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Results: 1-25/40
Authors:
WANG YL
ESASHI M
Citation: Yl. Wang et M. Esashi, THE STRUCTURES FOR ELECTROSTATIC SERVO CAPACITIVE VACUUM SENSORS, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 213-217
Authors:
TODA R
MINAMI K
ESASHI M
Citation: R. Toda et al., THIN-BEAM BULK MICROMACHINING BASED ON RIE AND XENON DIFLUORIDE SILICON ETCHING, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 268-272
Authors:
SASAKI T
NISHIZAWA J
ESASHI M
Citation: T. Sasaki et al., DEEP LEVELS AND MINORITY-CARRIER LIFETIME IN PROTON-IRRADIATED SILICON PIN DIODE, Journal of applied physics, 83(8), 1998, pp. 4069-4074
Authors:
ESASHI M
SUGIYAMA S
IKEDA K
WANG YL
MIYASHITA H
Citation: M. Esashi et al., VACUUM-SEALED SILICON MICROMACHINED PRESSURE SENSORS, Proceedings of the IEEE, 86(8), 1998, pp. 1627-1639
Authors:
KIM SJ
MYOREN H
CHEN J
NAKAJIMA K
YAMASHITA T
ESASHI M
Citation: Sj. Kim et al., HIGH-FREQUENCY RESPONSES OF YBA2CU3O7-GAMMA JOSEPHSON-JUNCTIONS ON SISUBSTRATES FABRICATED BY FOCUSED ELECTRON-BEAM IRRADIATION, JPN J A P 2, 36(8B), 1997, pp. 1096-1099
Authors:
HAMANAKA H
ONO T
ESASHI M
Citation: H. Hamanaka et al., PATTERNING OF LANGMUIR-BLODGETT-FILM WITH ULTRAHIGH VACUUM-SCANNING TUNNELING MICROSCOPE ATOMIC-FORCE MICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 1414-1418
Authors:
ONO T
SAITOH H
ESASHI M
Citation: T. Ono et al., FABRICATION OF A SI SCANNING PROBE MICROSCOPY TIP WITH AN ULTRAHIGH VACUUM-SCANNING TUNNELING MICROSCOPE ATOMIC-FORCE MICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(4), 1997, pp. 1531-1534
Authors:
WATANABE S
ESASHI M
YAMASHITA Y
Citation: S. Watanabe et al., FABRICATION METHODS FOR HIGH-ASPECT-RATIO MICROSTRUCTURES, Journal of intelligent material systems and structures, 8(2), 1997, pp. 173-176
Authors:
KIM SJ
NAKAJIMA K
CHEN J
MYOREN H
YAMASHITA T
ESASHI M
Citation: Sj. Kim et al., JOSEPHSON-JUNCTION ARRAYS ON SI MEMBRANE USING FOCUSED ELECTRON-BEAM IRRADIATION, Physica. C, Superconductivity, 282, 1997, pp. 2467-2468
Authors:
ONO T
SAITOH H
ESASHI M
Citation: T. Ono et al., SI NANOWIRE GROWTH WITH ULTRAHIGH-VACUUM SCANNING-TUNNELING-MICROSCOPY, Applied physics letters, 70(14), 1997, pp. 1852-1854
Authors:
TANI J
ESASHI M
Citation: J. Tani et M. Esashi, UNTITLED - PREFACE, Journal of intelligent material systems and structures, 7(3), 1996, pp. 253-253
Authors:
MINETA T
KOBAYASHI S
WATANABE Y
KANAUCHI S
NAKAGAWA I
SUGANUMA E
ESASHI M
Citation: T. Mineta et al., 3-AXIS CAPACITIVE ACCELEROMETER WITH UNIFORM AXIAL SENSITIVITIES, Journal of micromechanics and microengineering, 6(4), 1996, pp. 431-435
Authors:
PARK K
MINAMI K
ESASHI M
