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KHEMKA V
TYAGI R
CHOW TP
GHEZZO M
NEUDECK PG
KRETCHMER J
HENNESSY W
BROWN DM
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EDWARDS A
RAO MV
PAPANICOLAOU N
KELNER G
HOLLAND OW
CAPANO MA
GHEZZO M
KRETCHMER J
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BROWN DM
DOWNEY E
GHEZZO M
KRETCHMER J
KRISHNAMURTHY V
HENNESY W
MICHON G
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RAO MV
HOLLAND OW
KELNER G
CHI PH
KRETCHMER J
GHEZZO M
Citation: D. Dwight et al., NITROGEN AND ALUMINUM IMPLANTATION IN HIGH-RESISTIVITY SILICON-CARBIDE, Journal of applied physics, 82(11), 1997, pp. 5327-5333
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