Citation: Sl. Morton et al., IN-SITU ULTRASONIC MEASUREMENT OF PHOTORESIST GLASS-TRANSITION TEMPERATURE, Applied physics letters, 72(19), 1998, pp. 2457-2459
Citation: Xc. Jin et al., THE MICROFABRICATION OF CAPACITIVE ULTRASONIC TRANSDUCERS, Journal of microelectromechanical systems, 7(3), 1998, pp. 295-302
Authors:
LADABAUM I
JIN XC
SOH HT
ATALAR A
KHURIYAKUB BT
Citation: I. Ladabaum et al., SURFACE MICROMACHINED CAPACITIVE ULTRASONIC TRANSDUCERS, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 45(3), 1998, pp. 678-690
Citation: G. Percin et al., CONTROLLED INK-JET PRINTING AND DEPOSITION OF ORGANIC POLYMERS AND SOLID PARTICLES, Applied physics letters, 73(16), 1998, pp. 2375-2377
Citation: Fl. Degertekin et Bt. Khuriyakub, LAMB WAVE EXCITATION BY HERTZIAN CONTACTS WITH APPLICATIONS IN NDE, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 44(4), 1997, pp. 769-779
Authors:
SUBRAMANIAN V
DANKOSKI P
DEGERTEKIN L
KHURIYAKUB BT
SARASWAT KC
Citation: V. Subramanian et al., CONTROLLED 2-STEP SOLID-PHASE CRYSTALLIZATION FOR HIGH-PERFORMANCE POLYSILICON TFT, IEEE electron device letters, 18(8), 1997, pp. 378-381
Authors:
SUBRAMANIAN V
DEGERTEKIN FL
DANKOSKI P
KHURIYAKUB BT
SARASWAT KC
Citation: V. Subramanian et al., IN-SITU MONITORING OF CRYSTALLINITY AND TEMPERATURE DURING RAPID THERMAL CRYSTALLIZATION OF SILICON ON GLASS, Journal of the Electrochemical Society, 144(6), 1997, pp. 2216-2221
Citation: Yj. Lee et al., TEMPERATURE-MEASUREMENT IN RAPID THERMAL-PROCESSING USING THE ACOUSTIC TEMPERATURE SENSOR, IEEE transactions on semiconductor manufacturing, 9(1), 1996, pp. 115-121
Citation: Mi. Haller et Bt. Khuriyakub, A SURFACE MICROMACHINED ELECTROSTATIC ULTRASONIC AIR TRANSDUCER, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 43(1), 1996, pp. 1-6
Citation: K. Yamada et Bt. Khuriyakub, POINT-CONTACT ULTRASONIC TRANSDUCER OF WAVE-GUIDING STRUCTURE FOR HIGH-FREQUENCY OPERATION, Applied physics letters, 68(10), 1996, pp. 1335-1337
Citation: I. Ladabaum et al., MICROMACHINED ULTRASONIC TRANSDUCERS - 11.4 MHZ TRANSMISSION IN AIR AND MORE, Applied physics letters, 68(1), 1996, pp. 7-9
Citation: Fl. Degertekin et Bt. Khuriyakub, HERTZIAN CONTACT TRANSDUCERS FOR NONDESTRUCTIVE EVALUATION, The Journal of the Acoustical Society of America, 99(1), 1996, pp. 299-308
Authors:
SARASWAT KC
APTE PP
BOOTH L
CHEN YZ
DANKOSKI PCP
DEGERTEKIN FL
FRANKLIN GF
KHURIYAKUB BT
MOSLEHI MM
SCHAPER C
GYUGYI PJ
LEE YJ
PEI J
WOOD SC
Citation: Kc. Saraswat et al., RAPID THERMAL MULTIPROCESSING FOR A PROGRAMMABLE FACTORY FOR ADAPTABLE MANUFACTURING OF ICS, IEEE transactions on semiconductor manufacturing, 7(2), 1994, pp. 159-175
Citation: Mi. Haller et Bt. Khuriyakub, MICROMACHINED 1-3 COMPOSITES FOR ULTRASONIC AIR TRANSDUCERS, Review of scientific instruments, 65(6), 1994, pp. 2095-2098
Citation: Yj. Lee et al., TEMPERATURE-MEASUREMENT IN RAPID THERMAL-PROCESSING USING ACOUSTIC TECHNIQUES, Review of scientific instruments, 65(4), 1994, pp. 974-976