Citation: K. Park et al., AN INTEGRATED COMMUNICATION AND CONTROL-SYSTEM FOR A MULTILINK ACTIVECATHETER, Journal of micromechanics and microengineering, 6(3), 1996, pp. 345-351
Authors:
SIM DY
KURABAYASHI T
ESASHI M
Citation: Dy. Sim et al., A BAKABLE MICROVALVE WITH A KOVAR-GLASS-SILICON-GLASS STRUCTURE, Journal of micromechanics and microengineering, 6(2), 1996, pp. 266-271
Authors:
FRENCH PJ
NAGAO M
ESASHI M
Citation: Pj. French et al., ELECTROCHEMICAL ETCH-STOP IN TMAH WITHOUT EXTERNALLY APPLIED BIAS, Sensors and actuators. A, Physical, 56(3), 1996, pp. 279-280
Authors:
LIM G
PARK K
SUGIHARA M
MINAMI K
ESASHI M
Citation: G. Lim et al., FUTURE OF ACTIVE CATHETERS, Sensors and actuators. A, Physical, 56(1-2), 1996, pp. 113-121
Authors:
MIZUNO J
NOTTMEYER K
CABUZ C
MINAMI K
KOBAYASHI T
ESASHI M
Citation: J. Mizuno et al., FABRICATION AND CHARACTERIZATION OF A SILICON CAPACITIVE STRUCTURE FOR SIMULTANEOUS DETECTION OF ACCELERATION AND ANGULAR RATE, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 646-650
Authors:
ESASHI M
Citation: M. Esashi, INTRODUCTION TO THE SPECIAL ISSUE - MICROROBOTS AND DISTRIBUTED MICROACTUATORS IN JAPAN, Robotica, 14, 1996, pp. 467-467
Authors:
LIM G
MINAMI K
YAMAMOTO K
SUGIHARA M
UCHIYAMA M
ESASHI M
Citation: G. Lim et al., MULTILINK ACTIVE CATHETER SNAKE-LIKE MOTION, Robotica, 14, 1996, pp. 499-506
Authors:
ESASHI M
Citation: M. Esashi, SILICON MICROMACHINING FOR INTEGRATED MICROSYSTEMS, Vacuum, 47(6-8), 1996, pp. 469-474
Authors:
ONO T
HAMANAKA H
KURABAYASHI T
MINAMI K
ESASHI M
Citation: T. Ono et al., NANOSCALE AL PATTERNING ON AN STM-MANIPULATED SI SURFACE, Thin solid films, 282(1-2), 1996, pp. 640-643
MICROPHYSICAL INVESTIGATIONS ON MECHANICAL STRUCTURES REALIZED IN P(+) SILICON (VOL 4, PG 109, 1995)
Authors:
CABUZ C
FUKATSU K
KURABAYASHI T
MINAMI K
ESASHI M
Citation: C. Cabuz et al., MICROPHYSICAL INVESTIGATIONS ON MECHANICAL STRUCTURES REALIZED IN P(+) SILICON (VOL 4, PG 109, 1995), Journal of microelectromechanical systems, 4(4), 1995, pp. 242-242
Authors:
CABUZ C
FUKATSU K
KURABAYASHI T
MINAMI K
ESASHI M
Citation: C. Cabuz et al., MICROPHYSICAL INVESTIGATIONS ON MECHANICAL STRUCTURES REALIZED IN P(+) SILICON, Journal of microelectromechanical systems, 4(3), 1995, pp. 109-118
Authors:
HASHIMOTO M
CABUZ C
MINAMI K
ESASHI M
Citation: M. Hashimoto et al., SILICON RESONANT ANGULAR RATE SENSOR USING ELECTROMAGNETIC-EXCITATIONAND CAPACITIVE DETECTION, Journal of micromechanics and microengineering, 5(3), 1995, pp. 219-225
Authors:
MAEDA S
MINAMI K
ESASHI M
Citation: S. Maeda et al., EXCIMER-LASER INDUCED CVD AND ITS APPLICATION TO SELECTIVE NONPLANAR METALLIZATION, Journal of micromechanics and microengineering, 5(3), 1995, pp. 237-242