AAAAAA
Results:
1-20
|
Results: 20
Authors:
MULLER RS
Citation: Rs. Muller, UNTITLED, Journal of microelectromechanical systems, 7(3), 1998, pp. 285-285
Authors:
FRIEDBERGER A
MULLER RS
Citation: A. Friedberger et Rs. Muller, IMPROVED SURFACE-MICROMACHINED HINGES FOR FOLD-OUT STRUCTURES, Journal of microelectromechanical systems, 7(3), 1998, pp. 315-319
Authors:
MULLER RS
Citation: Rs. Muller, UNTITLED, Journal of microelectromechanical systems, 7(1), 1998, pp. 3-3
Authors:
KIANG MH
SOLGAARD O
LAU KY
MULLER RS
Citation: Mh. Kiang et al., ELECTROSTATIC COMBDRIVE-ACTUATED MICROMIRRORS FOR LASER-BEAM SCANNINGAND POSITIONING, Journal of microelectromechanical systems, 7(1), 1998, pp. 27-37
Authors:
KIANG MH
SOLGAARD O
LAU KY
MULLER RS
Citation: Mh. Kiang et al., POLYSILICON OPTICAL MICROSCANNERS FOR LASER-SCANNING DISPLAYS, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 195-199
Authors:
BUSTILLO JM
HOWE RT
MULLER RS
Citation: Jm. Bustillo et al., SURFACE MICROMACHINING FOR MICROELECTROMECHANICAL SYSTEMS, Proceedings of the IEEE, 86(8), 1998, pp. 1552-1574
Authors:
MULLER RS
LAU KY
Citation: Rs. Muller et Ky. Lau, SURFACE-MICROMACHINED MICROOPTICAL ELEMENTS AND SYSTEMS, Proceedings of the IEEE, 86(8), 1998, pp. 1705-1720
Authors:
JUDY JW
MULLER RS
Citation: Jw. Judy et Rs. Muller, MAGNETICALLY ACTUATED, ADDRESSABLE MICROSTRUCTURES, Journal of microelectromechanical systems, 6(3), 1997, pp. 249-256
Authors:
FRANCIS DA
KIANG MH
SOLGAARD O
LAU KY
MULLER RS
CHANGHASNAIN CJ
Citation: Da. Francis et al., COMPACT 2D LASER-BEAM SCANNER WITH FAN LASER ARRAY AND SI MICROMACHINED MICROSCANNER, Electronics Letters, 33(13), 1997, pp. 1143-1145
Authors:
WILLIAMS KR
MULLER RS
Citation: Kr. Williams et Rs. Muller, ETCH RATES FOR MICROMACHINING PROCESSING, Journal of microelectromechanical systems, 5(4), 1996, pp. 256-269
Authors:
DANEMAN MJ
TIEN NC
SOLGAARD O
PISANO AP
LAU KY
MULLER RS
Citation: Mj. Daneman et al., LINEAR MICROVIBROMOTOR FOR POSITIONING OPTICAL-COMPONENTS, Journal of microelectromechanical systems, 5(3), 1996, pp. 159-165
Authors:
JUDY JW
MULLER RS
ZAPPE HH
Citation: Jw. Judy et al., MAGNETIC MICROACTUATION OF POLYSILICON FLEXURE STRUCTURES (VOL 4, PG 162, 1995), Journal of microelectromechanical systems, 5(1), 1996, pp. 73-73
Authors:
DANEMAN MJ
SOLGAARD O
TIEN NC
LAU KY
MULLER RS
Citation: Mj. Daneman et al., LASER-TO-FIBER COUPLING MODULE USING A MICROMACHINED ALIGNMENT MIRROR, IEEE photonics technology letters, 8(3), 1996, pp. 396-398
Authors:
KIANG MH
SOLGAARD O
MULLER RS
LAU KY
Citation: Mh. Kiang et al., MICROMACHINED POLYSILICON MICROSCANNERS FOR BARCODE READERS, IEEE photonics technology letters, 8(12), 1996, pp. 1707-1709
Authors:
KIANG MH
SOLGAARD O
MULLER RS
LAU RY
Citation: Mh. Kiang et al., SILICON-MICROMACHINED MICROMIRRORS WITH INTEGRATED HIGH-PRECISION ACTUATORS FOR EXTERNAL-CAVITY SEMICONDUCTOR-LASERS, IEEE photonics technology letters, 8(1), 1996, pp. 95-97
Authors:
JUDY JW
MULLER RS
Citation: Jw. Judy et Rs. Muller, MAGNETIC MICROACTUATION OF TORSIONAL POLYSILICON STRUCTURES, Sensors and actuators. A, Physical, 53(1-3), 1996, pp. 392-397
Authors:
TIEN NC
SOLGAARD O
KIANG MH
DANEMAN M
LAU KY
MULLER RS
Citation: Nc. Tien et al., SURFACE-MICROMACHINED MIRRORS FOR LASER-BEAM POSITIONING, Sensors and actuators. A, Physical, 52(1-3), 1996, pp. 76-80
Authors:
JUDY JW
MULLER RS
ZAPPE HH
Citation: Jw. Judy et al., MAGNETIC MICROACTUATION OF POLYSILICON FLEXURE STRUCTURES, Journal of microelectromechanical systems, 4(4), 1995, pp. 162-169
Authors:
SOLGAARD O
DANEMAN M
TIEN NC
FRIEDBERGER A
MULLER RS
LAU KY
Citation: O. Solgaard et al., OPTOELECTRONIC PACKAGING USING SILICON SURFACE-MICROMACHINED ALIGNMENT MIRRORS, IEEE photonics technology letters, 7(1), 1995, pp. 41-43
Authors:
ANDERSON RC
MULLER RS
TOBIAS CW
Citation: Rc. Anderson et al., CHEMICAL SURFACE MODIFICATION OF POROUS SILICON, Journal of the Electrochemical Society, 140(5), 1993, pp. 1393-1396
Risultati:
1-20
|