Citation: O. Roetting et al., TECHNOLOGY FOR MOVABLE MICROSTRUCTURES - TRANSFER OF LABORATORY PROCESSES TO INDUSTRIAL-PRODUCTION, Microsystem technologies, 4(3), 1998, pp. 120-121
Authors:
GOLL C
BACHER W
BUSTGENS B
MAAS D
RUPRECHT R
SCHOMBURG WK
Citation: C. Goll et al., AN ELECTROSTATICALLY ACTUATED POLYMER MICROVALVE EQUIPPED WITH A MOVABLE MEMBRANE-ELECTRODE, Journal of micromechanics and microengineering, 7(3), 1997, pp. 224-226
Citation: Mm. Blanke et W. Bacher, RESPIRATION OF A SOIL USED FOR VEGETABLE CROPS AT THE BEGINNING OF THE VEGETATION PERIOD, Zeitschrift fur Pflanzenernahrung und Bodenkunde, 160(5), 1997, pp. 485-489
Citation: P. Ruther et al., PROTOTYPE OF A MICROTESTING SYSTEM MADE BY THE LIGA PROCESS TO MEASURE THE YOUNGS MODULUS IN CANTILEVER MICROBEAMS, Journal of dynamic systems, measurement, and control, 119(1), 1997, pp. 57-60
Citation: W. Bacher et al., THE LIGA TECHNIQUE AND ITS POTENTIAL FOR MICROSYSTEMS - A SURVEY, IEEE transactions on industrial electronics, 42(5), 1995, pp. 431-441
Citation: K. Leyendecker et al., NEW MICROELECTRODES FOR THE INVESTIGATION OF THE ELECTROFORMING OF LIGA MICROSTRUCTURES, Electrochimica acta, 39(8-9), 1994, pp. 1139-1143