe et al., AN ADVANCED TECHNIQUE FOR FABRICATING HEMISPHERICAL-GRAINED (HSG) SILICON STORAGE ELECTRODES, I.E.E.E. transactions on electron devices, 42(2), 1995, pp. 295-300
Authors:
SEKINE M
ITO N
SHINMURA T
YAMADA Y
KIKKAWA T
MURAO Y
HUO DTC
Citation: M. Sekine et al., DEEP SUBHALF-MICRON CONTACT FILLING TECHNOLOGY USING CONTROL ETCHING AND COLLIMATED TI SPUTTERING TECHNIQUES, Journal of the Electrochemical Society, 142(2), 1995, pp. 664-668
Authors:
KIKKAWA T
OJIMA F
NAOI A
Citation: T. Kikkawa et al., THE RELATIONSHIPS BETWEEN PARENTS AND THE IR CHILDRENS PERSONALITIES, Riron to hoho, 9(2), 1994, pp. 187-202