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Tseng, HH
Veteran, J
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Tsui, PGY
Wang, V
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Wang, XW
Ma, TP
Hobbs, C
Hegde, R
Hartig, M
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Blumenthal, R
Cotton, R
Kaushik, V
Tamagawa, T
Halpern, BL
Cui, GJ
Schmitt, JJ
Citation: Hh. Tseng et al., Jet vapor deposition nitride processing and application to advanced CMOS devices for reduction of gate leakage current and boron penetration, MAT SC S PR, 3(3), 2000, pp. 173-178
Authors:
Lu, W
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Ma, TP
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Citation: W. Lu et al., Comparative study of self-aligned and nonself-aligned SiGe p-metal-oxide-semiconductor modulation-doped field effect transistors with nanometer gate lengths, J VAC SCI B, 18(6), 2000, pp. 3488-3492
Authors:
Ils, A
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Sallese, JM
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Ma, TP
Citation: A. Ils et al., Transmission electron microscope investigation of SrBi2Ta2O9 memory capacitors on Si with silicon dioxide and silicon nitride as buffers, J VAC SCI B, 18(4), 2000, pp. 1915-1918
Authors:
Yeo, YC
Lu, Q
Lee, WC
King, TJ
Hu, CM
Wang, XW
Guo, X
Ma, TP
Citation: Yc. Yeo et al., Direct tunneling gate leakage current in transistors with ultrathin silicon nitride gate dielectric, IEEE ELEC D, 21(11), 2000, pp. 540-542
Citation: Xw. Wang et al., High-temperature characteristics of high-quality SiC MIS capacitors with O/N/O gate dielectric, IEEE DEVICE, 47(2), 2000, pp. 458-463