Authors:
Fedosenko, G
Korzec, D
Schwabedissen, A
Engemann, J
Braca, E
Kenny, JM
Citation: G. Fedosenko et al., Comparison of diamond-like carbon films synthesized by 2.45 GHz microwave and 13.56 MHz multi-jet radiofrequency plasma sources, DIAM RELAT, 10(3-7), 2001, pp. 920-926
Authors:
Nakamura, M
Aoki, T
Hatanaka, Y
Korzec, D
Engemann, J
Citation: M. Nakamura et al., Comparison of hydrophilic properties of amorphous TiOx films obtained by radio frequency sputtering and plasma-enhanced chemical vapor deposition, J MATER RES, 16(2), 2001, pp. 621-626
Authors:
Fedosenko, G
Schwabedissen, A
Korzec, D
Engemann, J
Citation: G. Fedosenko et al., Diamond-like carbon film deposition by a 13.56 MHz hollow cathode RF-RF system using different precursor gases, SURF COAT, 142, 2001, pp. 693-697
Authors:
Nakamura, M
Korzec, D
Aoki, T
Engemann, J
Hatanaka, Y
Citation: M. Nakamura et al., Characterization of TiOx film prepared by plasma enhanced chemical vapor deposition using a multi-jet hollow cathode plasma source, APPL SURF S, 175, 2001, pp. 697-702
Citation: G. Fedosenko et al., Deposition of diamond-like carbon films by a hollow cathode multi-jet rf plasma system, SURF COAT, 133, 2000, pp. 535-539