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Results:
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Results: 22
Authors:
GUI C
DEBOER M
GARDENIERS JGE
JANSEN H
BERENSCHOT JW
ELWENSPOEK M
Citation: C. Gui et al., FABRICATION OF MULTILAYER SUBSTRATES FOR HIGH-ASPECT-RATIO SINGLE-CRYSTALLINE MICROSTRUCTURES, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 61-66
Authors:
GARDENIERS JGE
VERHOLEN AGBJ
TAS NR
ELWENSPOEK M
Citation: Jge. Gardeniers et al., DIRECT MEASUREMENT OF PIEZOELECTRIC PROPERTIES OF SOL-GEL PZT FILMS, Journal of the Korean Physical Society, 32, 1998, pp. 1573-1577
Authors:
VELDHUIS GJ
GUI C
NAUTA T
KOSTER TM
BERENSCHOT JW
LAMBECK PV
GARDENIERS JGE
ELWENSPOEK M
Citation: Gj. Veldhuis et al., MECHANO-OPTICAL WAVE-GUIDE ON-OFF INTENSITY MODULATOR, Optics letters, 23(19), 1998, pp. 1532-1534
Authors:
GARDENIERS JGE
RITTERSMA ZM
BURGER GJ
Citation: Jge. Gardeniers et al., PREFERRED ORIENTATION AND PIEZOELECTRICITY IN SPUTTERED ZNO FILMS, Journal of applied physics, 83(12), 1998, pp. 7844-7854
Authors:
GUI C
ELWENSPOEK M
GARDENIERS JGE
LAMBECK PV
Citation: C. Gui et al., PRESENT AND FUTURE-ROLE OF CHEMICAL-MECHANICAL POLISHING IN WAFER BONDING, Journal of the Electrochemical Society, 145(6), 1998, pp. 2198-2204
Authors:
VANTOOR MW
LAMMERINK TSJ
GARDENIERS JGE
ELWENSPOEK M
MONSMA D
Citation: Mw. Vantoor et al., A NOVEL MICROMECHANICAL FLOW CONTROLLER, Journal of micromechanics and microengineering, 7(3), 1997, pp. 165-169
Authors:
GUI C
ALBERS H
GARDENIERS JGE
ELWENSPOEK M
LAMBECK PV
Citation: C. Gui et al., FUSION BONDING OF ROUGH SURFACES WITH POLISHING TECHNIQUE FOR SILICONMICROMACHINING, Microsystem technologies, 3(3), 1997, pp. 122-128
Authors:
NEAGU CR
JANSEN HV
SMITH A
GARDENIERS JGE
ELWENSPOEK MC
Citation: Cr. Neagu et al., CHARACTERIZATION OF A PLANAR MICROCOIL FOR IMPLANTABLE MICROSYSTEMS, Sensors and actuators. A, Physical, 62(1-3), 1997, pp. 599-611
Authors:
DUCSO C
VAZSONYI E
ADAM M
SZABO I
BARSONY I
GARDENIERS JGE
VANDENBERG A
Citation: C. Ducso et al., POROUS SILICON BULK MICROMACHINING FOR THERMALLY ISOLATED MEMBRANE FORMATION, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 235-239
Authors:
NEAGU CR
GARDENIERS JGE
ELWENSPOEK M
KELLY JJ
Citation: Cr. Neagu et al., AN ELECTROCHEMICAL ACTIVE VALVE, Electrochimica acta, 42(20-22), 1997, pp. 3367-3373
Authors:
TJERKSTRA RW
DEBEER M
BERENSCHOT E
GARDENIERS JGE
VANDENBERG A
ELWENSPOEK MC
Citation: Rw. Tjerkstra et al., ETCHING TECHNOLOGY FOR CHROMATOGRAPHY MICROCHANNELS, Electrochimica acta, 42(20-22), 1997, pp. 3399-3406
