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Results: 8
MONTE-CARLO SIMULATION OF ANISOTROPIC ETCHING OF SILICON - INVESTIGATION OF [111] SURFACE-PROPERTIES
Authors:
MOKTADIR Z
CAMON H
Citation: Z. Moktadir et H. Camon, MONTE-CARLO SIMULATION OF ANISOTROPIC ETCHING OF SILICON - INVESTIGATION OF [111] SURFACE-PROPERTIES, Modelling and simulation in materials science and engineering, 5(5), 1997, pp. 481-488
Authors:
CAMON H
MOKTADIR Z
Citation: H. Camon et Z. Moktadir, SIMULATION OF SILICON ETCHING WITH KOH, Microelectronics, 28(4), 1997, pp. 509-517
Authors:
CAMON H
MOKTADIR Z
DJAFARIROUHANI M
Citation: H. Camon et al., NEW TRENDS IN ATOMIC-SCALE SIMULATION OF WET CHEMICAL ETCHING OF SILICON WITH KOH, Materials science & engineering. B, Solid-state materials for advanced technology, 37(1-3), 1996, pp. 142-145
Authors:
LEFEVRE Y
LAJOIEMAZENC M
SARRAUTE E
CAMON H
Citation: Y. Lefevre et al., FIRST STEPS TOWARDS DESIGN, SIMULATION, MODELING AND FABRICATION OF ELECTROSTATIC MICROMOTORS, Sensors and actuators. A, Physical, 47(1-3), 1995, pp. 645-648
Authors:
CAMON H
MOKTADIR Z
Citation: H. Camon et Z. Moktadir, ATOMIC-SCALE SIMULATION OF SILICON ETCHED IN AQUEOUS KOH SOLUTION, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 27-29
Authors:
CONEDERA V
FABRE N
CAMON H
ROUSSET B
PHAM HH
SOLANO C
Citation: V. Conedera et al., FIRST STEPS TOWARDS THE FABRICATION OF ELECTROSTATIC MICROMOTORS USING SOG, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 82-84
Authors:
ROUHANI MD
GUE AM
CAMON H
COHENSOLAL G
Citation: Md. Rouhani et al., ATOMIC-SCALE SIMULATION OF MICROTECHNOLOG IES, Onde electrique, 74(2), 1994, pp. 14-20
Authors:
DANEL JS
CAMON H
Citation: Js. Danel et H. Camon, SILICON MICROMACHINING, Onde electrique, 74(2), 1994, pp. 21-27
Risultati:
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