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Results: 1-25 | 26-32
Results: 1-25/32
INVESTIGATIONS OF THE SURFACE-CHEMISTRY OF SILICON SUBSTRATES ETCHED IN A RF-BIASED INDUCTIVELY-COUPLED FLUOROCARBON PLASMA USING FOURIER-TRANSFORM INFRARED ELLIPSOMETRY
Authors: KROESEN GMW LEE HJ MORIGUCHI H MOTOMURA H SHIRAFUJI T TACHIBANA K
Citation: Gmw. Kroesen et al., INVESTIGATIONS OF THE SURFACE-CHEMISTRY OF SILICON SUBSTRATES ETCHED IN A RF-BIASED INDUCTIVELY-COUPLED FLUOROCARBON PLASMA USING FOURIER-TRANSFORM INFRARED ELLIPSOMETRY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(1), 1998, pp. 225-232
SURFACE MODIFICATION OF POWDER PARTICLES BY PLASMA DEPOSITION OF THINMETALLIC-FILMS
Authors: KERSTEN H SCHMETZ P KROESEN GMW
Citation: H. Kersten et al., SURFACE MODIFICATION OF POWDER PARTICLES BY PLASMA DEPOSITION OF THINMETALLIC-FILMS, Surface & coatings technology, 109(1-3), 1998, pp. 507-512
ON THE ENERGY INFLUX TO THE SUBSTRATE DURING SPUTTER-DEPOSITION OF THIN ALUMINUM FILMS
Authors: KERSTEN H KROESEN GMW HIPPLER R
Citation: H. Kersten et al., ON THE ENERGY INFLUX TO THE SUBSTRATE DURING SPUTTER-DEPOSITION OF THIN ALUMINUM FILMS, Thin solid films, 332(1-2), 1998, pp. 282-289
TREATMENT OF DUST PARTICLES IN AN RF PLASMA MONITORED BY MIE SCATTERING ROTATING COMPENSATOR ELLIPSOMETRY
Authors: SWINKELS GHPM STOFFELS E STOFFELS WW SIMONS N KROESEN GMW DEHOOG FJ
Citation: Ghpm. Swinkels et al., TREATMENT OF DUST PARTICLES IN AN RF PLASMA MONITORED BY MIE SCATTERING ROTATING COMPENSATOR ELLIPSOMETRY, Pure and applied chemistry, 70(6), 1998, pp. 1151-1156
SILICON-OXIDE PARTICLE FORMATION IN RF PLASMAS INVESTIGATED BY INFRARED-ABSORPTION SPECTROSCOPY AND MASS-SPECTROMETRY
Authors: HOLLENSTEIN C HOWLING AA COURTEILLE C MAGNI D SCHOLZ SM KROESEN GMW SIMONS N DEZEEUW W SCHWARZENBACH W
Citation: C. Hollenstein et al., SILICON-OXIDE PARTICLE FORMATION IN RF PLASMAS INVESTIGATED BY INFRARED-ABSORPTION SPECTROSCOPY AND MASS-SPECTROMETRY, Journal of physics. D, Applied physics, 31(1), 1998, pp. 74-84
SPECTROSCOPIC ROTATING COMPENSATOR ELLIPSOMETRY IN THE INFRARED - RETARDER DESIGN AND MEASUREMENT
Authors: DENBOER JHWG KROESEN GMW DEHOOG FJ
Citation: Jhwg. Denboer et al., SPECTROSCOPIC ROTATING COMPENSATOR ELLIPSOMETRY IN THE INFRARED - RETARDER DESIGN AND MEASUREMENT, Measurement science & technology, 8(5), 1997, pp. 484-492
TRANSPORT OF ARGON IONS IN AN INDUCTIVELY-COUPLED HIGH-DENSITY PLASMAREACTOR
Authors: SADEGHI N VANDEGRIFT M VENDER D KROESEN GMW DEHOOG FJ
Citation: N. Sadeghi et al., TRANSPORT OF ARGON IONS IN AN INDUCTIVELY-COUPLED HIGH-DENSITY PLASMAREACTOR, Applied physics letters, 70(7), 1997, pp. 835-837
MEASUREMENT OF THE GAS TEMPERATURE IN FLUOROCARBON RADIO-FREQUENCY DISCHARGES USING INFRARED-ABSORPTION SPECTROSCOPY
