Authors:
SHUL RJ
LOVEJOY ML
WORD JC
HOWARD AJ
RIEGER DJ
KRAVITZ SH
Citation: Rj. Shul et al., HIGH-RATE REACTIVE ION ETCH AND ELECTRON-CYCLOTRON-RESONANCE ETCHING OF GAAS VIA HOLES USING THICK POLYIMIDE AND PHOTORESIST MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(3), 1997, pp. 657-659
Authors:
REN F
VARTULI CB
PEARTON SJ
ABERNATHY CR
DONOVAN SM
MACKENZIE JD
SHUL RJ
ZOLPER JC
LOVEJOY ML
BACA AG
HAGEROTTCRAWFORD M
JONES KA
Citation: F. Ren et al., COMPARISON OF OHMIC METALLIZATION SCHEMES FOR INGAALN, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 802-806
Authors:
VARTULI CB
PEARTON SJ
ABERNATHY CR
MACKENZIE JD
SHUL RJ
ZOLPER JC
LOVEJOY ML
BACA AG
HAGEROTTCRAWFORD M
Citation: Cb. Vartuli et al., THERMAL-STABILITY OF W, WSIX, AND TI AL OHMIC CONTACTS TO INGAN, INN,AND INALN/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3520-3522
Authors:
DODD PE
LOVEJOY ML
LUNDSTROM MS
MELLOCH MR
WOODALL JM
PETTIT D
Citation: Pe. Dodd et al., DEMONSTRATION OF NPN INAS BIPOLAR-TRANSISTORS WITH INVERTED BASE DOPING, IEEE electron device letters, 17(4), 1996, pp. 166-168
Authors:
SHUL RJ
LOVEJOY ML
HETHERINGTON DL
RIEGER DJ
KLEM JF
MELLOCH MR
Citation: Rj. Shul et al., PLASMA-INDUCED DAMAGE OF GAAS PN-JUNCTION DIODES USING ELECTRON-CYCLOTRON-RESONANCE GENERATED CL-2 AR, BCL3/AR, CL-2/BCL3/AR, AND SICL4/AR PLASMAS/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(1), 1995, pp. 27-33
Authors:
LOVEJOY ML
HOWARD AJ
ZAVADIL KR
RIEGER DJ
SHUL RJ
BARNES PA
Citation: Ml. Lovejoy et al., LOW-RESISTIVITY OHMIC CONTACTS TO MODERATELY DOPED N-GAAS WITH LOW-TEMPERATURE PROCESSING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 758-762
Authors:
SHUL RJ
LOVEJOY ML
BACA AG
ZOLPER JC
RIEGER DJ
HAFICH MJ
CORLESS RF
VARTULI CB
Citation: Rj. Shul et al., PLASMA-INDUCED DAMAGE OF GAAS DURING ETCHING OF REFRACTORY-METAL CONTACTS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 912-917
Citation: J. Park et al., GERMANIUM-DOPED AND TELLURIUM-DOPED GAAS FOR NONALLOYED P-TYPE AND N-TYPE OHMIC CONTACTS, Applied physics letters, 67(7), 1995, pp. 968-970
Authors:
SHUL RJ
LOVEJOY ML
HETHERINGTON DL
RIEGER DJ
VAWTER GA
KLEM JF
MELLOCH MR
Citation: Rj. Shul et al., INVESTIGATION OF PLASMA ETCH INDUCED DAMAGE IN COMPOUND SEMICONDUCTOR-DEVICES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1351-1355
Authors:
LOVEJOY ML
MELLOCH MR
LUNDSTROM MS
KEYES BR
AHRENKIEL RK
Citation: Ml. Lovejoy et al., TEMPERATURE-DEPENDENCE OF MINORITY HOLE MOBILITY IN N-GAAS MEASURED WITH A NEW VARIABLE-TEMPERATURE TECHNIQUE(), Journal of electronic materials, 23(7), 1994, pp. 669-673
Authors:
LOVEJOY ML
ZOLPER JC
SHERWIN ME
BACA AG
SHUL RJ
RIEGER DJ
KLEM JF
Citation: Ml. Lovejoy et al., NONALLOYED, REFRACTORY-METAL CONTACT OPTIMIZATION WITH SHALLOW IMPLANTATIONS OF ZN AND MG, Thin solid films, 253(1-2), 1994, pp. 496-500
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ZOLPER JC
BACA AG
SHUL RJ
HOWARD AJ
RIEGER DJ
SHERWIN ME
LOVEJOY ML
HJALMARSON HP
DRAPER BL
KLEM JF
HIETALA VM
Citation: Jc. Zolper et al., AN ALL-IMPLANTED, SELF-ALIGNED, GAAS JFET WITH A NONALLOYED W P+-GAASOHMIC GATE CONTACT/, I.E.E.E. transactions on electron devices, 41(7), 1994, pp. 1078-1082
Authors:
HOWARD AJ
RYE RR
RICCO AJ
RIEGER DJ
LOVEJOY ML
SLOAN LR
MITCHELL MA
Citation: Aj. Howard et al., NEW METHODS FOR CIRCUIT FABRICATION ON POLY(TETRAFLUOROETHYLENE) SUBSTRATES, Journal of the Electrochemical Society, 141(12), 1994, pp. 3556-3561
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Authors:
HARMON ES
LOVEJOY ML
MELLOCH MR
LUNDSTROM MS
DELYON TJ
WOODALL JM
Citation: Es. Harmon et al., EXPERIMENTAL-OBSERVATION OF A MINORITY ELECTRON-MOBILITY ENHANCEMENT IN DEGENERATELY DOPED P-TYPE GAAS, Applied physics letters, 63(4), 1993, pp. 536-538