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Results: 1-25/26
Authors:
MANDL S
GUNZEL R
RAUSCHENBACH B
HILKE R
KNOSEL E
KUNANZ K
Citation: S. Mandl et al., CHARACTERIZATION OF DRILLS IMPLANTED WITH NITROGEN PLASMA IMMERSION ION-IMPLANTATION, Surface & coatings technology, 104, 1998, pp. 161-167
Authors:
BRUCKNER J
GUNZEL R
RICHTER E
MOLLER W
Citation: J. Bruckner et al., METAL PLASMA IMMERSION ION-IMPLANTATION AND DEPOSITION (MPIIID) - CHROMIUM ON MAGNESIUM, Surface & coatings technology, 104, 1998, pp. 227-230
Authors:
MANDL S
GUNZEL R
RICHTER E
MOLLER W
Citation: S. Mandl et al., NITRIDING OF AUSTENITIC STAINLESS-STEELS USING PLASMA IMMERSION ION-IMPLANTATION, Surface & coatings technology, 101(1-3), 1998, pp. 372-376
Authors:
PARASCANDOLA S
GUNZEL R
GROTZSCHEL R
RICHTER E
MOLLER W
Citation: S. Parascandola et al., ANALYSIS OF DEUTERIUM INDUCED NUCLEAR-REACTIONS GIVING CRITERIA FOR THE FORMATION PROCESS OF EXPANDED AUSTENITE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 138, 1998, pp. 1281-1285
Authors:
MANDL S
GUNZEL R
MOLLER W
Citation: S. Mandl et al., SHEATH AND PRESHEATH DYNAMICS IN PLASMA IMMERSION ION-IMPLANTATION, Journal of physics. D, Applied physics, 31(9), 1998, pp. 1109-1117
Authors:
NAKAMURA K
MANDL S
BRUTSCHER J
GUNZEL R
MOLLER W
Citation: K. Nakamura et al., DEVELOPMENT OF A NEW TECHNIQUE FOR HIGH-ENERGY SECONDARY-ELECTRON MEASUREMENTS IN PLASMA IMMERSION ION-IMPLANTATION, Plasma sources science & technology, 6(1), 1997, pp. 86-90
Authors:
BRENSCHEIDT F
MANDL S
GUNZEL R
WIESER E
MOLLER W
FISCHER W
HERRMANN M
Citation: F. Brenscheidt et al., TRIBOLOGICAL PROPERTIES OF SILICON-NITRIDE CERAMICS MODIFIED BY TITANIUM AND SUBSEQUENT OXYGEN IMPLANTATION, Surface & coatings technology, 97(1-3), 1997, pp. 675-679
Authors:
GUNZEL R
BRUTSCHER J
MANDL S
MOLLER W
Citation: R. Gunzel et al., UTILIZATION OF PLASMA SOURCE ION-IMPLANTATION FOR TRIBOLOGICAL APPLICATIONS, Surface & coatings technology, 96(1), 1997, pp. 16-21
Authors:
GUNZEL R
MOLLER W
WIESER F
Citation: R. Gunzel et al., PAPERS PRESENTED AT THE 3RD INTERNATIONAL WORKSHOP ON PLASMA-BASED ONIMPLANTATION, DRESDEN, GERMANY, 15-18 SEPTEMBER 1996 - PREFACE, Surface & coatings technology, 93(2-3), 1997, pp. 157-157
Authors:
BRUTSCHER J
GUNZEL R
MOLLER W
Citation: J. Brutscher et al., PLASMA IMMERSION ION-IMPLANTATION USING PULSED PLASMA WITH DC AND PULSED HIGH VOLTAGES, Surface & coatings technology, 93(2-3), 1997, pp. 197-202
Authors:
KORZEC D
RAIKO V
ENGEMANN J
GUNZEL R
BRUTSCHER J
MOLLER W
Citation: D. Korzec et al., APPLICATION OF THE ECR SLOT ANTENNA PLASMA SOURCE FOR ION-IMPLANTATION, Surface & coatings technology, 93(2-3), 1997, pp. 217-224
Authors:
MANDL S
REUTHER H
BRUTSCHER J
GUNZEL R
MOLLER W
Citation: S. Mandl et al., MEASURED AND CALCULATED DOSE DISTRIBUTION FOR 2D PLASMA IMMERSION ION-IMPLANTATION, Surface & coatings technology, 93(2-3), 1997, pp. 229-233
Authors:
MANDL S
BRUTSCHER J
GUNZEL R
MOLLER W
Citation: S. Mandl et al., ION ENERGY-DISTRIBUTION IN PLASMA IMMERSION ION-IMPLANTATION, Surface & coatings technology, 93(2-3), 1997, pp. 234-237
