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Results:
1-8
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Results: 8
Authors:
Rantala, A
Franssila, S
Kaski, K
Lampinen, J
Aberg, M
Kuivalainen, P
Citation: A. Rantala et al., Improved neuron MOS-transistor structures for integrated neural network circuits, IEE P-CIRC, 148(1), 2001, pp. 25-34
Authors:
Grigoras, K
Niskanen, AJ
Franssila, S
Citation: K. Grigoras et al., Plasma etched initial pits for electrochemically etched macroporous silicon structures, J MICROM M, 11(4), 2001, pp. 371-375
Authors:
Niskanen, AJ
Franssila, S
Citation: Aj. Niskanen et S. Franssila, Submicron image reversal by liquid phase deposition of oxide, MICROEL ENG, 57-8, 2001, pp. 629-632
Authors:
Franssila, S
Kiihamaki, J
Karttunen, J
Citation: S. Franssila et al., Etching through silicon wafer in inductively coupled plasma, MICROSYST T, 6(4), 2000, pp. 141-144
Authors:
Kiihamaki, J
Kattelus, H
Karttunen, J
Franssila, S
Citation: J. Kiihamaki et al., Depth and profile control in plasma etched MEMS structures, SENS ACTU-A, 82(1-3), 2000, pp. 234-238
Authors:
Kiihamaki, J
Franssila, S
Citation: J. Kiihamaki et S. Franssila, Pattern shape effects and artefacts in deep silicon etching, J VAC SCI A, 17(4), 1999, pp. 2280-2285
Authors:
Kiihamaki, J
Franssila, S
Citation: J. Kiihamaki et S. Franssila, Deep silicon etching in inductively coupled plasma reactor for MEMS, PHYS SCR, T79, 1999, pp. 250-254
Authors:
Rantala, A
Franssila, S
Kaski, K
Lampinen, J
Aberg, M
Kuivalainen, P
Citation: A. Rantala et al., High-precision neuron MOSFET structures, ELECTR LETT, 35(2), 1999, pp. 155-157
Risultati:
1-8
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