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Results: 1-15 |
Results: 15
AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART 1 - DESIGN AND MODELING
Authors: LEGTENBERG R BERENSCHOT E VANBAAR J ELWENSPOEK M
Citation: R. Legtenberg et al., AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART 1 - DESIGN AND MODELING, Journal of microelectromechanical systems, 7(1), 1998, pp. 79-86
AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART II - FABRICATION AND PERFORMANCE
Authors: LEGTENBERG R BERENSCHOT E VANBAAR J ELWENSPOEK M
Citation: R. Legtenberg et al., AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART II - FABRICATION AND PERFORMANCE, Journal of microelectromechanical systems, 7(1), 1998, pp. 87-93
NONLINEARITY AND HYSTERESIS OF RESONANT STRAIN-GAUGES
Authors: GUI CQ LEGTENBERG R TILMANS HAC FLUITMAN JHJ ELWENSPOEK M
Citation: Cq. Gui et al., NONLINEARITY AND HYSTERESIS OF RESONANT STRAIN-GAUGES, Journal of microelectromechanical systems, 7(1), 1998, pp. 122-127
A FABRICATION PROCESS FOR ELECTROSTATIC MICROACTUATORS WITH INTEGRATED GEAR LINKAGES
Authors: LEGTENBERG R BERENSCHOT E ELWENSPOEK M FLUITMAN JH
Citation: R. Legtenberg et al., A FABRICATION PROCESS FOR ELECTROSTATIC MICROACTUATORS WITH INTEGRATED GEAR LINKAGES, Journal of microelectromechanical systems, 6(3), 1997, pp. 234-241
ELECTROSTATIC CURVED ELECTRODE ACTUATORS
Authors: LEGTENBERG R GILBERT J SENTURIA SD ELWENSPOEK M
Citation: R. Legtenberg et al., ELECTROSTATIC CURVED ELECTRODE ACTUATORS, Journal of microelectromechanical systems, 6(3), 1997, pp. 257-265
STICTION IN SURFACE MICROMACHINING
Authors: TAS N SONNENBERG T JANSEN H LEGTENBERG R ELWENSPOEK M
Citation: N. Tas et al., STICTION IN SURFACE MICROMACHINING, Journal of micromechanics and microengineering, 6(4), 1996, pp. 385-397
COMB-DRIVE ACTUATORS FOR LARGE DISPLACEMENTS
Authors: LEGTENBERG R GROENEVELD AW ELWENSPOEK M
Citation: R. Legtenberg et al., COMB-DRIVE ACTUATORS FOR LARGE DISPLACEMENTS, Journal of micromechanics and microengineering, 6(3), 1996, pp. 320-329
THE BLACK SILICON METHOD - A UNIVERSAL METHOD FOR DETERMINING THE PARAMETER SETTING OF A FLUORINE-BASED REACTIVE ION ETCHER IN DEEP SILICONTRENCH ETCHING WITH PROFILE CONTROL
Authors: JANSEN H DEBOER M LEGTENBERG R ELWENSPOEK M
Citation: H. Jansen et al., THE BLACK SILICON METHOD - A UNIVERSAL METHOD FOR DETERMINING THE PARAMETER SETTING OF A FLUORINE-BASED REACTIVE ION ETCHER IN DEEP SILICONTRENCH ETCHING WITH PROFILE CONTROL, Journal of micromechanics and microengineering, 5(2), 1995, pp. 115-120
Q-FACTOR DEPENDENCE OF ONE-PORT ENCAPSULATED POLYSILICON RESONATOR ONREACTIVE SEALING PRESSURE
Authors: GUI CQ LEGTENBERG R ELWENSPOEK M FLUITMAN JH
Citation: Cq. Gui et al., Q-FACTOR DEPENDENCE OF ONE-PORT ENCAPSULATED POLYSILICON RESONATOR ONREACTIVE SEALING PRESSURE, Journal of micromechanics and microengineering, 5(2), 1995, pp. 183-185
THE BLACK SILICON METHOD .2. THE EFFECT OF MASK MATERIAL AND LOADING ON THE REACTIVE ION ETCHING OF DEEP SILICON TRENCHES
Authors: JANSEN H DEBOER M BURGER J LEGTENBERG R ELWENSPOEK M
Citation: H. Jansen et al., THE BLACK SILICON METHOD .2. THE EFFECT OF MASK MATERIAL AND LOADING ON THE REACTIVE ION ETCHING OF DEEP SILICON TRENCHES, Microelectronic engineering, 27(1-4), 1995, pp. 475-480
ANISOTROPIC REACTIVE ION ETCHING OF SILICON USING SF6 O-2/CHF3 GAS MIXTURES/
Authors: LEGTENBERG R JANSEN H DEBOER M ELWENSPOEK M
Citation: R. Legtenberg et al., ANISOTROPIC REACTIVE ION ETCHING OF SILICON USING SF6 O-2/CHF3 GAS MIXTURES/, Journal of the Electrochemical Society, 142(6), 1995, pp. 2020-2028
ELECTROSTATICALLY DRIVEN VACUUM-ENCAPSULATED POLYSILICON RESONATORS .1. DESIGN AND FABRICATION
Authors: LEGTENBERG R TILMANS HAC
Citation: R. Legtenberg et Hac. Tilmans, ELECTROSTATICALLY DRIVEN VACUUM-ENCAPSULATED POLYSILICON RESONATORS .1. DESIGN AND FABRICATION, Sensors and actuators. A, Physical, 45(1), 1994, pp. 57-66
ELECTROSTATICALLY DRIVEN VACUUM-ENCAPSULATED POLYSILICON RESONATORS .2. THEORY AND PERFORMANCE
Authors: TILMANS HAC LEGTENBERG R
Citation: Hac. Tilmans et R. Legtenberg, ELECTROSTATICALLY DRIVEN VACUUM-ENCAPSULATED POLYSILICON RESONATORS .2. THEORY AND PERFORMANCE, Sensors and actuators. A, Physical, 45(1), 1994, pp. 67-84
STICTION OF SURFACE MICROMACHINED STRUCTURES AFTER RINSING AND DRYING- MODEL AND INVESTIGATION OF ADHESION MECHANISMS
Authors: LEGTENBERG R TILMANS HAC ELDERS J ELWENSPOEK M
Citation: R. Legtenberg et al., STICTION OF SURFACE MICROMACHINED STRUCTURES AFTER RINSING AND DRYING- MODEL AND INVESTIGATION OF ADHESION MECHANISMS, Sensors and actuators. A, Physical, 43(1-3), 1994, pp. 230-238
(ELECTRO)MECHANICAL CHARACTERISTICS OF ELECTROSTATICALLY DRIVEN VACUUM ENCAPSULATED POLYSILICON RESONATORS
Authors: TILMANS HAC LEGTENBERG R SCHURER H IJNTEMA DJ ELWENSPOEK M FLUITMAN JHJ
Citation: Hac. Tilmans et al., (ELECTRO)MECHANICAL CHARACTERISTICS OF ELECTROSTATICALLY DRIVEN VACUUM ENCAPSULATED POLYSILICON RESONATORS, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 41(1), 1994, pp. 4-6
Risultati: 1-15 |