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Results: 1-25 | 26-29
Results: 1-25/29
Review of pendeo-epitaxial growth and characterization of thin films of GaN and AlGaN alloys on 6H-SiC(0001) and Si(111) substrates
Authors: Davis, RF Gehrke, T Linthicum, KJ Rajagopal, P Roskowski, AM Zheleva, T Preble, EA Zorman, CA Mehregany, M Schwarz, U Schuck, J Grober, R
Citation: Rf. Davis et al., Review of pendeo-epitaxial growth and characterization of thin films of GaN and AlGaN alloys on 6H-SiC(0001) and Si(111) substrates, MRS I J N S, 6(14), 2001, pp. 1-16
On the stability of beta-SiC with respect to chemical disorder induced by irradiation with energetic particles
Authors: Grigull, S Ishimaru, M Nastasi, M Zorman, CA Mehregany, M
Citation: S. Grigull et al., On the stability of beta-SiC with respect to chemical disorder induced by irradiation with energetic particles, PHIL MAG L, 81(2), 2001, pp. 55-61
Surface micromachining: A brief introduction
Authors: Mehregany, M Zorman, CA
Citation: M. Mehregany et Ca. Zorman, Surface micromachining: A brief introduction, MRS BULL, 26(4), 2001, pp. 289-290
Pendeo-epitaxial growth and characterization of thin films of gallium nitride and related materials on SiC(0001) and si(111) substrates
Authors: Davis, RF Gehrke, T Linthicum, KJ Zheleva, TS Rajagopal, P Zorman, CA Mehregany, M
Citation: Rf. Davis et al., Pendeo-epitaxial growth and characterization of thin films of gallium nitride and related materials on SiC(0001) and si(111) substrates, Z METALLKUN, 92(2), 2001, pp. 163-166
Conventional and pendeo-epitaxial growth of GaN(0001) thin films on Si(111) substrates
Authors: Davis, RF Gehrke, T Linthicum, KJ Preble, E Rajagopal, P Ronning, C Zorman, C Mehregany, M
Citation: Rf. Davis et al., Conventional and pendeo-epitaxial growth of GaN(0001) thin films on Si(111) substrates, J CRYST GR, 231(3), 2001, pp. 335-341
Pendeo-epitaxial growth of thin films of gallium nitride and related materials and their characterization
Authors: Davis, RF Gehrke, T Linthicum, KJ Zheleva, TS Preble, EA Rajagopal, P Zorman, CA Mehregany, M
Citation: Rf. Davis et al., Pendeo-epitaxial growth of thin films of gallium nitride and related materials and their characterization, J CRYST GR, 225(2-4), 2001, pp. 134-140
Monocrystalline silicon carbide nanoelectromechanical systems
Authors: Yang, YT Ekinci, KL Huang, XMH Schiavone, LM Roukes, ML Zorman, CA Mehregany, M
Citation: Yt. Yang et al., Monocrystalline silicon carbide nanoelectromechanical systems, APPL PHYS L, 78(2), 2001, pp. 162-164
Pendeo-epitaxial growth and characterization of GaN and related materials on (6H-SiC(0001) and Si(111) substrates
Authors: Davis, RF Gehrke, T Linthicum, KJ Zheleva, TS Rajagopal, P Zorman, CA Mehregany, M
Citation: Rf. Davis et al., Pendeo-epitaxial growth and characterization of GaN and related materials on (6H-SiC(0001) and Si(111) substrates, MRS I J N S, 5, 2000, pp. NIL_46-NIL_57
Modelling of HREM and nanodiffraction for dislocation kinks and core reconstruction
Authors: Koch, C Spence, JCH Zorman, C Mehregany, M Chung, J
Citation: C. Koch et al., Modelling of HREM and nanodiffraction for dislocation kinks and core reconstruction, J PHYS-COND, 12(49), 2000, pp. 10175-10183
Silicon carbide for microelectromechanical systems
Authors: Mehregany, M Zorman, CA Roy, S Fleischman, AJ Wu, CH Rajan, N
Citation: M. Mehregany et al., Silicon carbide for microelectromechanical systems, INT MATER R, 45(3), 2000, pp. 85-108
Fabrication and testing of surface micromachined polycrystalline SiC micromotors
Authors: Yasseen, AA Wu, CH Zorman, CA Mehregany, M
Citation: Aa. Yasseen et al., Fabrication and testing of surface micromachined polycrystalline SiC micromotors, IEEE ELEC D, 21(4), 2000, pp. 164-166