Authors: HAVERLAG M STOFFELS E STOFFELS WW KROESEN GMW DEHOOG FJ
Citation: M. Haverlag et al., MEASUREMENT OF THE GAS TEMPERATURE IN FLUOROCARBON RADIO-FREQUENCY DISCHARGES USING INFRARED-ABSORPTION SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(2), 1996, pp. 380-383
PRODUCTION AND DESTRUCTION OF CFX RADICALS IN RADIOFREQUENCY FLUOROCARBON PLASMAS
Authors: HAVERLAG M STOFFELS WW STOFFELS E KROESEN GMW DEHOOG FJ
Citation: M. Haverlag et al., PRODUCTION AND DESTRUCTION OF CFX RADICALS IN RADIOFREQUENCY FLUOROCARBON PLASMAS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(2), 1996, pp. 384-390
IN-SITU INFRARED-ABSORPTION SPECTROSCOPY OF DUSTY PLASMAS
Authors: KROESEN GMW DENBOER JHWG BOUFENDI L VIVET F KHOULI M BOUCHOULE A DEHOOG FJ
Citation: Gmw. Kroesen et al., IN-SITU INFRARED-ABSORPTION SPECTROSCOPY OF DUSTY PLASMAS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(2), 1996, pp. 546-549
DUST FORMATION AND CHARGING IN AN AR SIH4 RADIOFREQUENCY DISCHARGE/
Authors: STOFFELS E STOFFELS WW KROESEN GMW DEHOOG FJ
Citation: E. Stoffels et al., DUST FORMATION AND CHARGING IN AN AR SIH4 RADIOFREQUENCY DISCHARGE/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(2), 1996, pp. 556-561
DETECTION OF DUST PARTICLES IN THE PLASMA BY LASER-INDUCED HEATING
Authors: STOFFELS WW STOFFELS E KROESEN GMW DEHOOG FJ
Citation: Ww. Stoffels et al., DETECTION OF DUST PARTICLES IN THE PLASMA BY LASER-INDUCED HEATING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(2), 1996, pp. 588-594
MASS-RESOLVED ION ENERGY MEASUREMENTS AT BOTH ELECTRODES OF A 13.56MHZ PLASMA IN CF4
Authors: SNIJKERS RJMM VANSAMBEEK MJM HOPPENBROUWERS MB KROESEN GMW DEHOOG FJ
Citation: Rjmm. Snijkers et al., MASS-RESOLVED ION ENERGY MEASUREMENTS AT BOTH ELECTRODES OF A 13.56MHZ PLASMA IN CF4, Journal of applied physics, 79(12), 1996, pp. 8982-8992
SIGNATURES OF THE BOHM AND SHEATH VELOCITIES IN MINORITY-LIGHT-ION ENERGY-DISTRIBUTIONS
Authors: VENDER D KROESEN GMW DEHOOG FJ
Citation: D. Vender et al., SIGNATURES OF THE BOHM AND SHEATH VELOCITIES IN MINORITY-LIGHT-ION ENERGY-DISTRIBUTIONS, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 51(4), 1995, pp. 3480-3483
NEGATIVE-IONS IN A RADIOFREQUENCY OXYGEN PLASMA
Authors: STOFFELS E STOFFELS WW VENDER D KANDO M KROESEN GMW DEHOOG FJ
Citation: E. Stoffels et al., NEGATIVE-IONS IN A RADIOFREQUENCY OXYGEN PLASMA, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 51(3), 1995, pp. 2425-2435
CHARGED-SPECIES PROFILES IN ELECTRONEGATIVE RADIOFREQUENCY PLASMAS
Authors: VENDER D STOFFELS WW STOFFELS E KROESEN GMW DEHOOG FJ
Citation: D. Vender et al., CHARGED-SPECIES PROFILES IN ELECTRONEGATIVE RADIOFREQUENCY PLASMAS, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 51(3), 1995, pp. 2436-2444
