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Results:
1-8
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Results: 8
Authors:
REIMER K
HENKE W
QUENZER HJ
PILZ W
WAGNER B
Citation: K. Reimer et al., ONE-LEVEL GRAY-TONE DESIGN - MASK DATA PREPARATION AND PATTERN TRANSFER, Microelectronic engineering, 30(1-4), 1996, pp. 559-562
Authors:
LOCHEL B
MACIOSSEK A
QUENZER HJ
WAGNER B
Citation: B. Lochel et al., ULTRAVIOLET DEPTH LITHOGRAPHY AND GALVANOFORMING FOR MICROMACHINING, Journal of the Electrochemical Society, 143(1), 1996, pp. 237-244
Authors:
WAGNER B
QUENZER HJ
HENKE W
HOPPE W
PILZ W
Citation: B. Wagner et al., MICROFABRICATION OF COMPLEX SURFACE TOPOGRAPHIES USING GREY-TONE LITHOGRAPHY, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 89-94
Authors:
LOCHEL B
MACIOSSEK A
QUENZER HJ
WAGNER B
ENGELMANN G
Citation: B. Lochel et al., MAGNETICALLY DRIVEN MICROSTRUCTURES FABRICATED WITH MULTILAYER ELECTROPLATING, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 98-103
Authors:
HENKE W
HOPPE W
QUENZER HJ
STAUDTFISCHBACH P
WAGNER B
Citation: W. Henke et al., SIMULATION ASSISTED DESIGN OF PROCESSES FOR GRAY-TONE LITHOGRAPHY, Microelectronic engineering, 27(1-4), 1995, pp. 267-270
Authors:
MACIOSSEK A
LOCHEL B
QUENZER HJ
WAGNER B
SCHULZE S
NOETZEL J
Citation: A. Maciossek et al., GALVANOPLATING AND SACRIFICIAL LAYERS FOR SURFACE MICROMACHINING, Microelectronic engineering, 27(1-4), 1995, pp. 503-508
Authors:
HENKE W
HOPPE W
QUENZER HJ
STAUDTFISCHBACH P
WAGNER B
Citation: W. Henke et al., SIMULATION AND PROCESS DESIGN OF GRAY-TONE LITHOGRAPHY FOR THE FABRICATION OF ARBITRARILY-SHAPED SURFACES, JPN J A P 1, 33(12B), 1994, pp. 6809-6815
Authors:
LOCHEL B
MACIOSSEK A
KONIG M
QUENZER HJ
HUBER HL
Citation: B. Lochel et al., GALVANOPLATED 3D STRUCTURES FOR MICRO SYSTEMS, Microelectronic engineering, 23(1-4), 1994, pp. 455-459
Risultati:
1-8
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