Authors:
Winzell, T
Anand, S
Maximov, I
Sarwe, EL
Graczyk, M
Montelius, L
Whitlow, HJ
Citation: T. Winzell et al., Scanning probe microscopy characterisation of masked low energy implanted nanometer structures, NUCL INST B, 173(4), 2001, pp. 447-454
Authors:
Montelius, L
Heidari, B
Graczyk, M
Maximov, I
Sarwe, EL
Ling, TGI
Citation: L. Montelius et al., Nanoimprint- and UV-lithography: Mix&Match process for fabrication of interdigitated nanobiosensors, MICROEL ENG, 53(1-4), 2000, pp. 521-524
Authors:
Zhang, YW
Winzell, T
Zhang, TH
Maximov, IA
Sarwe, EL
Graczyk, M
Montelius, L
Whitlow, HJ
Citation: Yw. Zhang et al., High-fluence Co implantation in Si, SiO2/Si and Si3N4/Si Part II: sputtering yield transients, the approach to high-fluence equilibrium, NUCL INST B, 159(3), 1999, pp. 133-141
Authors:
Zhang, YW
Winzell, T
Zhang, TH
Andersson, M
Maximov, IA
Sarwe, EL
Graczyk, M
Montelius, L
Whitlow, HJ
Citation: Yw. Zhang et al., High-fluence Co implantation in Si, SiO2/Si and Si3N4/Si Part I: formationof thin silicide surface films, NUCL INST B, 159(3), 1999, pp. 142-157
Authors:
Zhang, YW
Winzell, T
Zhang, TH
Maximov, IA
Sarwe, EL
Graczyk, M
Montelius, L
Whitlow, HJ
Citation: Yw. Zhang et al., High-fluence Co implantation in Si, SiO2/Si and Si3N4/Si Part III: heavy-fluence Co bombardment induced surface topography development, NUCL INST B, 159(3), 1999, pp. 158-165
Authors:
Wallman, L
Levinsson, A
Schouenborg, J
Holmberg, H
Montelius, L
Danielsen, N
Laurell, T
Citation: L. Wallman et al., Perforated silicon nerve chips with doped registration electrodes: in vitro performance and in vivo operation, IEEE BIOMED, 46(9), 1999, pp. 1065-1073
Authors:
Carlsson, SB
Junno, T
Montelius, L
Samuelson, L
Citation: Sb. Carlsson et al., Mechanical tuning of tunnel gaps for the assembly of single-electron transistors, APPL PHYS L, 75(10), 1999, pp. 1461-1463