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GRIESINGER UA
GEIGER M
SCHOLZ F
SCHWEIZER HC
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KRONMULLER S
GEIGER M
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SCHOLZ F
SCHWEIZER H
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GRIESINGER UA
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SCHOLZ F
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GAUGGEL HP
GRIESINGER UA
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ADLER F
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HARLE V
SCHOLZ F
SCHWEIZER H
PILKUHN MH
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Authors:
BURKARD M
GRIESINGER UA
MENSCHIG A
SCHWEIZER H
KLEIN H
BOHM G
TRANKLE G
WEIMANN G
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KADEN C
LICHTENSTEIN N
HOMMEL J
LEHR G
BERGMANN R
MENSCHIG A
SCHWEIZER H
HILLMER H
KOOPS HWP
KRETZ J
RUDOLPH M
Citation: Ua. Griesinger et al., INVESTIGATIONS OF ARTIFICIAL NANOSTRUCTURES AND LITHOGRAPHY TECHNIQUES WITH A SCANNING PROBE MICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2441-2445
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GRIESINGER UA
SCHWEIZER H
GENG C
MOSER M
SCHOLZ F
BENNER S
BLANK R
HAUG H
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