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Yonekura, T
Hoki, M
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Kawahara, H
Yagi, M
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Gan, Q
Eom, CB
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Hata, T
Nakano, S
Masuda, Y
Sasaki, K
Haneda, Y
Wasa, K
Citation: T. Hata et al., Heteroepitaxial growth of YSZ films on Si(100) substrate by using new metallic mode of reactive sputtering, VACUUM, 51(4), 1998, pp. 583-590