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Results: 1-25 | 26-26
Results: 1-25/26
A NEW SILICON GAS-FLOW SENSOR-BASED ON LIFT FORCE
Authors: SVEDIN N KALVESTEN E STEMME E STEMME G
Citation: N. Svedin et al., A NEW SILICON GAS-FLOW SENSOR-BASED ON LIFT FORCE, Journal of microelectromechanical systems, 7(3), 1998, pp. 303-308
NEW SMALL RADIUS JOINTS BASED ON THERMAL SHRINKAGE OF POLYIMIDE IN V-GROOVES FOR ROBUST SELF-ASSEMBLY 3D MICROSTRUCTURES
Authors: EBEFORS T KALVESTEN E STEMME G
Citation: T. Ebefors et al., NEW SMALL RADIUS JOINTS BASED ON THERMAL SHRINKAGE OF POLYIMIDE IN V-GROOVES FOR ROBUST SELF-ASSEMBLY 3D MICROSTRUCTURES, Journal of micromechanics and microengineering, 8(3), 1998, pp. 188-194
DEEP WET ETCHING OF BOROSILICATE GLASS USING AN ANODICALLY BONDED SILICON SUBSTRATE AS MASK
Authors: CORMAN T ENOKSSON P STEMME G
Citation: T. Corman et al., DEEP WET ETCHING OF BOROSILICATE GLASS USING AN ANODICALLY BONDED SILICON SUBSTRATE AS MASK, Journal of micromechanics and microengineering, 8(2), 1998, pp. 84-87
NEW CO2 FILTERS FABRICATED BY ANODIC BONDING AT OVERPRESSURE IN CO2 ATMOSPHERE
Authors: CORMAN T KALVESTEN E HUIKU M WECKSTROM K MERILAINEN P STEMME G
Citation: T. Corman et al., NEW CO2 FILTERS FABRICATED BY ANODIC BONDING AT OVERPRESSURE IN CO2 ATMOSPHERE, Sensors and actuators. A, Physical, 69(2), 1998, pp. 166-171
A LIFT-FORCE FLOW SENSOR DESIGNED FOR ACCELERATION INSENSITIVITY
Authors: SVEDIN N KALVESTEN E STEMME E STEMME G
Citation: N. Svedin et al., A LIFT-FORCE FLOW SENSOR DESIGNED FOR ACCELERATION INSENSITIVITY, Sensors and actuators. A, Physical, 68(1-3), 1998, pp. 263-268
DYNAMIC ACTUATION OF POLYIMIDE V-GROOVE JOINTS BY ELECTRICAL HEATING
Authors: EBEFORS T KALVESTEN E STEMME G
Citation: T. Ebefors et al., DYNAMIC ACTUATION OF POLYIMIDE V-GROOVE JOINTS BY ELECTRICAL HEATING, Sensors and actuators. A, Physical, 67(1-3), 1998, pp. 199-204
LOW-PRESSURE-ENCAPSULATED RESONANT STRUCTURES WITH INTEGRATED ELECTRODES FOR ELECTROSTATIC EXCITATION AND CAPACITIVE DETECTION
Authors: CORMAN T ENOKSSON P STEMME G
Citation: T. Corman et al., LOW-PRESSURE-ENCAPSULATED RESONANT STRUCTURES WITH INTEGRATED ELECTRODES FOR ELECTROSTATIC EXCITATION AND CAPACITIVE DETECTION, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 160-166
VALVE-LESS DIFFUSER MICROPUMPS FABRICATED USING THERMOPLASTIC REPLICATION
Authors: OLSSON A LARSSON O HOLM J LUNDBLADH L OHMAN O STEMME G
Citation: A. Olsson et al., VALVE-LESS DIFFUSER MICROPUMPS FABRICATED USING THERMOPLASTIC REPLICATION, Sensors and actuators. A, Physical, 64(1), 1998, pp. 63-68
A SILICON RESONANT SENSOR STRUCTURE FOR CORIOLIS MASS-FLOW MEASUREMENTS
Authors: ENOKSSON P STEMME G STEMME E
Citation: P. Enoksson et al., A SILICON RESONANT SENSOR STRUCTURE FOR CORIOLIS MASS-FLOW MEASUREMENTS, Journal of microelectromechanical systems, 6(2), 1997, pp. 119-125
MICROMACHINED FLAT-WALLED VALVELESS DIFFUSER PUMPS
Authors: OLSSON A ENOKSSON P STEMME G STEMME E
Citation: A. Olsson et al., MICROMACHINED FLAT-WALLED VALVELESS DIFFUSER PUMPS, Journal of microelectromechanical systems, 6(2), 1997, pp. 161-166
THERMAL CHARACTERIZATION OF SURFACE-MICROMACHINED SILICON-NITRIDE MEMBRANES FOR THERMAL INFRARED DETECTORS
Authors: ERIKSSON P ANDERSSON JY STEMME G
Citation: P. Eriksson et al., THERMAL CHARACTERIZATION OF SURFACE-MICROMACHINED SILICON-NITRIDE MEMBRANES FOR THERMAL INFRARED DETECTORS, Journal of microelectromechanical systems, 6(1), 1997, pp. 55-61
GAS DAMPING OF ELECTROSTATICALLY EXCITED RESONATORS
Authors: CORMAN T ENOKSSON P STEMME G