HIGH-RESOLUTION INFRARED-SPECTROSCOPY OF ETCHING PLASMAS
Authors: HAVERLAG M STOFFELS WW STOFFELS E DENBOER JHWG KROESEN GMW DEHOOG FJ
Citation: M. Haverlag et al., HIGH-RESOLUTION INFRARED-SPECTROSCOPY OF ETCHING PLASMAS, Plasma sources science & technology, 4(2), 1995, pp. 260-267
NEGATIVE-IONS IN LOW-PRESSURE DISCHARGES
Authors: STOFFELS E STOFFELS WW VENDER D HAVERLAG M KROESEN GMW DEHOOG FJ
Citation: E. Stoffels et al., NEGATIVE-IONS IN LOW-PRESSURE DISCHARGES, Contributions to Plasma Physics, 35(4-5), 1995, pp. 331-357
NEGATIVE-IONS IN A CCL2F2 RADIO-FREQUENCY DISCHARGE
Authors: STOFFELS E STOFFELS WW VENDER D KROESEN GMW DEHOOG FJ
Citation: E. Stoffels et al., NEGATIVE-IONS IN A CCL2F2 RADIO-FREQUENCY DISCHARGE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(4), 1995, pp. 2051-2057
THE CHEMISTRY OF A CCL2F2 RADIO-FREQUENCY DISCHARGE
Authors: STOFFELS WW STOFFELS E HAVERLAG M KROESEN GMW DEHOOG FJ
Citation: Ww. Stoffels et al., THE CHEMISTRY OF A CCL2F2 RADIO-FREQUENCY DISCHARGE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(4), 1995, pp. 2058-2066
IMPROVED POLARIZER IN THE INFRARED - 2 WIRE-GRID POLARIZERS IN TANDEM
Authors: DENBOER JHWG KROESEN GMW DEZEEUW W DEHOOG FJ
Citation: Jhwg. Denboer et al., IMPROVED POLARIZER IN THE INFRARED - 2 WIRE-GRID POLARIZERS IN TANDEM, Optics letters, 20(7), 1995, pp. 800-802
ELECTRON-DENSITY FLUCTUATIONS IN A DUSTY AR SIH4 RF DISCHARGE/
Authors: STOFFELS WW STOFFELS E KROESEN GMW DEHOOG FJ
Citation: Ww. Stoffels et al., ELECTRON-DENSITY FLUCTUATIONS IN A DUSTY AR SIH4 RF DISCHARGE/, Journal of applied physics, 78(8), 1995, pp. 4867-4872
MEASUREMENT OF THE COMPLEX REFRACTIVE-INDEX OF LIQUIDS IN THE INFRARED USING SPECTROSCOPIC ATTENUATED TOTAL-REFLECTION ELLIPSOMETRY - CORRECTION FOR DEPOLARIZATION BY SCATTERING
Authors: DENBOER JHWG KROESEN GMW DEHOOG FJ
Citation: Jhwg. Denboer et al., MEASUREMENT OF THE COMPLEX REFRACTIVE-INDEX OF LIQUIDS IN THE INFRARED USING SPECTROSCOPIC ATTENUATED TOTAL-REFLECTION ELLIPSOMETRY - CORRECTION FOR DEPOLARIZATION BY SCATTERING, Applied optics, 34(25), 1995, pp. 5708-5714
MEASUREMENTS OF RADICAL DENSITIES IN RADIOFREQUENCY FLUOROCARBON PLASMAS USING INFRARED-ABSORPTION SPECTROSCOPY
Authors: HAVERLAG M STOFFELS E STOFFELS WW KROESEN GMW DEHOOG FJ
Citation: M. Haverlag et al., MEASUREMENTS OF RADICAL DENSITIES IN RADIOFREQUENCY FLUOROCARBON PLASMAS USING INFRARED-ABSORPTION SPECTROSCOPY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(6), 1994, pp. 3102-3108
LASER-PARTICULATE INTERACTIONS IN A DUSTY RF PLASMA
Authors: STOFFELS E STOFFELS WW VENDER D KROESEN GMW DEHOOG FJ
Citation: E. Stoffels et al., LASER-PARTICULATE INTERACTIONS IN A DUSTY RF PLASMA, IEEE transactions on plasma science, 22(2), 1994, pp. 116-121
Risultati: 1-25 | 26-32