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LIDDLE JA
BLAKEY MI
KNUREK CS
MKRTCHYAN MM
NOVEMBRE AE
OCOLA L
SAUNDERS T
WASKIEWICZ WK
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WASKIEWICZ WK
HARRIOTT LR
LIDDLE JA
STANTON ST
BERGER SD
MUNRO E
ZHU X
Citation: Wk. Waskiewicz et al., ELECTRON-OPTICS METHOD FOR HIGH-THROUGHPUT IN A SCALPEL SYSTEM - PRELIMINARY-ANALYSIS, Microelectronic engineering, 42, 1998, pp. 215-218
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BERGER SD
BIDDICK C
BLAKEY MI
BOWLER SW
BRADY K
CAMARDA RM
CONNELLY WF
CRORKEN A
CUSTY J
DEMARCO R
FARROW RC
FELKER JA
FETTER L
FREEMAN R
HOPKINS L
HUGGINS HA
KNUREK CS
KRAUS JS
LIDDLE JA
MKRTYCHAN M
NOVEMBRE AE
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TARASCON RG
WADE HH
WASKIEWICZ WK
WATSON GP
WERDER KS
WINDT D
Citation: Lr. Harriott et al., THE SCALPEL PROOF-OF-CONCEPT SYSTEM, Microelectronic engineering, 35(1-4), 1997, pp. 477-480
Authors:
HARRIOTT LR
BERGER SD
BIDDICK C
BLAKEY MI
BOWLER SW
BRADY K
CAMARDA RM
CONNELLY WF
CRORKEN A
CUSTY J
DIMARCO R
FARROW RC
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FETTER L
FREEMAN R
HOPKINS L
HUGGINS HA
KNUREK CS
KRAUS JS
LIDDLE JA
MKRTYCHAN M
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TARASCON RG
WADE HH
WASKIEWICZ WK
WATSON GP
WERDER KS
WINDT D
Citation: Lr. Harriott et al., PRELIMINARY-RESULTS FROM A PROTOTYPE PROJECTION ELECTRON-BEAM STEPPER-SCATTERING WITH ANGULAR LIMITATION PROJECTION ELECTRON-BEAM LITHOGRAPHY PROOF-OF-CONCEPT SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3825-3828
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LIDDLE JA
BERGER SD
BIDDICK CJ
BLAKEY MI
BOLAN KJ
BOWLER SW
BRADY K
CAMARDA RM
CONNELLY WF
CRORKEN A
CUSTY J
FARROW RC
FELKER JA
FETTER LA
FREEMAN B
HARRIOTT LR
HOPKINS L
HUGGINS HA
KNUREK CS
KRAUS JS
MIXON DA
MKRTCHYAN MM
NOVEMBRE AE
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TARASCON RG
WADE HH
WASKIEWICZ WK
WATSON GP
WILLIAMS JK
WINDT DL
Citation: Ja. Liddle et al., THE SCATTERING WITH ANGULAR LIMITATION IN PROJECTION ELECTRON-BEAM LITHOGRAPHY (SCALPEL) SYSTEM, JPN J A P 1, 34(12B), 1995, pp. 6663-6671
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BERGER SD
LIDDLE JA
WASKIEWICZ WK
Citation: Gp. Watson et al., A BACKGROUND DOSE PROXIMITY EFFECT CORRECTION TECHNIQUE FOR SCATTERING WITH ANGULAR LIMITATION PROJECTION ELECTRON LITHOGRAPHY IMPLEMENTED IN HARDWARE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2504-2507
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TAN ZQ
MACDOWELL AA
LAFONTAINE B
BJORKHOLM JE
TENNANT D
TAYLOR D
HIMEL M
FREEMAN RR
WASKIEWICZ WK
WINDT DL
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NG W
CERRINA F
Citation: Zq. Tan et al., AT-WAVELENGTH METROLOGY OF 13-NM LITHOGRAPHY IMAGING OPTICS, Review of scientific instruments, 66(2), 1995, pp. 2241-2243
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WINDT DL
BROWN WL
VOLKERT CA
WASKIEWICZ WK
Citation: Dl. Windt et al., VARIATION IN STRESS WITH BACKGROUND PRESSURE IN SPUTTERED MO SI MULTILAYER FILMS/, Journal of applied physics, 78(4), 1995, pp. 2423-2430
Authors:
KUBIAK GD
TICHENOR DA
RAYCHAUDHURI AK
MALINOWSKI ME
STULEN RH
HANEY SJ
BERGER KW
NISSEN RP
WILKERSON GA
PAUL PH
BJORKHOLM JE
FETTER LA
FREEMAN RR
HIMEL MD
MACDOWELL AA
TENNANT DM
WOOD OR
WASKIEWICZ WK
WHITE DL
WINDT DL
JEWELL TE
Citation: Gd. Kubiak et al., CHARACTERIZATION OF AN EXPANDED-FIELD SCHWARZSCHILD OBJECTIVE FOR EXTREME-ULTRAVIOLET LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3820-3825
Authors:
WOOD OR
BJORKHOLM JE
FETTER L
HIMEL MD
TENNANT DM
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TAYLOR GN
WASKIEWICZ WK
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KORTRIGHT JB
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NGUYEN K
Citation: Or. Wood et al., WAVELENGTH DEPENDENCE OF THE RESIST SIDEWALL ANGLE IN EXTREME-ULTRAVIOLET LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3841-3845
Authors:
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WINDT DL
WASKIEWICZ WK
WOOD OR
TENNANT DM
Citation: K. Early et al., REPAIR OF SOFT-X-RAY OPTICAL-ELEMENTS BY STRIPPING AND REDEPOSITION OF MO SI REFLECTIVE COATINGS/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2926-2929
Authors:
TICHENOR DA
KUBIAK GD
MALINOWSKI ME
STULEN RH
HANEY SJ
BERGER KW
BROWN LA
SWEATT WC
BJORKHOLM JE
FREEMAN RR
HIMEL MD
MACDOWELL AA
TENNANT DM
WOOD OR
BOKOR J
JEWELL TE
MANSFIELD WM
WASKIEWICZ WK
WHITE DL
WINDT DL
Citation: Da. Tichenor et al., SOFT-X-RAY PROJECTION LITHOGRAPHY EXPERIMENTS USING SCHWARZSCHILD IMAGING OPTICS, Applied optics, 32(34), 1993, pp. 7068-7071
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MACDOWELL AA
BJORKHOLM JE
EARLY K
FREEMAN RR
HIMEL MD
MULGREW PP
SZETO LH
TAYLOR DW
TENNANT DM
WOOD OR
BOKOR J
EICHNER L
JEWELL TE
WASKIEWICZ WK
WHITE DL
WINDT DL
DSOUZA RM
SILFVAST WT
ZERNIKE F
Citation: Aa. Macdowell et al., SOFT-X-RAY PROJECTION IMAGING WITH A 1 1 RING-FIELD OPTIC/, Applied optics, 32(34), 1993, pp. 7072-7078