Citation: T. Corman et al., GAS DAMPING OF ELECTROSTATICALLY EXCITED RESONATORS, Sensors and actuators. A, Physical, 61(1-3), 1997, pp. 249-255
VIBRATION MODES OF A RESONANT SILICON TUBE DENSITY SENSOR
Authors: ENOKSSON P STEMME G STEMME E
Citation: P. Enoksson et al., VIBRATION MODES OF A RESONANT SILICON TUBE DENSITY SENSOR, Journal of microelectromechanical systems, 5(1), 1996, pp. 39-44
A VALVE-LESS PLANAR PUMP ISOTROPICALLY ETCHED IN SILICON
Authors: OLSSON A ENOKSSON P STEMME G STEMME E
Citation: A. Olsson et al., A VALVE-LESS PLANAR PUMP ISOTROPICALLY ETCHED IN SILICON, Journal of micromechanics and microengineering, 6(1), 1996, pp. 87-91
DIFFUSER-ELEMENT DESIGN INVESTIGATION FOR VALVE-LESS PUMPS
Authors: OLSSON A STEMME G STEMME E
Citation: A. Olsson et al., DIFFUSER-ELEMENT DESIGN INVESTIGATION FOR VALVE-LESS PUMPS, Sensors and actuators. A, Physical, 57(2), 1996, pp. 137-143
SILICON TUBE STRUCTURES FOR A FLUID-DENSITY SENSOR
Authors: ENOKSSON P STEMME G STEMME E
Citation: P. Enoksson et al., SILICON TUBE STRUCTURES FOR A FLUID-DENSITY SENSOR, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 558-562
AN INTEGRATED PRESSURE-FLOW SENSOR FOR CORRELATION-MEASUREMENTS IN TURBULENT GAS-FLOWS
Authors: KALVESTEN E VIEIDER C LOFDAHL L STEMME G
Citation: E. Kalvesten et al., AN INTEGRATED PRESSURE-FLOW SENSOR FOR CORRELATION-MEASUREMENTS IN TURBULENT GAS-FLOWS, Sensors and actuators. A, Physical, 52(1-3), 1996, pp. 51-58
SMALL SILICON PRESSURE TRANSDUCERS FOR SPACE-TIME CORRELATION-MEASUREMENTS IN A FLAT-PLATE BOUNDARY-LAYER
Authors: LOFDAHL L KALVESTEN E STEMME G
Citation: L. Lofdahl et al., SMALL SILICON PRESSURE TRANSDUCERS FOR SPACE-TIME CORRELATION-MEASUREMENTS IN A FLAT-PLATE BOUNDARY-LAYER, Journal of fluids engineering, 118(3), 1996, pp. 457-463
FLUID DENSITY SENSOR-BASED ON RESONANCE VIBRATION
Authors: ENOKSSON P STEMME G STEMME E
Citation: P. Enoksson et al., FLUID DENSITY SENSOR-BASED ON RESONANCE VIBRATION, Sensors and actuators. A, Physical, 47(1-3), 1995, pp. 327-331
A VALVE-LESS PLANAR FLUID PUMP WITH 2 PUMP CHAMBERS
Authors: OLSSON A STEMME G STEMME E
Citation: A. Olsson et al., A VALVE-LESS PLANAR FLUID PUMP WITH 2 PUMP CHAMBERS, Sensors and actuators. A, Physical, 47(1-3), 1995, pp. 549-556
SMALL PIEZORESISTIVE SILICON MICROPHONES SPECIALLY DESIGNED FOR THE CHARACTERIZATION OF TURBULENT GAS-FLOWS
Authors: KALVESTEN E LOFDAHL L STEMME G
Citation: E. Kalvesten et al., SMALL PIEZORESISTIVE SILICON MICROPHONES SPECIALLY DESIGNED FOR THE CHARACTERIZATION OF TURBULENT GAS-FLOWS, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 151-155
A SMALL-SIZE SILICON MICROPHONE FOR MEASUREMENTS IN TURBULENT GAS-FLOWS
Authors: KALVESTEN E LOFDAHL L STEMME G
Citation: E. Kalvesten et al., A SMALL-SIZE SILICON MICROPHONE FOR MEASUREMENTS IN TURBULENT GAS-FLOWS, Sensors and actuators. A, Physical, 45(2), 1994, pp. 103-108
SMALL SILICON-BASED PRESSURE TRANSDUCERS FOR MEASUREMENTS IN TURBULENT BOUNDARY-LAYERS
Authors: LOFDAHL L KALVESTEN E STEMME G
Citation: L. Lofdahl et al., SMALL SILICON-BASED PRESSURE TRANSDUCERS FOR MEASUREMENTS IN TURBULENT BOUNDARY-LAYERS, Experiments in fluids, 17(1-2), 1994, pp. 24-31
INTERFEROMETRIC, LOW THERMAL MASS IR-ABSORBER FOR THERMAL INFRARED DETECTORS
Authors: ERIKSSON P ANDERSSON JY STEMME G
Citation: P. Eriksson et al., INTERFEROMETRIC, LOW THERMAL MASS IR-ABSORBER FOR THERMAL INFRARED DETECTORS, Physica scripta. T, 54, 1994, pp. 165-168
A VALVELESS DIFFUSER NOZZLE-BASED FLUID PUMP
Authors: STEMME E STEMME G
Citation: E. Stemme et G. Stemme, A VALVELESS DIFFUSER NOZZLE-BASED FLUID PUMP, Sensors and actuators. A, Physical, 39(2), 1993, pp. 159-167
Risultati: 1-25 | 26-26