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Results: 1-9 |
Results: 9
Characterisation of new thermosetting polymer materials for nanoimprint lithography
Authors: Lyebyedyev, D Schulz, H Scheer, HC Pfeiffer, K
Citation: D. Lyebyedyev et al., Characterisation of new thermosetting polymer materials for nanoimprint lithography, MAT SCI E C, 15(1-2), 2001, pp. 241-243
A contribution to the flow behaviour of thin polymer films during hot embossing lithography
Authors: Scheer, HC Schulz, H
Citation: Hc. Scheer et H. Schulz, A contribution to the flow behaviour of thin polymer films during hot embossing lithography, MICROEL ENG, 56(3-4), 2001, pp. 311-332
Master replication into thermosetting polymers for nanoimprinting
Authors: Schulz, H Lyebyedyev, D Scheer, HC Pfeiffer, K Bleidiessel, G Grutzner, G Ahopelto, J
Citation: H. Schulz et al., Master replication into thermosetting polymers for nanoimprinting, J VAC SCI B, 18(6), 2000, pp. 3582-3585
New polymer materials for nanoimprinting
Authors: Schulz, H Scheer, HC Hoffmann, T Torres, CMS Pfeiffer, K Bleidiessel, G Grutzner, G Cardinaud, C Gaboriau, F Peignon, MC Ahopelto, J Heidari, B
Citation: H. Schulz et al., New polymer materials for nanoimprinting, J VAC SCI B, 18(4), 2000, pp. 1861-1865
Combination of Nanoimprint and Scanning Force Lithography for local tailoring of sidewalls of nanometer devices
Authors: Schulz, H Korbes, AS Scheer, HC Balk, LJ
Citation: H. Schulz et al., Combination of Nanoimprint and Scanning Force Lithography for local tailoring of sidewalls of nanometer devices, MICROEL ENG, 53(1-4), 2000, pp. 221-224
Novel linear and crosslinking polymers for nanoimprinting with high etch resistance
Authors: Pfeiffer, K Fink, M Bleidiessel, G Gruetzner, G Schulz, H Scheer, HC Hoffmann, T Torres, CMS Gaboriau, F Cardinaud, C
Citation: K. Pfeiffer et al., Novel linear and crosslinking polymers for nanoimprinting with high etch resistance, MICROEL ENG, 53(1-4), 2000, pp. 411-414
Suitability of new polymer materials with adjustable glass temperature fornano-imprinting
Authors: Pfeiffer, K Bleidiessel, G Gruetzner, G Schulz, H Hoffmann, T Scheer, HC Torres, CMS Ahopelto, J
Citation: K. Pfeiffer et al., Suitability of new polymer materials with adjustable glass temperature fornano-imprinting, MICROEL ENG, 46(1-4), 1999, pp. 431-434
Polymer issues in nanoimprinting technique
Authors: Gottschalch, F Hoffmann, T Torres, CMS Schulz, H Scheer, HC
Citation: F. Gottschalch et al., Polymer issues in nanoimprinting technique, SOL ST ELEC, 43(6), 1999, pp. 1079-1083
Problems of the nanoimprinting technique for nanometer scale pattern definition
Authors: Scheer, HC Schulz, H Hoffmann, T Torres, CMS
Citation: Hc. Scheer et al., Problems of the nanoimprinting technique for nanometer scale pattern definition, J VAC SCI B, 16(6), 1998, pp. 3917-3921
Risultati: 1-9 |