Pendeo-epitaxial growth of gallium nitride on silicon substrates
Authors: Gehrke, T Linthicum, KJ Preble, E Rajagopal, P Ronning, C Zorman, C Mehregany, M Davis, RF
Citation: T. Gehrke et al., Pendeo-epitaxial growth of gallium nitride on silicon substrates, J ELEC MAT, 29(3), 2000, pp. 306-310
Contact physics of gold microcontacts for MEMS switches
Authors: Hyman, D Mehregany, M
Citation: D. Hyman et M. Mehregany, Contact physics of gold microcontacts for MEMS switches, IEEE T COMP, 22(3), 1999, pp. 357-364
Surface-micromachined RF MEMs switches on GaAs substrates
Authors: Hyman, D Lam, J Warneke, B Schmitz, A Hsu, TY Brown, J Schaffner, J Walston, A Loo, RY Mehregany, M Lee, J
Citation: D. Hyman et al., Surface-micromachined RF MEMs switches on GaAs substrates, INT J RF MI, 9(4), 1999, pp. 348-361
A rotary electrostatic micromotor 1 x 8 optical switch
Authors: Yasseen, AA Mitchell, JN Klemic, JF Smith, DA Mehregany, M
Citation: Aa. Yasseen et al., A rotary electrostatic micromotor 1 x 8 optical switch, IEEE S T QU, 5(1), 1999, pp. 26-32
Diffraction grating scanners using polysilicon micromotors
Authors: Yasseen, AA Smith, SW Merat, FL Mehregany, M
Citation: Aa. Yasseen et al., Diffraction grating scanners using polysilicon micromotors, IEEE S T QU, 5(1), 1999, pp. 75-82
Surface micromachining of polycrystalline SiC films using microfabricated molds of SiO2 and polysilicon
Authors: Yasseen, AA Zorman, CA Mehregany, M
Citation: Aa. Yasseen et al., Surface micromachining of polycrystalline SiC films using microfabricated molds of SiO2 and polysilicon, J MICROEL S, 8(3), 1999, pp. 237-242
Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines
Authors: Rajan, N Mehregany, M Zorman, CA Stefanescu, S Kicher, TP
Citation: N. Rajan et al., Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines, J MICROEL S, 8(3), 1999, pp. 251-257
Thick glass film technology for polysilicon surface micromachining
Authors: Yasseen, AA Cawley, JD Mehregany, M
Citation: Aa. Yasseen et al., Thick glass film technology for polysilicon surface micromachining, J MICROEL S, 8(2), 1999, pp. 172-179
High-aspect-ratio rotary polygon micromotor scanners
Authors: Yasseen, AA Mitchell, JN Smith, DA Mehregany, M
Citation: Aa. Yasseen et al., High-aspect-ratio rotary polygon micromotor scanners, SENS ACTU-A, 77(1), 1999, pp. 73-79
Growth of polycrystalline SiC films on SiO2 and Si3N4 by APCVD
Authors: Wu, CH Zorman, CA Mehregany, M
Citation: Ch. Wu et al., Growth of polycrystalline SiC films on SiO2 and Si3N4 by APCVD, THIN SOL FI, 356, 1999, pp. 179-183
SiC MEMS: opportunities and challenges for applications in harsh environments
Authors: Mehregany, M Zorman, CA
Citation: M. Mehregany et Ca. Zorman, SiC MEMS: opportunities and challenges for applications in harsh environments, THIN SOL FI, 356, 1999, pp. 518-524
GaAs-compatible surface-micromachined RF MEMS switches
Authors: Hyman, D Schmitz, A Warneke, B Hsu, TY Lam, J Brown, J Schaffner, J Walston, A Loo, RY Tangonan, GL Mehregany, M Lee, J
Citation: D. Hyman et al., GaAs-compatible surface-micromachined RF MEMS switches, ELECTR LETT, 35(3), 1999, pp. 224-226
Roughness reduction of 3C-SiC surfaces using SiC-based mechanical polishing slurries
Authors: Yasseen, AA Zorman, CA Mehregany, M
Citation: Aa. Yasseen et al., Roughness reduction of 3C-SiC surfaces using SiC-based mechanical polishing slurries, J ELCHEM SO, 146(1), 1999, pp. 327-330
Microfabricated shear stress sensors, Part 1: Design and fabrication
Authors: Pan, T Hyman, D Mehregany, M Reshotko, E Garverick, S
Citation: T. Pan et al., Microfabricated shear stress sensors, Part 1: Design and fabrication, AIAA J, 37(1), 1999, pp. 66-72
Risultati: 1-25 | 26-29