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Results: 1-16 |
Results: 16
SPECTRAL SELECTIVE PLASMA IMAGING IN THE WAVELENGTH RANGE 2.4-4.5 NM IN SPEED-2 DEVICE
Authors: BOBASHEV SV SIMANOVSKII DM PLATONOV YY ROWEKAMP P DECKER G KIES W
Citation: Sv. Bobashev et al., SPECTRAL SELECTIVE PLASMA IMAGING IN THE WAVELENGTH RANGE 2.4-4.5 NM IN SPEED-2 DEVICE, Plasma sources science & technology, 5(3), 1996, pp. 578-581
MULTILAYER EUV X-RAY POLYCHROMATORS FOR PLASMA DIAGNOSTICS/
Authors: SHMAENOK LA PLATONOV YY SALASHCHENKO NN SOROKIN AA SIMANOVSKII DM GOLUBEV AV BELIK VP BOBASHEV SV BIJKERK F LOUIS E MEIJER FG ETLICHER B GRUDSKY AY
Citation: La. Shmaenok et al., MULTILAYER EUV X-RAY POLYCHROMATORS FOR PLASMA DIAGNOSTICS/, Journal of electron spectroscopy and related phenomena, 80, 1996, pp. 259-262
EXTREME UV LITHOGRAPHY - A NEW LASER-PLASMA TARGET CONCEPT AND FABRICATION OF MULTILAYER REFLECTION MASKS
Authors: BIJKERK F SHMAENOK LA LOUIS E VOORMA HJ KOSTER NB BRUINEMAN C BASTIAENSEN RKFJ VANDERDRIFT EWJM ROMIJN J DEGROOT LEM ROUSSEEUW BAC ZIJLSTRA T PLATONOV YY SALASHCHENKO NN
Citation: F. Bijkerk et al., EXTREME UV LITHOGRAPHY - A NEW LASER-PLASMA TARGET CONCEPT AND FABRICATION OF MULTILAYER REFLECTION MASKS, Microelectronic engineering, 30(1-4), 1996, pp. 183-186
FORMATION OF MONOCHROMATIC POLARIZED SOFT -X-RAY BEAMS BY MULTILAYER X-RAY OPTICS
Authors: VASILEV AA MITROPOLSKII MM PLATONOV YY POKROVSKII YY SALASHCHENKO NN SHEVELKO AP
Citation: Aa. Vasilev et al., FORMATION OF MONOCHROMATIC POLARIZED SOFT -X-RAY BEAMS BY MULTILAYER X-RAY OPTICS, Kvantovaa elektronika, 22(4), 1995, pp. 408-410
MULTILAYER X-RAY OPTICS FOR SYNCHROTRON-RADIATION
Authors: SALASHCHENKO NN PLATONOV YY ZUEV SY
Citation: Nn. Salashchenko et al., MULTILAYER X-RAY OPTICS FOR SYNCHROTRON-RADIATION, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 359(1-2), 1995, pp. 114-120
MULTILAYER COATED REFLECTIVE OPTICS FOR EXTREME UV LITHOGRAPHY
Authors: LOUIS E VOORMA HJ KOSTER NB BIJKERK F PLATONOV YY ZUEV SY ANDREEV SS SHAMOV EA SALASHCHENKO NN
Citation: E. Louis et al., MULTILAYER COATED REFLECTIVE OPTICS FOR EXTREME UV LITHOGRAPHY, Microelectronic engineering, 27(1-4), 1995, pp. 235-238
FOCUSING OF SOFT-X-RAY EMISSION OF LASER- PLASMA SOURCES USING MULTILAYERED MIRRORS
Authors: BOBASHEV SV GOLUBEV AV MOSESYAN DA PLATONOV YY SALASHCHENKO NN SIMANOVSKII DM SOROKIN AA SHMAENOK LA
Citation: Sv. Bobashev et al., FOCUSING OF SOFT-X-RAY EMISSION OF LASER- PLASMA SOURCES USING MULTILAYERED MIRRORS, Zurnal tehniceskoj fiziki, 65(10), 1995, pp. 62-73
NEW METHOD OF ULTRA-THIN FILM CHARACTERIZATION APPLIED TO THE INVESTIGATION OF C NI/C STRUCTURES UNDER HEAT LOAD/
Authors: ZHELUDEVA SI KOVALCHUK MV NOVIKOVA NN SOSPHENOV AN MALYSHEVA NE SALASHENKO NN AKHSAKHALYAN AD PLATONOV YY CERNIK RI COLLINS SP
Citation: Si. Zheludeva et al., NEW METHOD OF ULTRA-THIN FILM CHARACTERIZATION APPLIED TO THE INVESTIGATION OF C NI/C STRUCTURES UNDER HEAT LOAD/, Thin solid films, 259(2), 1995, pp. 131-138