Authors:
NEAGU CR
GARDENIERS JGE
ELWENSPOEK M
KELLY JJ
Citation: Cr. Neagu et al., AN ELECTROCHEMICAL MICROACTUATOR - PRINCIPLE AND FIRST RESULTS, Journal of microelectromechanical systems, 5(1), 1996, pp. 2-9
Authors:
GARDENIERS JGE
TILMANS HAC
VISSER CCG
Citation: Jge. Gardeniers et al., LPCVD SILICON-RICH SILICON-NITRIDE FILMS FOR APPLICATIONS IN MICROMECHANICS, STUDIED WITH STATISTICAL EXPERIMENTAL-DESIGN, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(5), 1996, pp. 2879-2892
Authors:
KING SL
GARDENIERS JGE
BOYD IW
Citation: Sl. King et al., PULSED-LASER DEPOSITED ZNO FOR DEVICE APPLICATIONS, Applied surface science, 96-8, 1996, pp. 811-818
Authors:
BRESSERS PMMC
KELLY JJ
GARDENIERS JGE
ELWENSPOEK M
Citation: Pmmc. Bressers et al., SURFACE-MORPHOLOGY OF P-TYPE (100)SILICON ETCHED IN AQUEOUS ALKALINE-SOLUTION, Journal of the Electrochemical Society, 143(5), 1996, pp. 1744-1750
Authors:
GARDENIERS JGE
SMITH A
COBIANU C
Citation: Jge. Gardeniers et al., CHARACTERIZATION OF SOL-GEL PZT FILMS ON PT-COATED SUBSTRATES, Journal of micromechanics and microengineering, 5(2), 1995, pp. 153-155
Authors:
HEIDEMAN RG
LAMBECK PV
GARDENIERS JGE
Citation: Rg. Heideman et al., HIGH-QUALITY ZNO LAYERS WITH ADJUSTABLE REFRACTIVE-INDEXES FOR INTEGRATED-OPTICS APPLICATIONS, Optical materials, 4(6), 1995, pp. 741-755
Authors:
CRACIUN V
AMIRHAGHI S
CRACIUN D
ELDERS J
GARDENIERS JGE
BOYD IW
Citation: V. Craciun et al., EFFECTS OF LASER WAVELENGTH AND FLUENCE ON THE GROWTH OF ZNO THIN-FILMS BY PULSED-LASER DEPOSITION, Applied surface science, 86(1-4), 1995, pp. 99-106
Authors:
CRACIUN V
ELDERS J
GARDENIERS JGE
GERETOVSKY J
BOYD IW
Citation: V. Craciun et al., GROWTH OF ZNO THIN-FILMS ON GAAS BY PULSED-LASER DEPOSITION, Thin solid films, 259(1), 1995, pp. 1-4
Authors:
JANSEN HV
GARDENIERS JGE
ELDERS J
TILMANS HAC
ELWENSPOEK M
Citation: Hv. Jansen et al., APPLICATIONS OF FLUOROCARBON POLYMERS IN MICROMECHANICS AND MICROMACHINING, Sensors and actuators. A, Physical, 41(1-3), 1994, pp. 136-140
Authors:
BERENSCHOT JW
GARDENIERS JGE
LAMMERINK TSJ
ELWENSPOEK M
Citation: Jw. Berenschot et al., NEW APPLICATIONS OF RF-SPUTTERED GLASS-FILMS AS PROTECTION AND BONDING LAYERS IN SILICON MICROMACHINING, Sensors and actuators. A, Physical, 41(1-3), 1994, pp. 338-343
Authors:
CRACIUN V
ELDERS J
GARDENIERS JGE
BOYD IW
Citation: V. Craciun et al., CHARACTERISTICS OF HIGH-QUALITY ZNO THIN-FILMS DEPOSITED BY PULSED-LASER DEPOSITION, Applied physics letters, 65(23), 1994, pp. 2963-2965
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