Authors:
ROSINK JJWM
BLAUW MA
GEERLIGS LJ
VANDERDRIFT E
ROUSSEEUW BAC
RADELAAR S
Citation: Jjwm. Rosink et al., GROWTH AND CHARACTERIZATION OF ORGANIC MULTILAYERS ON GOLD GROWN BY ORGANIC MOLECULAR-BEAM DEPOSITION, Optical materials, 9(1-4), 1998, pp. 416-422
Authors:
VOORMA HJ
LOUIS E
KOSTER NB
BIJKERK F
ZIJLSTRA T
DEGROOT LEM
ROUSSEEUW BAC
ROMIJN J
VANDERDRIFT EWJM
FRIEDRICH J
Citation: Hj. Voorma et al., FABRICATION AND ANALYSIS OF EXTREME-ULTRAVIOLET REFLECTION MASKS WITHPATTERNED W C ABSORBER BILAYERS/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(2), 1997, pp. 293-298
Authors:
BIJKERK F
SHMAENOK LA
LOUIS E
VOORMA HJ
KOSTER NB
BRUINEMAN C
BASTIAENSEN RKFJ
VANDERDRIFT EWJM
ROMIJN J
DEGROOT LEM
ROUSSEEUW BAC
ZIJLSTRA T
PLATONOV YY
SALASHCHENKO NN
Citation: F. Bijkerk et al., EXTREME UV LITHOGRAPHY - A NEW LASER-PLASMA TARGET CONCEPT AND FABRICATION OF MULTILAYER REFLECTION MASKS, Microelectronic engineering, 30(1-4), 1996, pp. 183-186
Authors:
PUYENBROEK R
BOSSCHER G
VANDEGRAMPEL JC
ROUSSEEUW BAC
VANDERDRIFT EWJM
Citation: R. Puyenbroek et al., THE APPLICATION OF PHOSPHAZENE CONTAINING POLYMERS AS NEGATIVE RESISTS IN MICROLITHOGRAPHY, Phosphorus, sulfur and silicon and the related elements, 93(1-4), 1994, pp. 277-280
Authors:
HILBRANDIE GR
BAKKER SJM
VANDERDRIFT E
ROUSSEEUW BAC
KLAPWIJK TM
RADELAAR S
Citation: Gr. Hilbrandie et al., MESOSCOPIC SILICON COUPLED SUPERCONDUCTING JUNCTIONS OF COSI2 FORMED IN A SELF-ALIGNED PROCESS, Microelectronic engineering, 23(1-4), 1994, pp. 445-448
Authors:
LOUIS E
BIJKERK F
SHMAENOK L
VOORMA HJ
VANDERWIEL MJ
SCHLATMANN R
VERHOEVEN J
VANDERDRIFT EWJM
ROMIJN J
ROUSSEEUW BAC
VOSS F
DESOR R
NIKOLAUS B
Citation: E. Louis et al., SOFT-X-RAY PROJECTION LITHOGRAPHY USING A HIGH-REPETITION-RATE LASER-INDUCED X-RAY SOURCE FOR SUB-100 NANOMETER LITHOGRAPHY PROCESSES, Microelectronic engineering, 21(1-4), 1993, pp. 67-70
Authors:
BAKKER SJM
ROUSSEEUW BAC
VANDERDRIFT E
KLAPWIJK TM
RADELAAR S
Citation: Sjm. Bakker et al., FABRICATION OF SI-COUPLED 3 TERMINAL SUPERCONDUCTING DEVICE USING SELECTIVE DEPOSITION OF BETA-W, Microelectronic engineering, 21(1-4), 1993, pp. 435-438