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Brink, DJ
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Prinsloo, LC
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Allegre, J
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Authors:
Kunert, HW
Juillaguet, S
Camassel, J
Malherbe, JB
Odendaal, RQ
Brink, DJ
Prinsloo, LC
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Auret, FD
Goodman, SA
Malherbe, JB
Citation: M. Mamor et al., Argon plasma sputter etching induced defect levels in strained, epitaxial p-type Si-Ge alloys, THIN SOL FI, 344, 1999, pp. 416-419