Authors:
BARRADAS NP
MAAS AJH
MANDL S
GUNZEL R
Citation: Np. Barradas et al., SHORT-PULSE PLASMA IMMERSION ION-IMPLANTATION OF OXYGEN INTO SILICON - DETERMINATION OF THE ENERGY-DISTRIBUTION, Surface & coatings technology, 93(2-3), 1997, pp. 238-241
Authors:
NAKAMURA K
MANDL S
BRUTSCHER J
GUNZEL R
MOLLER W
Citation: K. Nakamura et al., INCIDENT ION MONITORING DURING PLASMA IMMERSION ION-IMPLANTATION BY DIRECT MEASUREMENTS OF HIGH-ENERGY SECONDARY ELECTRONS, Surface & coatings technology, 93(2-3), 1997, pp. 242-246
MODIFICATION OF THE OUTGASSING RATE OF STAINLESS-STEEL SURFACES BY PLASMA IMMERSION ION-IMPLANTATION
Authors:
GARKE B
EDELMANN C
GUNZEL R
BRUTSCHER J
Citation: B. Garke et al., MODIFICATION OF THE OUTGASSING RATE OF STAINLESS-STEEL SURFACES BY PLASMA IMMERSION ION-IMPLANTATION, Surface & coatings technology, 93(2-3), 1997, pp. 318-326
Authors:
MANDL S
BARRADAS NP
BRUTSCHER J
GUNZEL R
MOLLER W
Citation: S. Mandl et al., COMPARISON OF MEASURED AND CALCULATED DOSE FOR PLASMA SOURCE ION-IMPLANTATION INTO 3-D OBJECTS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 996-999
Authors:
BARRADAS NP
MAAS AJH
MANDL S
GUNZEL R
Citation: Np. Barradas et al., ALPHA-ELASTIC RECOIL DETECTION ANALYSIS OF THE ENERGY-DISTRIBUTION OFOXYGEN IONS IMPLANTED INTO SILICON WITH PLASMA IMMERSION ION-IMPLANTATION, Journal of applied physics, 81(10), 1997, pp. 6642-6650
Authors:
MANDL S
BRUTSCHER J
GUNZEL R
MOLLER W
Citation: S. Mandl et al., INHERENT POSSIBILITIES AND RESTRICTIONS OF PLASMA IMMERSION ION-IMPLANTATION SYSTEMS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 2701-2706
Authors:
BRUTSCHER J
GUNZEL R
MOLLER W
Citation: J. Brutscher et al., SHEATH DYNAMICS IN PLASMA IMMERSION ION-IMPLANTATION, Plasma sources science & technology, 5(1), 1996, pp. 54-60
Authors:
GUNZEL R
BRUTSCHER J
Citation: R. Gunzel et J. Brutscher, SHEATH DYNAMICS IN PLASMA IMMERSION ION-IMPLANTATION, Surface & coatings technology, 85(1-2), 1996, pp. 98-104
Authors:
BENDER H
BRUTSCHER J
ENSINGER W
GUNZEL R
HALDER J
KLEIN H
RAUSCHENBACH B
SCHAFER J
SEILER B
THOMAE R
Citation: H. Bender et al., INFLUENCE OF PLASMA-DENSITY AND PLASMA SHEATH DYNAMICS ON THE ION-IMPLANTATION BY PLASMA IMMERSION TECHNIQUE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 113(1-4), 1996, pp. 266-269
Authors:
MANDL S
BRUTSCHER J
GUNZEL R
MOLLER W
Citation: S. Mandl et al., DESIGN CONSIDERATIONS FOR PLASMA IMMERSION ION-IMPLANTATION SYSTEMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 112(1-4), 1996, pp. 252-254
Authors:
THOMAE RW
SEILER B
BENDER H
BRUTSCHER J
GUNZEL R
HALDER J
KLEIN H
MULLER J
SARSTEDT M
Citation: Rw. Thomae et al., HIGH-CURRENT ION-IMPLANTATION BY PLASMA IMMERSION TECHNIQUE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 99(1-4), 1995, pp. 569-572
Authors:
BOHM G
GUNZEL R
Citation: G. Bohm et R. Gunzel, 50-KV PULSE-GENERATOR FOR PLASMA SOURCE ION-IMPLANTATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(2), 1994, pp. 821-822