X-RAY WAVE-GUIDE MODES IN LAYER STRUCTURE S
Authors: ZHELUDEVA SI KOVALCHUK MV NOVIKOVA NN SOSPHENOV AN MALYSHEVA NE SALASHCHENKO NN PLATONOV YY AKSAKHALYAN AD
Citation: Si. Zheludeva et al., X-RAY WAVE-GUIDE MODES IN LAYER STRUCTURE S, Kristallografia, 40(1), 1995, pp. 145-158
X-RAY WAVE-GUIDE STRUCTURES OF THIN METAL-CARBON LAYERS
Authors: ZHELUDEVA SI KOVALCHUK MV NOVIKOVA NN SOSPHENOV AN MALYSHEVA NE SALASHENKO NN AKHSAKHYALYAN AD PLATONOV YY
Citation: Si. Zheludeva et al., X-RAY WAVE-GUIDE STRUCTURES OF THIN METAL-CARBON LAYERS, Journal de physique. III, 4(9), 1994, pp. 1581-1587
LASER-PLASMA SOURCES FOR SOFT-X-RAY PROJECTION LITHOGRAPHY
Authors: BIJKERK F SHMAENOK L VANHONK A BASTIAENSEN R PLATONOV YY SHEVELKO AP MITROFANOV AV VOSS F DESOR R FROWEIN H NIKOLAUS B
Citation: F. Bijkerk et al., LASER-PLASMA SOURCES FOR SOFT-X-RAY PROJECTION LITHOGRAPHY, Journal de physique. III, 4(9), 1994, pp. 1669-1677
INVESTIGATION OF HEAT-TREATMENT EFFECTS ON NI C BILAYER PARAMETERS BYXRSW/
Authors: ZHELUDEVA SI KOVALCHUK MV NOVIKOVA NN SOSPHENOV AN MALYSHEVA NE SALASHENKO NN AKHSAKHALYAN AD PLATONOV YY
Citation: Si. Zheludeva et al., INVESTIGATION OF HEAT-TREATMENT EFFECTS ON NI C BILAYER PARAMETERS BYXRSW/, Physica. B, Condensed matter, 198(1-3), 1994, pp. 259-261
SOFT-X-RAY RADIATION OF ECR DISCHARGE SUP PORTED BY MILLIMETER-WAVE BEAM
Authors: GOLUBEV SV ZORIN VG PLATONOV YY RAZIN SV
Citation: Sv. Golubev et al., SOFT-X-RAY RADIATION OF ECR DISCHARGE SUP PORTED BY MILLIMETER-WAVE BEAM, Pis'ma v Zurnal tehniceskoj fiziki, 20(4), 1994, pp. 7-11
ENHANCEMENT OF REFLECTIVITY OF MULTILAYER MIRRORS FOR SOFT-X-RAY PROJECTION LITHOGRAPHY BY TEMPERATURE OPTIMIZATION AND ION-BOMBARDMENT
Authors: LOUIS E VOORMA HJ KOSTER NB SHMAENOK L BIJKERK F SCHLATMANN R VERHOEVEN J PLATONOV YY VANDORSSEN GE PADMORE HA
Citation: E. Louis et al., ENHANCEMENT OF REFLECTIVITY OF MULTILAYER MIRRORS FOR SOFT-X-RAY PROJECTION LITHOGRAPHY BY TEMPERATURE OPTIMIZATION AND ION-BOMBARDMENT, Microelectronic engineering, 23(1-4), 1994, pp. 215-218
MULTICHANNEL SOFT-X-RAY DIAGNOSTICS OF HOT PLASMA EVOLUTION IN NITROGEN-PUFF Z-PINCH
Authors: KREJCI A RAUS J PIFFL V GOLUBEV AV PLATONOV YY KROUSKY E RENNER O
Citation: A. Krejci et al., MULTICHANNEL SOFT-X-RAY DIAGNOSTICS OF HOT PLASMA EVOLUTION IN NITROGEN-PUFF Z-PINCH, IEEE transactions on plasma science, 21(5), 1993, pp. 584-587
NEW MODIFICATION OF X-RAY STANDING WAVES ABOVE THE SURFACE OF LAYEREDSUBSTRATES UNDER TOTAL EXTERNAL REFLECTION CONDITIONS FOR STRUCTURAL CHARACTERIZATION OF ORGANIC LAYERS
Authors: ZHELUDEVA SI KOVALCHUK MV NOVIKOVA NN SOSPHENOV AN MALYSHEVA NE SALASHCHENKO NN AKHSAKHALYAN AD PLATONOV YY
Citation: Si. Zheludeva et al., NEW MODIFICATION OF X-RAY STANDING WAVES ABOVE THE SURFACE OF LAYEREDSUBSTRATES UNDER TOTAL EXTERNAL REFLECTION CONDITIONS FOR STRUCTURAL CHARACTERIZATION OF ORGANIC LAYERS, Thin solid films, 232(2), 1993, pp. 252-255
Risultati: 1-16 |