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Results: 1-13 |
Results: 13

Authors: Fedosenko, G Korzec, D Schwabedissen, A Engemann, J Braca, E Kenny, JM
Citation: G. Fedosenko et al., Comparison of diamond-like carbon films synthesized by 2.45 GHz microwave and 13.56 MHz multi-jet radiofrequency plasma sources, DIAM RELAT, 10(3-7), 2001, pp. 920-926

Authors: Nakamura, M Aoki, T Hatanaka, Y Korzec, D Engemann, J
Citation: M. Nakamura et al., Comparison of hydrophilic properties of amorphous TiOx films obtained by radio frequency sputtering and plasma-enhanced chemical vapor deposition, J MATER RES, 16(2), 2001, pp. 621-626

Authors: Korzec, D Nithammer, D Engemann, J Ikeda, T Aoki, T Hatanaka, Y
Citation: D. Korzec et al., Radio frequency hollow cathode jet: optical emission study, SURF COAT, 142, 2001, pp. 21-27

Authors: Fedosenko, G Schwabedissen, A Korzec, D Engemann, J
Citation: G. Fedosenko et al., Diamond-like carbon film deposition by a 13.56 MHz hollow cathode RF-RF system using different precursor gases, SURF COAT, 142, 2001, pp. 693-697

Authors: Nakamura, M Korzec, D Aoki, T Engemann, J Hatanaka, Y
Citation: M. Nakamura et al., Characterization of TiOx film prepared by plasma enhanced chemical vapor deposition using a multi-jet hollow cathode plasma source, APPL SURF S, 175, 2001, pp. 697-702

Authors: Fedosenko, G Engemann, J Korzec, D
Citation: G. Fedosenko et al., Deposition of diamond-like carbon films by a hollow cathode multi-jet rf plasma system, SURF COAT, 133, 2000, pp. 535-539

Authors: Korzec, D Fedosenko, G Georg, A Engemann, J
Citation: D. Korzec et al., Hybrid plasma system for diamond-like carbon film deposition, SURF COAT, 131(1-3), 2000, pp. 20-25

Authors: Aoki, T Ikeda, T Korzec, D Hatanaka, Y
Citation: T. Aoki et al., ZnSe growth by radical assisted MOCVD using hollow cathode plasma, THIN SOL FI, 368(2), 2000, pp. 244-248

Authors: Korzec, D Muller, A Engemann, J
Citation: D. Korzec et al., Microwave plasma source for high current ion beam neutralization, REV SCI INS, 71(2), 2000, pp. 800-803

Authors: Korzec, D Dahlhaus, R Engemann, J
Citation: D. Korzec et al., Bipolar extraction neutralization: Time resolved characterization, REV SCI INS, 71(2), 2000, pp. 1090-1093

Authors: Xu, YY Ogishima, T Korzec, D Nakanishi, Y Hatanaka, Y
Citation: Yy. Xu et al., Deposition of SiNx thin film using mu-SLAN surface wave plasma source, JPN J A P 1, 38(7B), 1999, pp. 4538-4541

Authors: Muller, A Emme, M Korzec, D Engemann, J
Citation: A. Muller et al., Direct power coupling into a waveguide cavity plasma source, SURF COAT, 119, 1999, pp. 674-678

Authors: Mildner, M Korzec, D Engemann, J
Citation: M. Mildner et al., 13.56 MHz hollow cathode jet matrix plasma source for large area surface coating, SURF COAT, 112(1-3), 1999, pp. 366-372
Risultati: 1-13 |