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Results:
1-14
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Results: 14
Authors:
COULOMBE SA
MINHAS BK
RAYMOND CJ
NAQVI SSH
MCNEIL JR
Citation: Sa. Coulombe et al., SCATTEROMETRY MEASUREMENT OF SUB-0.1 MU-M LINEWIDTH GRATINGS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(1), 1998, pp. 80-87
Authors:
MINHAS BK
COULOMBE SA
NAQVI SSH
MCNEIL JR
Citation: Bk. Minhas et al., ELLIPSOMETRIC SCATTEROMETRY FOR THE METROLOGY OF SUB-0.1-MU-M-LINEWIDTH STRUCTURES, Applied optics, 37(22), 1998, pp. 5112-5115
Authors:
RAYMOND CJ
MURNANE MR
PRINS SL
SOHAIL S
NAQVI H
MCNEIL JR
HOSCH JW
Citation: Cj. Raymond et al., MULTIPARAMETER GRATING METROLOGY USING OPTICAL SCATTEROMETRY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(2), 1997, pp. 361-368
Authors:
MCNEIL JR
Citation: Jr. Mcneil, THE GREEN RAINBOW - ENVIRONMENT GROUPS IN WESTERN-EUROPE - DALTON,RJ, The American historical review, 101(3), 1996, pp. 842-842
Authors:
RAYMOND CJ
MURNANE MR
NAQVI SSH
MCNEIL JR
Citation: Cj. Raymond et al., METROLOGY OF SUBWAVELENGTH PHOTORESIST GRATINGS USING OPTICAL SCATTEROMETRY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(4), 1995, pp. 1484-1495
Authors:
HATAB ZR
MCNEIL JR
NAQVI SSH
Citation: Zr. Hatab et al., 16-MEGABIT DYNAMIC RANDOM-ACCESS MEMORY TRENCH DEPTH CHARACTERIZATIONUSING 2-DIMENSIONAL DIFFRACTION ANALYSIS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 174-182
Authors:
HATAB ZR
PRINS SL
NAQVI SSH
MCNEIL JR
Citation: Zr. Hatab et al., 16-MB DRAM TRENCH DEPTH CHARACTERIZATION USING DOME SCATTEROMETRY, Applied surface science, 86(1-4), 1995, pp. 597-599
Authors:
MCNEIL JR
Citation: Jr. Mcneil, HISTORICAL GEOGRAPHY - THROUGH THE GATES OF SPACE AND TIME - BUTLIN,RA, The American historical review, 100(5), 1995, pp. 1518-1518
Authors:
NAQVI SSH
KRUKAR RH
MCNEIL JR
FRANKE JE
NIEMCZYK TM
HAALAND DM
GOTTSCHO RA
KORNBLIT A
Citation: Ssh. Naqvi et al., ETCH DEPTH ESTIMATION OF LARGE-PERIOD SILICON GRATINGS WITH MULTIVARIATE CALIBRATION OF RIGOROUSLY SIMULATED DIFFRACTION PROFILES, Journal of the Optical Society of America. A, Optics, image science,and vision., 11(9), 1994, pp. 2485-2493
Authors:
NAQVI SSH
ZAIDI SH
BRUECK SRJ
MCNEIL JR
Citation: Ssh. Naqvi et al., DIFFRACTIVE TECHNIQUES FOR LITHOGRAPHIC PROCESS MONITORING AND CONTROL, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3600-3606
Authors:
MILNER LM
BISHOP KP
NAQVI SSH
MCNEIL JR
Citation: Lm. Milner et al., STEPPER FOCUS CHARACTERIZATION USING DIFFRACTION FROM LATENT IMAGES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(4), 1993, pp. 1258-1266
Authors:
ORLOFF GJ
WOOLLAM JA
HE P
MCGAHAN WA
MCNEIL JR
JACOBSON RD
JOHS B
Citation: Gj. Orloff et al., EX-SITU VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY STUDIES OF ELECTRON-CYCLOTRON-RESONANCE ETCHING OF HG1-XCDXTE, Thin solid films, 233(1-2), 1993, pp. 46-49
Authors:
HICKMAN KC
WINGLER R
WILLIAMS FL
SOBCZAK CE
CARNIGLIA CK
KRANENBERG CF
JUNGLING K
MCNEIL JR
BLACK JP
Citation: Kc. Hickman et al., CORRELATION BETWEEN SUBSTRATE PREPARATION TECHNIQUE AND SCATTER OBSERVED FROM OPTICAL COATINGS, Applied optics, 32(19), 1993, pp. 3409-3415
Authors:
EVANS AT
BROADSTONE R
STAPLETON J
HOOKS TM
JOHNSTON SM
MCNEIL JR
Citation: At. Evans et al., COMPARISON OF PENTOBARBITAL ALONE AND PENTOBARBITAL IN COMBINATION WITH LIDOCAINE FOR EUTHANASIA OF DOGS, Journal of the American Veterinary Medical Association, 203(5), 1993, pp. 664-666
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