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Results: 1-16 |
Results: 16
NOVEL TECHNIQUE FOR IMPROVING PATTERN PLACEMENT IN MEMBRANE MASK MAKING
Authors: PERKINS FK MARRIAN CRK PECKERAR MC
Citation: Fk. Perkins et al., NOVEL TECHNIQUE FOR IMPROVING PATTERN PLACEMENT IN MEMBRANE MASK MAKING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2218-2223
NANOFABRICATION WITH PROXIMAL PROBES
Authors: SNOW ES CAMPBELL PM PERKINS FK
Citation: Es. Snow et al., NANOFABRICATION WITH PROXIMAL PROBES, Proceedings of the IEEE, 85(4), 1997, pp. 601-611
MODELING OF ELECTRON ELASTIC AND INELASTIC-SCATTERING
Authors: MARRIAN CRK PERKINS FK PARK D DOBISZ EA PECKERAR MC RHEE KW BASS R
Citation: Crk. Marrian et al., MODELING OF ELECTRON ELASTIC AND INELASTIC-SCATTERING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3864-3869
FEATURE CONTRAST IN DOSE-EQUALIZATION SCHEMES USED FOR ELECTRON-BEAM PROXIMITY CONTROL
Authors: PECKERAR M MARRIAN C PERKINS FK
Citation: M. Peckerar et al., FEATURE CONTRAST IN DOSE-EQUALIZATION SCHEMES USED FOR ELECTRON-BEAM PROXIMITY CONTROL, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3880-3886
3-DIMENSIONAL ELECTRON-OPTICAL MODELING OF SCANNING TUNNELING MICROSCOPE LITHOGRAPHY IN RESISTS
Authors: DOBISZ EA KOOPS HWP PERKINS FK MARRIAN CRK BRANDOW SL
Citation: Ea. Dobisz et al., 3-DIMENSIONAL ELECTRON-OPTICAL MODELING OF SCANNING TUNNELING MICROSCOPE LITHOGRAPHY IN RESISTS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 4148-4152
ELECTRON-ENERGY-LOSS IN THIN METALLIC-FILMS
Authors: MARRIAN CRK PERKINS FK MCCARTHY D BASS R
Citation: Crk. Marrian et al., ELECTRON-ENERGY-LOSS IN THIN METALLIC-FILMS, Applied physics letters, 68(5), 1996, pp. 678-680
FABRICATION OF 15 NM WIDE TRENCHES IN SI BY VACUUM SCANNING TUNNELINGMICROSCOPE LITHOGRAPHY OF AN ORGANOSILANE SELF-ASSEMBLED FILM AND REACTIVE ION ETCHING
Authors: PERKINS FK DOBISZ EA BRANDOW SL CALVERT JM KOSAKOWSKI JE MARRIAN CRK
Citation: Fk. Perkins et al., FABRICATION OF 15 NM WIDE TRENCHES IN SI BY VACUUM SCANNING TUNNELINGMICROSCOPE LITHOGRAPHY OF AN ORGANOSILANE SELF-ASSEMBLED FILM AND REACTIVE ION ETCHING, Applied physics letters, 68(4), 1996, pp. 550-552
SIMULATION OF SCANNING TUNNELING MICROSCOPE INTERACTION WITH RESISTS
Authors: DOBISZ EA KOOPS HWP PERKINS FK
Citation: Ea. Dobisz et al., SIMULATION OF SCANNING TUNNELING MICROSCOPE INTERACTION WITH RESISTS, Applied physics letters, 68(25), 1996, pp. 3653-3655
SYNCHROTRON-RADIATION-INDUCED DECOMPOSITION OF CLOSO-1,2-DICARBADODECABORANE
Authors: BYUN D HWANG S ZHANG JD ZENG H PERKINS FK VIDALI G DOWBEN PA
Citation: D. Byun et al., SYNCHROTRON-RADIATION-INDUCED DECOMPOSITION OF CLOSO-1,2-DICARBADODECABORANE, JPN J A P 2, 34(7B), 1995, pp. 941-944
SPECTROSCOPIC CHARACTERIZATION OF SELF-ASSEMBLED ORGANOSILANE MONOLAYER FILMS
Authors: PERKINS FK DOBISZ EA MARRIAN CRK BRANDOW SL
Citation: Fk. Perkins et al., SPECTROSCOPIC CHARACTERIZATION OF SELF-ASSEMBLED ORGANOSILANE MONOLAYER FILMS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2841-2845
PROXIMAL PROBE STUDY OF SELF-ASSEMBLED MONOLAYER RESIST MATERIALS
Authors: PERKINS FK DOBISZ EA BRANDOW SL KOLOSKI TS CALVERT JM RHEE KW KOSAKOWSKI JE MARRIAN CRK
Citation: Fk. Perkins et al., PROXIMAL PROBE STUDY OF SELF-ASSEMBLED MONOLAYER RESIST MATERIALS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3725-3730
LOW-VOLTAGE ELECTRON-BEAM LITHOGRAPHY IN SELF-ASSEMBLED ULTRATHIN FILMS WITH THE SCANNING TUNNELING MICROSCOPE
Authors: MARRIAN CRK PERKINS FK BRANDOW SL KOLOSKI TS DOBISZ EA CALVERT JM
Citation: Crk. Marrian et al., LOW-VOLTAGE ELECTRON-BEAM LITHOGRAPHY IN SELF-ASSEMBLED ULTRATHIN FILMS WITH THE SCANNING TUNNELING MICROSCOPE, Applied physics letters, 64(3), 1994, pp. 390-392
HETEROJUNCTION FABRICATION BY SELECTIVE-AREA CHEMICAL-VAPOR-DEPOSITION INDUCED BY SYNCHROTRON-RADIATION
Authors: BYUN DG HWANG SD DOWBEN PA PERKINS FK FILIPS F IANNO NJ
Citation: Dg. Byun et al., HETEROJUNCTION FABRICATION BY SELECTIVE-AREA CHEMICAL-VAPOR-DEPOSITION INDUCED BY SYNCHROTRON-RADIATION, Applied physics letters, 64(15), 1994, pp. 1968-1970
DETERMINATION OF ACID DIFFUSION RATE IN A CHEMICALLY AMPLIFIED RESISTWITH SCANNING TUNNELING MICROSCOPE LITHOGRAPHY
Authors: PERKINS FK DOBISZ EA MARRIAN CRK
Citation: Fk. Perkins et al., DETERMINATION OF ACID DIFFUSION RATE IN A CHEMICALLY AMPLIFIED RESISTWITH SCANNING TUNNELING MICROSCOPE LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2597-2602
REDUCTION AND ELIMINATION OF PROXIMITY EFFECTS
Authors: DOBISZ EA MARRIAN CRK SALVINO RE ANCONA MA PERKINS FK TURNER NH
Citation: Ea. Dobisz et al., REDUCTION AND ELIMINATION OF PROXIMITY EFFECTS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2733-2740
SURFACE CHARACTERIZATION
Authors: MCGUIRE GE RAY MA SIMKO SJ PERKINS FK BRANDOW SL DOBISZ EA NEMANICH RJ CHOURASIA AR CHOPRA DR
Citation: Ge. Mcguire et al., SURFACE CHARACTERIZATION, Analytical chemistry, 65(12), 1993, pp. 311-333
Risultati: 1-16 |