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Results:
1-17
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Results: 17
Authors:
CHAUDHURI B
GUCKEL H
KLEIN J
FISCHER K
Citation: B. Chaudhuri et al., PHOTORESIST APPLICATION FOR THE LIGA PROCESS, Microsystem technologies, 4(4), 1998, pp. 159-162
Authors:
DENG K
DEWA AS
RITTER DC
BONHAM C
GUCKEL H
Citation: K. Deng et al., CHARACTERIZATION OF GEAR PUMPS FABRICATED BY LIGA, Microsystem technologies, 4(4), 1998, pp. 163-167
Authors:
KLEIN J
GUCKEL H
Citation: J. Klein et H. Guckel, HIGH WINDING DENSITY MICRO COILS FOR MAGNETIC ACTUATORS, Microsystem technologies, 4(4), 1998, pp. 172-175
Authors:
FISCHER K
KLEIN J
CHAUDHURI B
GUCKEL H
Citation: K. Fischer et al., DESIGN AND FABRICATION OF ONE MILLIMETER HIGH STRUCTURES, Microsystem technologies, 4(4), 1998, pp. 176-179
Authors:
FISCHER K
GUCKEL H
Citation: K. Fischer et H. Guckel, LONG THROW LINEAR MAGNETIC ACTUATORS STACKABLE TO ONE MILLIMETER OF STRUCTURAL HEIGHT, Microsystem technologies, 4(4), 1998, pp. 180-183
Authors:
TANG CM
STIER E
FISCHER K
GUCKEL H
Citation: Cm. Tang et al., ANTI-SCATTERING X-RAY GRID, Microsystem technologies, 4(4), 1998, pp. 187-192
Authors:
KLEIN J
GUCKEL H
SIDDONS DP
JOHNSON ED
Citation: J. Klein et al., X-RAY MASKS FOR VERY DEEP X-RAY-LITHOGRAPHY, Microsystem technologies, 4(2), 1998, pp. 70-73
Authors:
GUCKEL H
Citation: H. Guckel, HIGH-ASPECT-RATIO MICROMACHINING VIA DEEP X-RAY-LITHOGRAPHY, Proceedings of the IEEE, 86(8), 1998, pp. 1586-1593
Authors:
NORWOOD RA
HOLMAN J
SHACKLETTE LW
EMO S
TABATABAIE N
GUCKEL H
Citation: Ra. Norwood et al., FAST, LOW INSERTION-LOSS OPTICAL SWITCH USING LITHOGRAPHICALLY DEFINED ELECTROMAGNETIC MICROACTUATORS AND POLYMERIC PASSIVE ALIGNMENT STRUCTURES, Applied physics letters, 73(22), 1998, pp. 3187-3189
Authors:
BURNS DW
HORNING RD
HERB WR
ZOOK JD
GUCKEL H
Citation: Dw. Burns et al., SEALED-CAVITY RESONANT MICROBEAM ACCELEROMETER, Sensors and actuators. A, Physical, 53(1-3), 1996, pp. 249-255
Authors:
GUCKEL H
EARLES T
KLEIN J
ZOOK JD
OHNSTEIN T
Citation: H. Guckel et al., ELECTROMAGNETIC LINEAR-ACTUATORS WITH INDUCTIVE POSITION SENSING, Sensors and actuators. A, Physical, 53(1-3), 1996, pp. 386-391
Authors:
ZOOK JD
BURNS DW
HERB WR
GUCKEL H
KANG JW
AHN YC
Citation: Jd. Zook et al., OPTICALLY-EXCITED SELF-RESONANT MICROBEAMS, Sensors and actuators. A, Physical, 52(1-3), 1996, pp. 92-98
Authors:
GUCKEL H
Citation: H. Guckel, MICROMECHANISMS, Philosophical transactions-Royal Society of London. Physical sciences and engineering, 353(1703), 1995, pp. 355-366
Authors:
BURNS DW
ZOOK JD
HORNING RD
HERB WR
GUCKEL H
Citation: Dw. Burns et al., SEALED-CAVITY RESONANT MICROBEAM PRESSURE SENSOR, Sensors and actuators. A, Physical, 48(3), 1995, pp. 179-186
Authors:
GUCKEL H
SKROBIS KJ
KLEIN J
CHRISTENSON TR
Citation: H. Guckel et al., MICROMECHANICS VIA X-RAY ASSISTED PROCESSING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 2559-2564
Authors:
JUNG TS
GUCKEL H
SEEFELDT J
OTT G
AHN YC
Citation: Ts. Jung et al., A FULLY INTEGRATED, MONOLITHIC, CRYOGENIC CHARGE SENSITIVE PREAMPLIFIER USING N-CHANNEL JFETS AND POLYSILICON RESISTORS, IEEE transactions on nuclear science, 41(4), 1994, pp. 1240-1245
Authors:
GUCKEL H
Citation: H. Guckel, DEEP X-RAY-LITHOGRAPHY FOR MICROMECHANICS VIA SYNCHROTRON-RADIATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 79(1-4), 1993, pp. 247-248
Risultati:
1-17
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