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Authors: TURCU ICE REEVES CM STEVENSON JTM ROSS AWS GUNDLACH AM PREWETT P ANASTASI P KOEK B MITCHELL P LAKE P

Citation: Ice. Turcu et al., 180NM X-RAY-LITHOGRAPHY WITH A HIGH-REPETITION-RATE LASER-PLASMA SOURCE, Microelectronic engineering, 27(1-4), 1995, pp. 295-298

Authors: REEVES CM TURCU ICE PREWETT PD GUNDLACH AM STEVENSON JT WALTON AJ ROSS AWS LAWES RA ANASTASI P BURGE R MITCHELL P

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Authors: REEVES CM WIND SJ HOHN FJ BUCCHIGNANO JJ LII YT KLAUS DP

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Authors: WALTON AJ FALLON M STEVENSON JTM ROSS AWS REEVES CM

Citation: Aj. Walton et al., IMPROVED STRUCTURE FOR OPTIMIZATION OF FOCUS AND EXPOSURE FOR IC PRODUCTION, Electronics Letters, 29(17), 1993, pp. 1573-1574