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Results: 1-13 |
Results: 13

Authors: SCHOMBURG WK AHRENS R BACHER W GOLL C MEINZER S QUINTE A
Citation: Wk. Schomburg et al., AMANDA - LOW-COST PRODUCTION OF MICROFLUIDIC DEVICES, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 153-158

Authors: SCHOMBURG WK GOLL C
Citation: Wk. Schomburg et C. Goll, DESIGN OPTIMIZATION OF BISTABLE MICRODIAPHRAGM VALVES, Sensors and actuators. A, Physical, 64(3), 1998, pp. 259-264

Authors: WALLRABE U RUTHER P SCHALLER T SCHOMBURG WK
Citation: U. Wallrabe et al., MICROSYSTEMS IN MEDICINE, International journal of artificial organs, 21(3), 1998, pp. 137-146

Authors: GOLL C BACHER W BUSTGENS B MAAS D RUPRECHT R SCHOMBURG WK
Citation: C. Goll et al., AN ELECTROSTATICALLY ACTUATED POLYMER MICROVALVE EQUIPPED WITH A MOVABLE MEMBRANE-ELECTRODE, Journal of micromechanics and microengineering, 7(3), 1997, pp. 224-226

Authors: GOLL C BACHER W BUSTGENS B MAAS D MENZ W SCHOMBURG WK
Citation: C. Goll et al., MICROVALVES WITH BISTABLE BUCKLED POLYMER DIAPHRAGMS, Journal of micromechanics and microengineering, 6(1), 1996, pp. 77-79

Authors: BORNER MW KOHL M PANTENBURG FJ BACHER W HEIN H SCHOMBURG WK
Citation: Mw. Borner et al., SUBMICRON LIGA PROCESS FOR MOVABLE MICROSTRUCTURES, Microelectronic engineering, 30(1-4), 1996, pp. 505-508

Authors: SCHOMBURG WK MAAS D BACHER W BUSTGENS B FAHRENBERG J MENZ W SEIDEL D
Citation: Wk. Schomburg et al., ASSEMBLY FOR MICROMECHANICS AND LIGA, Journal of micromechanics and microengineering, 5(2), 1995, pp. 57-63

Authors: FAHRENBERG J BIER W MAAS D MENZ W RUPRECHT R SCHOMBURG WK
Citation: J. Fahrenberg et al., A MICROVALVE SYSTEM FABRICATED BY THERMOPLASTIC MOLDING, Journal of micromechanics and microengineering, 5(2), 1995, pp. 169-171

Authors: BORNER MW ZURHORSTMEYER S MURPHY MC MUNCH HJ SCHOMBURG WK VITT M
Citation: Mw. Borner et al., ULTRASONIC MEASUREMENTS WITH MICROMEMBRANES, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 62-65

Authors: SCHOMBURG WK VOLLMER J BUSTGENS B FAHRENBERG J HEIN H MENZ W
Citation: Wk. Schomburg et al., MICROFLUIDIC COMPONENTS IN LIGA TECHNIQUE, Journal of micromechanics and microengineering, 4(4), 1994, pp. 186-191

Authors: RAPP R SCHOMBURG WK MAAS D SCHULZ J STARK W
Citation: R. Rapp et al., LIGA MICROPUMP FOR GASES AND LIQUIDS, Sensors and actuators. A, Physical, 40(1), 1994, pp. 57-61

Authors: BACHER W MENZ W MOHR J MULLER C SCHOMBURG WK
Citation: W. Bacher et al., THE LIGA PROCESS AND ITS POTENTIAL FOR MI CROSYSTEMS, Naturwissenschaften, 81(12), 1994, pp. 536-545

Authors: KADEL K SCHOMBURG WK STERN G
Citation: K. Kadel et al., X-RAY MASKS WITH TUNGSTEN ABSORBERS FOR USE IN THE LIGA PROCESS, Microelectronic engineering, 21(1-4), 1993, pp. 123-126
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