AAAAAA
Results: 26-42/42
Authors:
MAIERSCHNEIDER D
MAIBACH J
OBERMEIER E
SCHNEIDER D
Citation: D. Maierschneider et al., VARIATIONS IN YOUNGS MODULUS AND INTRINSIC STRESS OF LPCVD-POLYSILICON DUE TO HIGH-TEMPERATURE ANNEALING, Journal of micromechanics and microengineering, 5(2), 1995, pp. 121-124
Authors:
WERNER M
DORSCH O
OBERMEIER E
Citation: M. Werner et al., HIGH-TEMPERATURE PRESSURE SENSOR USING P-TYPE DIAMOND PIEZORESISTORS, DIAMOND AND RELATED MATERIALS, 4(5-6), 1995, pp. 873-876
Authors:
DORSCH O
WERNER M
OBERMEIER E
Citation: O. Dorsch et al., DRY-ETCHING OF UNDOPED AND BORON-DOPED POLYCRYSTALLINE DIAMOND FILMS, DIAMOND AND RELATED MATERIALS, 4(4), 1995, pp. 456-459
Authors:
MOLLER S
LIN J
OBERMEIER E
Citation: S. Moller et al., MATERIAL AND DESIGN CONSIDERATIONS FOR LOW-POWER MICROHEATER MODULES FOR GAS-SENSOR APPLICATIONS, Sensors and actuators. B, Chemical, 25(1-3), 1995, pp. 343-346
Authors:
PLOG C
MAUNZ W
KURZWEIL P
OBERMEIER E
SCHEIBE C
Citation: C. Plog et al., COMBUSTION GAS SENSITIVITY OF ZEOLITE LAYERS ON THIN-FILM CAPACITORS, Sensors and actuators. B, Chemical, 25(1-3), 1995, pp. 403-406
Authors:
MUTSCHALL D
OBERMEIER E
Citation: D. Mutschall et E. Obermeier, A CAPACITIVE CO2 SENSOR WITH ON-CHIP HEATING, Sensors and actuators. B, Chemical, 25(1-3), 1995, pp. 412-414
Authors:
SCHEIBE C
OBERMEIER E
MAUNZ W
PLOG C
Citation: C. Scheibe et al., DEVELOPMENT OF A HIGH-TEMPERATURE BASIC DEVICE FOR CHEMICAL SENSORS BASED ON AN IDC WITH ON-CHIP HEATING, Sensors and actuators. B, Chemical, 25(1-3), 1995, pp. 584-587
Authors:
JOHNSTON C
CHALKER PR
BUCKLEYGOLDER IM
VANROSSUM M
WERNER M
OBERMEIER E
Citation: C. Johnston et al., HIGH-TEMPERATURE CONTACTS TO CHEMICALLY VAPOR-DEPOSITED DIAMOND FILMS- RELIABILITY ISSUES, Materials science & engineering. B, Solid-state materials for advanced technology, 29(1-3), 1995, pp. 206-210
Authors:
WERNER M
DORSCH O
BAERWIND HU
OBERMEIER E
JOHNSTON C
CHALKER PR
ROMANI S
Citation: M. Werner et al., THE EFFECT OF METALLIZATION ON THE OHMIC CONTACT RESISTIVITY TO HEAVILY B-DOPED POLYCRYSTALLINE DIAMOND FILMS, I.E.E.E. transactions on electron devices, 42(7), 1995, pp. 1344-1351
Authors:
WERNER M
DORSCH O
BAERWIND HU
ERSOY A
OBERMEIER E
JOHNSTON C
ROMANI S
CHALKER PR
MOORE V
BUCKLEYGOLDER IM
Citation: M. Werner et al., VERY-LOW RESISTIVITY AL-SI OHMIC CONTACTS TO BORON-DOPED POLYCRYSTALLINE DIAMOND FILMS, DIAMOND AND RELATED MATERIALS, 3(4-6), 1994, pp. 983-985
Authors:
WERNER M
DORSCH O
BAERWIND HU
OBERMEIER E
HAASE L
SEIFERT W
RINGHANDT A
JOHNSTON C
ROMANI S
BISHOP H
CHALKER PR
Citation: M. Werner et al., CHARGE-TRANSPORT IN HEAVILY B-DOPED POLYCRYSTALLINE DIAMOND FILMS, Applied physics letters, 64(5), 1994, pp. 595-597
Authors:
LIN J
OBERMEIER E
Citation: J. Lin et E. Obermeier, CAPACITIVE THIN-FILM GAS SENSOR WITH SIGNAL-PROCESSING SYSTEM FOR DETERMINATION OF SO2, Sensors and actuators. B, Chemical, 16(1-3), 1993, pp. 319-322
Authors:
LIN J
HEURICH M
SCHLICHTING V
OBERMEIER E
Citation: J. Lin et al., CHARACTERIZATION AND OPTIMIZATION OF A CO2-SENSITIVE ORGANICALLY-MODIFIED SILICATE WITH RESPECT TO ITS USE AS A GAS SENSOR, Sensors and actuators. B, Chemical, 14(1-3), 1993, pp. 528-529
Authors:
LIN J
HEURICH M
OBERMEIER E
Citation: J. Lin et al., MANUFACTURE AND EXAMINATION OF VARIOUS SPIN-ON GLASS-FILMS WITH RESPECT TO THEIR HUMIDITY-SENSITIVE PROPERTIES, Sensors and actuators. B, Chemical, 13(1-3), 1993, pp. 104-106
Authors:
DICKERT FL
BRUCKDORFER T
FEIGL H
HAUNSCHILD A
KUSCHOW V
OBERMEIER E
BULST WE
KNAUER U
MAGES G
Citation: Fl. Dickert et al., SUPRAMOLECULAR DETECTION OF SOLVENT VAPORS WITH QMB AND SAW DEVICES, Sensors and actuators. B, Chemical, 13(1-3), 1993, pp. 297-301
Authors:
POLLAKDIENER G
OBERMEIER E
Citation: G. Pollakdiener et E. Obermeier, HEAT-CONDUCTION MICROSENSOR BASED ON SILICON TECHNOLOGY FOR THE ANALYSIS OF 2-COMPONENT AND 3-COMPONENT GAS-MIXTURES, Sensors and actuators. B, Chemical, 13(1-3), 1993, pp. 345-347
Authors:
DICKERT FL
ZWISSLER GK
OBERMEIER E
Citation: Fl. Dickert et al., LIQUID-CRYSTALS ON INTERDIGITAL STRUCTURES - APPLICATIONS AS CAPACITIVE CHEMICAL SENSORS, Berichte der Bunsengesellschaft fur Physikalische Chemie, 97(2), 1993, pp. 184-188