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Results:
1-15
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Results: 15
Authors:
ERICSON F
GREEK S
SODERKVIST J
SCHWEITZ JA
Citation: F. Ericson et al., HIGH-SENSITIVITY SURFACE MICROMACHINED STRUCTURES FOR INTERNAL-STRESSAND STRESS GRADIENT EVALUATION, Journal of micromechanics and microengineering, 7(1), 1997, pp. 30-36
Authors:
THORNELL G
HJORT K
STUDER B
SCHWEITZ JA
Citation: G. Thornell et al., ANISOTROPY-INDEPENDENT THROUGH MICROMACHINING OF QUARTZ RESONATORS BYION TRACK ETCHING, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 44(4), 1997, pp. 829-838
Authors:
GREEK S
ERICSON F
JOHANSSON S
SCHWEITZ JA
Citation: S. Greek et al., IN-SITU TENSILE-STRENGTH MEASUREMENT AND WEIBULL ANALYSIS OF THICK-FILM AND THIN-FILM MICROMACHINED POLYSILICON STRUCTURES, Thin solid films, 292(1-2), 1997, pp. 247-254
Authors:
LANGE P
KIRSTEN M
RIETHMULLER W
WENK B
ZWICKER G
MORANTE JR
ERICSON F
SCHWEITZ JA
Citation: P. Lange et al., THICK POLYCRYSTALLINE SILICON FOR SURFACE-MICROMECHANICAL APPLICATIONS - DEPOSITION, STRUCTURING AND MECHANICAL CHARACTERIZATION, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 674-678
Authors:
BENITEZ MA
FONSECA L
ESTEVE J
BENRAKKAD MS
MORANTE JR
SAMITIER J
SCHWEITZ JA
Citation: Ma. Benitez et al., STRESS-PROFILE CHARACTERIZATION AND TEST-STRUCTURE ANALYSIS OF SINGLEAND DOUBLE ION-IMPLANTED LPCVD POLYCRYSTALLINE SILICON, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 718-723
Authors:
THORNELL G
BEXELL M
SCHWEITZ JA
JOHANSSON S
Citation: G. Thornell et al., DESIGN AND FABRICATION OF A GRIPPING TOOL FOR MICROMANIPULATION, Sensors and actuators. A, Physical, 53(1-3), 1996, pp. 428-433
Authors:
HJORT K
THORNELL G
SCHWEITZ JA
SPOHR R
Citation: K. Hjort et al., QUARTZ MICROMACHINING BY LITHOGRAPHIC CONTROL OF ION TRACK ETCHING, Applied physics letters, 69(22), 1996, pp. 3435-3436
Authors:
KIRSTEN M
WENK B
ERICSON F
SCHWEITZ JA
RIETHMULLER W
LANGE P
Citation: M. Kirsten et al., DEPOSITION OF THICK DOPED POLYSILICON FILMS WITH LOW-STRESS IN AN EPITAXIAL REACTOR FOR SURFACE MICROMACHINING APPLICATIONS, Thin solid films, 259(2), 1995, pp. 181-187
Authors:
TIENSUU AL
BEXELL M
SCHWEITZ JA
SMITH L
JOHANSSON S
Citation: Al. Tiensuu et al., ASSEMBLING 3-DIMENSIONAL MICROSTRUCTURES USING GOLD SILICON EUTECTIC BONDING, Sensors and actuators. A, Physical, 45(3), 1994, pp. 227-236
Authors:
BEXELL M
TIENSUU AL
SCHWEITZ JA
SODERKVIST J
JOHANSSON S
Citation: M. Bexell et al., CHARACTERIZATION OF AN INCHWORM PROTOTYPE MOTOR, Sensors and actuators. A, Physical, 43(1-3), 1994, pp. 322-329
Authors:
HJORT K
ERICSON F
SCHWEITZ JA
HALLIN C
JANZEN E
Citation: K. Hjort et al., HARDNESS, INTERNAL-STRESS AND FRACTURE-TOUGHNESS OF EPITAXIAL ALXGA1-XAS FILMS, Thin solid films, 250(1-2), 1994, pp. 157-163
Authors:
ERICSON F
HJORT K
SCHWEITZ JA
ANDERSSON S
JANZEN E
Citation: F. Ericson et al., MICRO-SCRIBES IN SEMIINSULATING GAAS STUDIED BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY, Journal of crystal growth, 143(1-2), 1994, pp. 22-28
Authors:
HJORT K
ERICSON F
SCHWEITZ JA
HALLIN C
JANZEN E
Citation: K. Hjort et al., GAAS LOW-TEMPERATURE FUSION BONDING, Journal of the Electrochemical Society, 141(11), 1994, pp. 3242-3245
Authors:
LJUNGCRANTZ H
HULTMAN L
SUNDGREN JE
JOHANSSON S
KRISTENSEN N
SCHWEITZ JA
SHUTE CJ
Citation: H. Ljungcrantz et al., RESIDUAL-STRESSES AND FRACTURE PROPERTIES OF MAGNETRON-SPUTTERED TI FILMS ON SI MICROELEMENTS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(3), 1993, pp. 543-553
Authors:
WESTBERG H
BOMAN M
JOHANSSON S
SCHWEITZ JA
Citation: H. Westberg et al., FREESTANDING SILICON MICROSTRUCTURES FABRICATED BY LASER CHEMICAL-PROCESSING, Journal of applied physics, 73(11), 1993, pp. 7864-7871
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