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Results: 1-25/30
Authors:
Kulisch, W
Popov, C
Zambov, L
Citation: W. Kulisch et al., Deposition, characterization and applications of nitrogen-rich amorphous carbon nitride films, NEW DIAM FR, 11(1), 2001, pp. 53-76
Authors:
Popov, C
Bulir, J
Zambov, L
Jelinek, M
Delplancke-Ogletree, MP
Kulisch, W
Citation: C. Popov et al., Comparative characterization of nitrogen-rich CNx films prepared by different ICP-CVD techniques, J PHYS IV, 11(PR3), 2001, pp. 731-738
Authors:
Jelinek, M
Kulisch, W
Delplancke-Ogletree, MP
Lancok, J
Jastrabik, L
Chvostova, D
Popov, C
Bulir, J
Citation: M. Jelinek et al., Mechanical and optical properties of CNx films with high N/C ratio, APPL PHYS A, 73(2), 2001, pp. 167-170
Authors:
Plass, MF
Popov, C
Ivanov, B
Mandl, S
Jelinek, H
Zambov, LM
Kulisch, W
Citation: Mf. Plass et al., Correlation between photoluminescence, optical and structural properties of amorphous nitrogen-rich carbon nitride films, APPL PHYS A, 72(1), 2001, pp. 21-27
Authors:
Klett, A
Freudenstein, R
Plass, MF
Kulisch, W
Citation: A. Klett et al., Depth resolved stress investigations of c-BN thin films, DIAM RELAT, 10(9-10), 2001, pp. 1875-1880
Authors:
Bulir, J
Delplancke-Ogletree, MP
Lancok, J
Jelinek, M
Popov, C
Klett, A
Kulisch, W
Citation: J. Bulir et al., Preparation of nitrogen-rich CNx films with inductively coupled plasma CVDand pulsed laser deposition, DIAM RELAT, 10(9-10), 2001, pp. 1901-1909
Authors:
Popov, C
Plass, MF
Zambov, LM
Kulisch, W
Citation: C. Popov et al., The effect of d.c. substrate bias on the properties of nitrogen-rich CNx films, SURF COAT, 142, 2001, pp. 688-692
Authors:
Trenkler, T
Hantschel, T
Stephenson, R
De Wolf, P
Vandervorst, W
Hellemans, L
Malave, A
Buchel, D
Oesterschulze, E
Kulisch, W
Niedermann, P
Sulzbach, T
Ohlsson, O
Citation: T. Trenkler et al., Evaluating probes for "electrical" atomic force microscopy, J VAC SCI B, 18(1), 2000, pp. 418-427
Authors:
Zambov, LM
Popov, C
Plass, MF
Bock, A
Jelinek, M
Lancok, J
Masseli, K
Kulisch, W
Citation: Lm. Zambov et al., Capacitance humidity sensor with carbon nitride detecting element, APPL PHYS A, 70(5), 2000, pp. 603-606
Authors:
Zambov, LM
Popov, C
Abedinov, N
Plass, MF
Kulisch, W
Gotszalk, T
Grabiec, P
Rangelow, IW
Kassing, R
Citation: Lm. Zambov et al., Gas-sensitive properties of nitrogen-rich carbon nitride films, ADVAN MATER, 12(9), 2000, pp. 656
Authors:
Popov, C
Plass, MF
Zambov, L
Kulisch, W
Citation: C. Popov et al., Stability of carbon nitride films prepared from volatile CN species via atomic transport reactions, DIAM RELAT, 9(3-6), 2000, pp. 539-543
Authors:
Klett, A
Freudenstein, R
Plass, MF
Kulisch, W
Citation: A. Klett et al., Correlation between stress values of cubic boron nitride thin films and intrinsic film properties or the infrared peak position, SURF COAT, 125(1-3), 2000, pp. 190-195
Authors:
Popov, C
Plass, MF
Zambov, L
Bulir, J
Delplancke-Ogletree, MP
Kulisch, W
Citation: C. Popov et al., Physical properties of carbon nitride films synthesized using atomic transport reactions, SURF COAT, 125(1-3), 2000, pp. 278-283
Authors:
Kulisch, W
Popov, C
Zambov, L
Bulir, J
Delplancke-Ogletree, MP
Lancok, J
Jelinek, M
Citation: W. Kulisch et al., Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films, THIN SOL FI, 377, 2000, pp. 148-155
Authors:
Popov, C
Zambov, LM
Plass, MF
Kulisch, W
Citation: C. Popov et al., Optical, electrical and mechanical properties of nitrogen-rich carbon nitride films deposited by inductively coupled plasma chemical vapor deposition, THIN SOL FI, 377, 2000, pp. 156-162
Authors:
Kulisch, W
Freudenstein, R
Klett, A
Plass, MF
Citation: W. Kulisch et al., A concept for the deposition of adherent cubic boron nitride films, THIN SOL FI, 377, 2000, pp. 170-176
Authors:
Kulisch, W
Citation: W. Kulisch, Deposition of diamond-like superhard materials in the B/C/N system, PHYS ST S-A, 177(1), 2000, pp. 63-79
Authors:
Popov, C
Plass, MF
Kulisch, W
Citation: C. Popov et al., Carbon nitride films prepared by inductively coupled plasma chemical vapour deposition from a solid carbon source, J PHYS IV, 9(P8), 1999, pp. 725-732
Authors:
Ivanov, BL
Zambov, LM
Georgiev, GT
Popov, C
Plass, MF
Kulisch, W
Citation: Bl. Ivanov et al., Low-pressure CVD of carbon nitride using triazine-containing precursors, CHEM VAPOR, 5(6), 1999, pp. 265-273
Authors:
Klett, A
Malave, A
Freudenstein, R
Plass, MF
Kulisch, W
Citation: A. Klett et al., Correlation between stress profiles of cubic boron nitride thin films and the phase sequence revealed from infrared data, APPL PHYS A, 69(6), 1999, pp. 653-656
Authors:
Popov, C
Plass, MF
Bergmaier, A
Kulisch, W
Citation: C. Popov et al., Synthesis of carbon nitride films by low-power inductively coupled plasma-activated transport reactions from a solid carbon source, APPL PHYS A, 69(2), 1999, pp. 241-244
Authors:
Ackermann, L
Kulisch, W
Citation: L. Ackermann et W. Kulisch, Investigation of diamond etching and growth by in situ scanning tunneling microscopy, DIAM RELAT, 8(7), 1999, pp. 1256-1260
Authors:
Kulisch, W
Delplancke-Ogletree, MP
Bulir, J
Jelinek, M
Jurek, K
Zemek, J
Klimovic, J
Citation: W. Kulisch et al., Characterization of magnetron sputtered carbon nitride films, DIAM RELAT, 8(6), 1999, pp. 1039-1045
Authors:
Malave, A
Oesterschulze, E
Kulisch, W
Trenkler, T
Hantschel, T
Vandervorst, W
Citation: A. Malave et al., Diamond tips and cantilevers for the characterization of semiconductor devices, DIAM RELAT, 8(2-5), 1999, pp. 283-287
Authors:
Popov, C
Jelinek, M
Ivanov, B
Tomov, RI
Kulisch, W
Citation: C. Popov et al., Laser approaches for deposition of carbon nitride films - chemical vapour deposition and ablation, DIAM RELAT, 8(2-5), 1999, pp. 577-581