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Results:
1-19
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Results: 19
Authors:
SETSUHARA Y
KAMAI M
MIYAKE S
MUSIL J
Citation: Y. Setsuhara et al., INDUCTIVELY-COUPLED-PLASMA-ASSISTED PLANAR MAGNETRON DISCHARGE FOR ENHANCED IONIZATION OF SPUTTERED ATOMS, JPN J A P 1, 36(7B), 1997, pp. 4568-4571
Authors:
OHTSU Y
TOCHITANI G
FUJITA H
ZHANG JQ
SETSUHARA Y
MIYAKE S
Citation: Y. Ohtsu et al., MEASUREMENTS OF ION ENERGY-DISTRIBUTION FUNCTIONS IN AN RADIO-FREQUENCY PLASMA EXCITED WITH AN M=0 MODE HELICAL ANTENNA AND THIN-FILM PREPARATION, JPN J A P 1, 36(7B), 1997, pp. 4620-4624
Authors:
MISINA M
SETSUHARA Y
MIYAKE S
Citation: M. Misina et al., ION-ASSISTED DEPOSITION OF CRYSTALLINE TINI THIN-FILMS BY ELECTRON-CYCLOTRON-RESONANCE PLASMA-ENHANCED SPUTTERING, JPN J A P 1, 36(6A), 1997, pp. 3629-3634
Authors:
ZHANG JQ
SETSUHARA Y
MIYAKE S
KYOH B
Citation: Jq. Zhang et al., FORMATION OF CARBON NITRIDE FILMS BY HELICON WAVE PLASMA-ENHANCED DC SPUTTERING, JPN J A P 1, 36(11), 1997, pp. 6894-6899
Authors:
MISINA M
SETSUHARA Y
MIYAKE S
Citation: M. Misina et al., ELECTRON-CYCLOTRON-RESONANCE PLASMA-ENHANCED DIRECT-CURRENT SPUTTERING DISCHARGE WITH MAGNETIC-MIRROR PLASMA-CONFINEMENT, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 1922-1928
Authors:
SETSUHARA Y
SUZUKI T
MAKINO Y
MIYAKE S
SAKATA T
MORI H
Citation: Y. Setsuhara et al., PHASE VARIATION AND PROPERTIES OF (TI, AL)N FILMS PREPARED BY ION-BEAM-ASSISTED DEPOSITION, Surface & coatings technology, 97(1-3), 1997, pp. 254-258
Authors:
MIYAKE S
SETSUHARA Y
ZHANG JQ
KAMAI M
KYOH B
Citation: S. Miyake et al., INDUCTIVELY-COUPLED REACTIVE HIGH-DENSITY PLASMAS DESIGNED FOR SPUTTER-DEPOSITION, Surface & coatings technology, 97(1-3), 1997, pp. 768-772
Authors:
SETSUHARA Y
SUZUKI T
TANAKA Y
MIYAKE S
SUZUKI M
KUMAGAI M
OGATA K
KOHATA M
HIGETA K
EINISHI T
SUZUKI Y
SHIMOITANI Y
MOTONAMI Y
Citation: Y. Setsuhara et al., INTERFACIAL STRUCTURE CONTROL OF CUBIC BORON-NITRIDE FILMS PREPARED BY ION-BEAM-ASSISTED DEPOSITION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 851-856
Authors:
KUMAGAI M
SUZUKI M
SUZUKI T
TANAKA Y
SETSUHARA Y
MIYAKE S
OGATA K
KOHATA M
HIGETA K
EINISHI T
SUZUKI Y
SHIMOITANI Y
MOTONAMI Y
Citation: M. Kumagai et al., PROPERTIES OF DEPTH-PROFILE CONTROLLED BORON-NITRIDE FILMS PREPARED BY ION-BEAM-ASSISTED DEPOSITION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 977-980
Authors:
EBE A
TAKAHASHI E
KURATANI N
NISHIYAMA S
IMAI O
OGATA K
SETSUHARA Y
MIYAKE S
Citation: A. Ebe et al., INTERFACE STRUCTURE BETWEEN POLYIMIDE FILM SUBSTRATE AND COPPER FILM PREPARED BY ION-BEAM AND VAPOR-DEPOSITION (IVD) METHOD, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 121(1-4), 1997, pp. 207-211
Authors:
ZHANG JQ
SETSUHARA Y
ARIYASU T
MIYAKE S
Citation: Jq. Zhang et al., CHARACTERIZATION OF HELICON WAVE PLASMA DESIGNED FOR DIRECT-CURRENT SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(4), 1996, pp. 2163-2168
Authors:
EBE A
TAKAHASHI E
IWAMOTO Y
KURATANI N
NISHIYAMA S
IMAI O
OGATA K
SETSUHARA Y
MIYAKE S
Citation: A. Ebe et al., IMPROVEMENT OF THE ADHESION TO POLYIMIDE SUBSTRATES OF COPPER-FILMS PREPARED BY AN ION-BEAM AND VAPOR-DEPOSITION (IVD) METHOD, Thin solid films, 282(1-2), 1996, pp. 356-359
Authors:
MATSUOKA M
ISOTANI S
MIYAKE S
SETSUHARA Y
OGATA K
KURATANI N
Citation: M. Matsuoka et al., EFFECTS OF ION ENERGY AND ARRIVAL RATE ON THE COMPOSITION OF ZIRCONIUM-OXIDE FILMS PREPARED BY ION-BEAM-ASSISTED DEPOSITION, Journal of applied physics, 80(2), 1996, pp. 1177-1181
Authors:
SETSUHARA Y
SUZUKI T
MAKINO Y
MIYAKE S
SAKATA T
MORI H
Citation: Y. Setsuhara et al., SYNTHESIS OF(TI, AL)N FILMS BY ION-BEAM-ASSISTED DEPOSITION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 106(1-4), 1995, pp. 120-125
Authors:
TAHARA H
ZHANG LL
HIRAMATSU M
YASUI T
YOSHIKAWA T
SETSUHARA Y
MIYAKE S
Citation: H. Tahara et al., EXPOSURE OF SPACE MATERIAL INSULATORS TO ENERGETIC IONS, Journal of applied physics, 78(6), 1995, pp. 3719-3723
Authors:
SETSUHARA Y
OHSAKO H
MAKINO Y
MIYAKE S
Citation: Y. Setsuhara et al., SYNTHESIS OF TI-AL ALLOYS BY ION-BEAM-ENHANCED DEPOSITION, Surface & coatings technology, 66(1-3), 1994, pp. 495-498
Authors:
MAKINO Y
SETSUHARA Y
MIYAKE S
Citation: Y. Makino et al., MICROSTRUCTURE OF TITANIUM-OXIDE FILMS SYNTHESIZED BY ION-BEAM DYNAMIC MIXING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 91(1-4), 1994, pp. 696-700
Authors:
SETSUHARA Y
AOKI H
MIYAKE S
CHAYAHARA A
SATOU M
Citation: Y. Setsuhara et al., TITANIUM-OXIDE FILMS PREPARED BY DYNAMIC ION MIXING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1406-1408
Authors:
OGATA K
YAMAGUCHI K
KIYAMA S
HIRANO H
SHIMIZU S
KOHATA M
MIYANO T
SETSUHARA Y
MIYAKE S
Citation: K. Ogata et al., SYNTHESIS OF ALUMINUM-OXIDE THIN-FILMS BY ION-BEAM AND VAPOR-DEPOSITION TECHNOLOGY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1423-1426
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